JPH0118859Y2 - - Google Patents

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Publication number
JPH0118859Y2
JPH0118859Y2 JP1983007786U JP778683U JPH0118859Y2 JP H0118859 Y2 JPH0118859 Y2 JP H0118859Y2 JP 1983007786 U JP1983007786 U JP 1983007786U JP 778683 U JP778683 U JP 778683U JP H0118859 Y2 JPH0118859 Y2 JP H0118859Y2
Authority
JP
Japan
Prior art keywords
workpiece
vacuum pump
separator
liquid
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983007786U
Other languages
Japanese (ja)
Other versions
JPS59114470U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP778683U priority Critical patent/JPS59114470U/en
Publication of JPS59114470U publication Critical patent/JPS59114470U/en
Application granted granted Critical
Publication of JPH0118859Y2 publication Critical patent/JPH0118859Y2/ja
Granted legal-status Critical Current

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Description

【考案の詳細な説明】 [考案の技術分野] 本考案は、例えば自動車のラジエータ又はブレ
ーキ・オイル・パイプ或いは冷凍装置の冷媒容器
等のワークにラジエータ液又はブレーキ・オイル
或いは冷媒等の液体を充填する前に、予め前記ワ
ークを真空引きする場合、前記ワーク内又はこの
ワークと真空ポンプとの間に接続された配管部に
付着した液体が気化して真空ポンプに吸込まれ、
真空ポンプのパツキン類及びポンプ室壁部材等を
腐食、膨潤等して真空引きに支障を来たすことの
ないように改良した真空引き装置に関する。
[Detailed description of the invention] [Technical field of the invention] The invention is for filling a workpiece such as a radiator or brake oil pipe of an automobile or a refrigerant container of a refrigeration system with a liquid such as radiator fluid, brake oil, or refrigerant. When the workpiece is evacuated in advance, the liquid adhering to the inside of the workpiece or the piping connected between the workpiece and the vacuum pump is vaporized and sucked into the vacuum pump,
This invention relates to a vacuum evacuation device that has been improved so that vacuum pump gaskets, pump chamber wall members, etc. do not corrode, swell, etc. and impede evacuation.

[考案の技術的背景] 一般に、室構造が複雑な容器、或いは長尺状物
例えば自動車のラジエータとかブレーキ系統或い
は冷凍装置等の冷媒容器に、必要な液体を充填す
る場合、予めこれらの容器(以下ワークという)
内を真空状態にした後、ラジエータ液、ブレー
キ・オイル・又は冷媒等の液体の充填を行つてい
る。
[Technical background of the invention] In general, when filling a necessary liquid into a container with a complicated chamber structure or a long object such as a refrigerant container for an automobile radiator, brake system, or refrigeration system, these containers ( (hereinafter referred to as work)
After creating a vacuum inside the tank, it is filled with liquid such as radiator fluid, brake oil, or refrigerant.

第1図は上記の如き液体の充填前にワークを真
空にするための従来の真空・充填装置を示す。第
1図において符号1はワークであり接続管2によ
り気液分離用のセパレータ3に接続されている。
このセパレータ3はコツク4を有するドレーン管
5が底部に接続されていると共に、接続管6を介
して真空ポンプ7に接続されている。なお、二点
鎖線にて示す部分はワーク1に必要な液体を充填
するためのものであつて、液体タンク8と、この
タンク8と前記ワーク1との間に制御弁9とを設
けた構成である。
FIG. 1 shows a conventional vacuum/filling apparatus for evacuating a workpiece before filling with liquid as described above. In FIG. 1, reference numeral 1 denotes a workpiece, which is connected to a separator 3 for gas-liquid separation through a connecting pipe 2.
This separator 3 is connected to a drain pipe 5 having a cap 4 at the bottom thereof, and is also connected to a vacuum pump 7 via a connecting pipe 6. The part indicated by the two-dot chain line is for filling the workpiece 1 with the necessary liquid, and has a configuration in which a liquid tank 8 and a control valve 9 are provided between the tank 8 and the workpiece 1. It is.

かかる構成の真空・充填装置によつて、ワーク
1に液体を充填するには、先ず、制御弁9を閉じ
ておいてから真空ポンプ7を稼動してワーク1、
接続管2及びセパレータ3の気圧を下げる。これ
によりワーク1の真空引きが完了し、次に制御弁
9を開くと液体タンク8の液体が一気にワーク1
内に充填されることになる。
In order to fill the workpiece 1 with liquid using the vacuum/filling device having such a configuration, first close the control valve 9 and then operate the vacuum pump 7 to fill the workpiece 1 with liquid.
Lower the air pressure in the connecting pipe 2 and separator 3. This completes the evacuation of the workpiece 1, and then when the control valve 9 is opened, the liquid in the liquid tank 8 is completely discharged from the workpiece 1.
It will be filled inside.

而して、上記液体の充填時に液体タンク8から
ワーク1内に充填される液体は、接続管2の一部
の内壁にも付着しているから、次に別のワーク1
を真空引きする場合に、真空ポンプ7の吸引作用
によつて真空ポンプ7に吸込まれないようにしな
ければならない。また、液体が最初からワーク1
内に付着している場合、(例えば一度充填したワ
ーク1の充填をやり直す場合等)にも真空ポンプ
7に液体が吸込まれないようにしなければならな
い。このために設けたのがセパレータ3であり、
空気とともに吸引された液体はこのセパレータ3
内で液体の重力によつて滴下し、セパレータ3の
底部に溜ることになる。その後、この底部に溜つ
た液体は或る量に達するとドレーン・コツクを通
して排出される。
Therefore, since the liquid filled into the work 1 from the liquid tank 8 when filling the liquid is also attached to a part of the inner wall of the connecting pipe 2, the next time another work 1 is filled with the liquid.
When evacuating the air, it is necessary to prevent the air from being sucked into the vacuum pump 7 by the suction action of the vacuum pump 7. Also, if the liquid is in workpiece 1 from the beginning,
If the liquid adheres to the inside of the vacuum pump 7, it is necessary to prevent the liquid from being sucked into the vacuum pump 7 (for example, when refilling the workpiece 1 that has already been filled). Separator 3 was provided for this purpose.
The liquid sucked together with the air flows through this separator 3.
The liquid drips due to gravity within the separator 3 and accumulates at the bottom of the separator 3. Thereafter, when the liquid accumulated at the bottom reaches a certain amount, it is drained out through a drain.

[背景技術の問題点] しかしながら、上記真空引き中においてワーク
1、接続管2及びセパレータ3内等は真空ポンプ
7の吸引作用に応じて徐々に気圧が下がるため、
液体の沸点が低下し、液体は気化して蒸気となつ
て真空ポンプ7によつて吸引されてしまう。この
場合、上記液体が真空ポンプ7の接続用パツキン
部材、又はポンプ室壁部材等を腐食或いは膨潤さ
せるような化学的性質を有するものであると、真
空引きのための気密性を保つことが不可能とな
る。このように真空ポンプ側の使用部材が上記化
学的変化を受け易いと、接続用パツキン部材及び
真空ポンプ7を頻繁に取替えなければならない。
パツキン部材等に上記のような化学的変化を及ぼ
す液体の例としては、冷媒として用いるフレオン
ガス、或いは最近のブレーキ・オイル、ラジエー
タ液等に含まれるエチレングリコール系の不凍液
を挙げることができる。この問題の対して従来
は、液体の種類毎にパツキン部材又はその他の部
材を選定使用しなければならず、充填液の種類毎
に真空ポンプ7等を使い分けるという煩雑さを生
んでいた。
[Problems with the Background Art] However, during the evacuation, the pressure inside the workpiece 1, the connecting pipe 2, the separator 3, etc. gradually decreases according to the suction action of the vacuum pump 7.
The boiling point of the liquid decreases, and the liquid evaporates into vapor, which is sucked by the vacuum pump 7. In this case, if the liquid has chemical properties that corrode or swell the connecting gasket member of the vacuum pump 7 or the pump chamber wall member, it may be impossible to maintain airtightness for evacuation. It becomes possible. If the members used on the vacuum pump side are susceptible to the above-mentioned chemical changes, the connecting gasket member and the vacuum pump 7 must be replaced frequently.
Examples of liquids that cause the above-mentioned chemical changes to packing members include Freon gas used as a refrigerant, and ethylene glycol-based antifreeze contained in recent brake oils, radiator fluids, and the like. In order to solve this problem, in the past, a packing member or other member had to be selected and used for each type of liquid, creating the complication of using a different vacuum pump 7 or the like for each type of filling liquid.

[考案の目的] 本考案は上記事情に鑑みてなされたもので、ワ
ークに充填する液体の種類を問わず完全に気液分
離をしながら真空引きをすることができ、前記液
体の化学的性質に応じて真空ポンプや接続用パツ
キン部材を取替えたり、真空ポンプの寿命を劣化
させることのない真空引き装置を提供することを
目的とする。
[Purpose of the invention] The present invention was developed in view of the above circumstances, and it is possible to perform vacuuming while completely separating gas and liquid regardless of the type of liquid to be filled into the workpiece, and it is It is an object of the present invention to provide a vacuum evacuation device that does not require replacing the vacuum pump or connecting packing members depending on the situation, and does not deteriorate the life of the vacuum pump.

[考案の概要] ワークと真空ポンプ側とを気液分離用のセパレ
ータを介して接続し、前記セパレータを介してワ
ークを真空引きするものにおいて、前記セパレー
タ内を真空ポンプ側室とワーク側室とに分離・区
画する一方この両室の夫々の容積を反比例的に可
変可能に拡縮変位する隔離部材をセパレータ内に
配設したものである。
[Summary of the invention] A workpiece and a vacuum pump side are connected through a separator for gas-liquid separation, and the workpiece is evacuated through the separator, and the inside of the separator is separated into a vacuum pump side chamber and a workpiece side chamber. - A separating member is disposed within the separator, which divides the chambers while variablely expanding and contracting the respective volumes of the two chambers inversely proportionally.

[考案の実施例] 以下、本考案を図示の実施例について説明す
る。第2図は本考案の第1実施例を示す構成図で
ある。冷媒容器又はラジエータ等のワーク11
は、第1接続管12によつて制御弁13と接続さ
れ、この制御弁13と気液分離用のセパレータ1
4とを第2接続管15及びセパレータ14のワー
ク側吸排口部16を介して接続することにより、
前記制御弁13の働きで液体充填時に図示しない
液体タンク(第1図参照)から充填される充填用
液体がセパレータ14内に入込まないようになつ
ている。このセパレータ14は、ドレーンコツク
18を有するドレーン管17を底部に接続し、こ
のセパレータ14に設けた図示しない液量レベル
検出手段の指示に従つてセパレータ14内に溜ま
る液体を必要に応じて液体タンク側に排出又は廃
棄できるように構成されると共に、真空ポンプ側
吸排口部19に開口部20を連通させて基部21
が取付けられたベローズ22を収納している。
[Embodiments of the invention] The present invention will be described below with reference to illustrated embodiments. FIG. 2 is a block diagram showing a first embodiment of the present invention. Workpiece 11 such as a refrigerant container or radiator
is connected to a control valve 13 by a first connecting pipe 12, and this control valve 13 and a separator 1 for gas-liquid separation are connected to each other.
4 through the second connecting pipe 15 and the workpiece side intake/discharge port 16 of the separator 14,
The control valve 13 prevents the filling liquid from entering the separator 14 from a liquid tank (not shown) (see FIG. 1) during liquid filling. A drain pipe 17 having a drain socket 18 is connected to the bottom of the separator 14, and the liquid accumulated in the separator 14 is transferred to the liquid tank as necessary according to instructions from a liquid level detection means (not shown) provided in the separator 14. The base 21 is constructed so that it can be discharged or disposed of, and the opening 20 is communicated with the vacuum pump side intake/discharge port 19.
It houses the bellows 22 to which the bellows 22 is attached.

このベローズ22は前記セパレータ14内を前
記ワーク側吸排口部16を含むワーク側気密室2
3と、前記真空ポンプ側吸排口部19を含む真空
ポンプ側気密室24とに分離・区画すると共に、
前記ワーク側気密室23と真空ポンプ側気密室2
4との相対的気圧の変化に応じて拡縮自在に変位
するように構成されている。また、このベローズ
22は腐食・膨潤等の化学的変化を受け難い例え
ばナイロン系の合成樹脂を原料として構成されて
いる。なお、このベローズ22は前記ワーク側気
密室23と真空ポンプ側気密室24との相対的気
圧の変化がないとき、自ら拡大するような付勢力
を付与するように構成しても良い。さらにこの場
合、外部に加圧用のポンプを設けてベローズ22
の真空ポンプ側気密室24を拡大するようにして
も良い。
This bellows 22 connects the inside of the separator 14 to a work-side airtight chamber 2 including the work-side suction/discharge port 16.
3 and a vacuum pump side airtight chamber 24 including the vacuum pump side suction/exhaust port 19, and
The work side airtight chamber 23 and the vacuum pump side airtight chamber 2
It is configured to be able to expand and contract in response to changes in the relative atmospheric pressure. The bellows 22 is made of a synthetic resin such as nylon, which is not susceptible to chemical changes such as corrosion and swelling. The bellows 22 may be configured to apply a biasing force to expand itself when there is no change in the relative air pressure between the workpiece-side hermetic chamber 23 and the vacuum pump-side hermetic chamber 24. Furthermore, in this case, a pressurizing pump is provided externally and the bellows 22 is
The vacuum pump side airtight chamber 24 may be enlarged.

また、前記セパレータ14の吸排口部19は3
分岐接続管25の一他が接続されている。この3
分岐接続管25の中端は第1制御弁26を介して
外気(空気)と連絡されると共に、他端は第2制
御弁27及び接続管28を介して真空ポンプ29
の吸引口部30に接続されている。これら第1、
第2制御弁26,27の開閉は、真空引き時第1
制御弁26を閉じ、第2制御弁27を開く。そし
て、前記ベローズ22が二点鎖線にて示すように
収縮した時点で第2制御部27を閉じ第1制御部
26を開くようにする。
Further, the suction/discharge port 19 of the separator 14 has three
One and the other of the branch connecting pipes 25 are connected. This 3
The middle end of the branch connecting pipe 25 is connected to the outside air (air) via a first control valve 26, and the other end is connected to a vacuum pump 29 via a second control valve 27 and a connecting pipe 28.
It is connected to the suction port 30 of. The first of these,
The opening and closing of the second control valves 26 and 27 are controlled by the first
Control valve 26 is closed and second control valve 27 is opened. Then, when the bellows 22 contracts as shown by the two-dot chain line, the second control section 27 is closed and the first control section 26 is opened.

次に上記のような真空引き装置の動作を説明す
る。先ず、ワーク11を第1接続管12に接続
し、制御弁13を開路する。このときベローズ2
2は、例えば第1制御弁26を通して接続された
加圧用ポンプ、或いは自らの拡大力にて拡大し、
前記ワーク側気密室23が狭小となるように略セ
パレータ14の容積分の外気を内部に満たしてい
る。そして、第1制御弁26を閉じ、第2制御弁
27を開いて真空ポンプ29を吸引動作させ、ベ
ローズ22の真空ポンプ側気密室24内の空気を
真空ポンプ29によつて吸引する。この吸引によ
つてベローズ22は真空ポンプ側気密室24が狭
まるように収縮し、この収縮した容積分だけワー
ク側気密室23の容積が拡大しワーク11の気圧
が低下する。ワーク11の気圧が所要の圧力に達
したとき、真空引きをやめ、制御弁13を閉じて
ワーク11に液体を充填することになる。次に別
のワーク11を接続して制御弁13を開けばさら
にベローズ22が収縮して別のワーク11を真空
引きすることができる。また、ベローズ22が2
点鎖線にて示すように十分に収縮して真空引きが
不可能となつたら、第2制御弁27を閉じればベ
ローズ22は自然に拡大する(又は第1制御弁2
6を開いて加圧用ポンプによりベローズ22内を
昇圧すればベローズ22は拡大する)、そして再
びワーク11を真空引きできるようになる。
Next, the operation of the vacuum evacuation device as described above will be explained. First, the workpiece 11 is connected to the first connecting pipe 12, and the control valve 13 is opened. At this time, bellows 2
2 expands by a pressurizing pump connected through the first control valve 26 or by its own expanding power,
The work side airtight chamber 23 is filled with outside air approximately equal to the volume of the separator 14 so as to be narrow. Then, the first control valve 26 is closed, the second control valve 27 is opened, and the vacuum pump 29 is operated for suction, so that the air in the airtight chamber 24 on the vacuum pump side of the bellows 22 is suctioned by the vacuum pump 29. Due to this suction, the bellows 22 contracts so that the vacuum pump side airtight chamber 24 narrows, and the volume of the workpiece side airtight chamber 23 expands by the contracted volume, and the air pressure of the workpiece 11 decreases. When the atmospheric pressure of the workpiece 11 reaches the required pressure, evacuation is stopped, the control valve 13 is closed, and the workpiece 11 is filled with liquid. Next, if another workpiece 11 is connected and the control valve 13 is opened, the bellows 22 will further contract and the other workpiece 11 can be evacuated. Also, the bellows 22 is
When the second control valve 27 is closed, the bellows 22 will expand naturally (or when the first control valve 27
6 is opened and the pressure inside the bellows 22 is increased by the pressurizing pump, the bellows 22 expands), and the workpiece 11 can be evacuated again.

上記動作説明では、ベローズ22を段階的に縮
小して多数のワーク11を真空引きする場合につ
いて説明したが、他の真空引き動作として、ベロ
ーズ22の1回の収縮で1つのワーク11を真空
引きするようにしてもよいし、1回の収縮で1つ
のワーク11の真空引きを行うことができない場
合は、拡大したワーク側気密室23の真空度を維
持しながらベローズ22を拡大して真空引きする
ようにしてもよい。後者の場合には、セパレータ
14及びベローズ22の容積を大きく設けなくと
もワーク11を高真空にすることができるという
利点がある。
In the above operation description, a case has been described in which a large number of workpieces 11 are evacuated by contracting the bellows 22 in stages. However, as another vacuuming operation, one contraction of the bellows 22 evacuates one workpiece 11. Alternatively, if it is not possible to evacuate one workpiece 11 in one contraction, the bellows 22 may be expanded and evacuated while maintaining the degree of vacuum in the expanded work-side airtight chamber 23. You may also do so. In the latter case, there is an advantage that the workpiece 11 can be brought into a high vacuum without increasing the volumes of the separator 14 and the bellows 22.

上記真空引き動作の説明から明らかなように、
例えば液体充填時に第1接続管12に付着した液
体の気化した気体が真空ポンプ29側に吸引され
る虞れは全く皆無である。このため、真空ポンプ
29の吸引口部30に設ける図示しない接続用パ
ツキン部材或いは真空ポンプ室壁部材が化学的に
変化するという従来の欠点を除去でき、液体の化
学的性質に応じて真空ポンプ29及びパツキン部
材を選択したり、真空ポンプ29の性能を劣化さ
せるということが無い。
As is clear from the explanation of the vacuum suction operation above,
For example, there is no possibility that the vaporized gas of the liquid adhering to the first connecting pipe 12 during liquid filling will be sucked into the vacuum pump 29 side. Therefore, it is possible to eliminate the conventional drawback that the connection packing member (not shown) provided at the suction port 30 of the vacuum pump 29 or the vacuum pump chamber wall member is chemically changed, and the vacuum pump 29 can be adjusted according to the chemical properties of the liquid. There is no need to select a packing member or to deteriorate the performance of the vacuum pump 29.

次に第3図は本考案の第2実施例を示し、第2
図と対応する部材は同一付号を記し、その特徴と
する構成を説明する。この実施例は隔離部材とし
て第2図のベローズ22の代りに前記セパレータ
14の真空ポンプ側吸排口部19に開口首部31
が接続され、前記セパレータ内で中空球体状に膨
縮自在な袋部材32を用いたものである。この袋
部材32の膨縮作用によつて、ワーク側気密室2
3と真空ポンプ側気密室24とを完全に隔離した
状態でワーク11の真空引きを行うことができ、
真空ポンプ29の性能劣化を防止すると共に、パ
ツキン部材の劣化を防止することができる。
Next, FIG. 3 shows a second embodiment of the present invention.
Components corresponding to those in the drawings are given the same reference numerals, and their characteristic configurations will be explained. In this embodiment, instead of the bellows 22 shown in FIG.
A bag member 32 is connected to the bag member 32 and is expandable and contractible in the shape of a hollow sphere within the separator. Due to the expansion and contraction action of this bag member 32, the work side airtight chamber 2
3 and the vacuum pump side airtight chamber 24 are completely isolated, the workpiece 11 can be evacuated,
It is possible to prevent the performance of the vacuum pump 29 from deteriorating and also to prevent the packing member from deteriorating.

また、第4図は本考案の第3実施例を示し、第
2図と対応する部分は同一符号を記し、その特徴
とする構成のみを説明する。この第4図におい
て、セパレータ14内には、その室内を略2分割
する膜部材33が張設されている。この膜部材3
3は、前記セパレータ14内をワーク側吸排口部
16を含むワーク側気密室23と、真空ポンプ側
吸排口部19を含む真空ポンプ側気密室24とに
分離・区画し、ワーク側気密室23と真空ポンプ
側気密室24との相対的気圧の変化に応じてワー
ク側気密室23及び真空ポンプ側気密室を拡縮す
るように変位自在に構成されている。そして、液
体タンク側へ戻す液体はワーク側気密室23にの
み溜るようになつている。
Further, FIG. 4 shows a third embodiment of the present invention, parts corresponding to those in FIG. 2 are denoted by the same reference numerals, and only the characteristic structure thereof will be explained. In FIG. 4, a membrane member 33 is stretched within the separator 14 to substantially divide the interior of the chamber into two. This membrane member 3
3 separates and partitions the interior of the separator 14 into a work-side airtight chamber 23 containing the work-side suction/discharge port 16 and a vacuum pump-side airtight chamber 24 containing the vacuum pump-side suction/discharge port 19; The workpiece side airtight chamber 23 and the vacuum pump side airtight chamber 23 are configured to be freely displaceable so as to expand or contract in response to changes in the relative atmospheric pressure between the workpiece side airtight chamber 23 and the vacuum pump side airtight chamber 24 . The liquid returned to the liquid tank is collected only in the work-side airtight chamber 23.

このような膜部材33は、真空引き時に真空ポ
ンプ側に引張されるように変形し、ワーク側気密
室23の気圧を下げてワーク11を真空引きする
ことができ、真空ポンプ側に完全に引張されたら
真空ポンプ側気密室24に外気を送気すると、ワ
ーク側に引張されるように変形して何度もワーク
11を真空引きすることができる。また、不要な
液体はワーク側気密室23に溜まり、この液体が
気化した蒸気を真空ポンプ側気密室24に吸込む
ことがないため、真空ポンプ29の性能が劣化す
ることを防止できるものである。
Such a membrane member 33 is deformed so as to be pulled toward the vacuum pump side during evacuation, and can lower the air pressure in the work-side airtight chamber 23 to evacuate the work 11, and is completely pulled toward the vacuum pump side. When the outside air is supplied to the airtight chamber 24 on the vacuum pump side, the workpiece 11 is deformed so as to be pulled toward the workpiece side, and the workpiece 11 can be evacuated many times. Further, since unnecessary liquid does not accumulate in the workpiece-side hermetic chamber 23 and vapor generated by this liquid is not sucked into the vacuum pump-side hermetic chamber 24, it is possible to prevent the performance of the vacuum pump 29 from deteriorating.

なお、各実施例は最も簡潔な構成によつて説明
したものであり、各部材の形状等はさらに変形し
ても良く、要はワーク側と真空ポンプ側とで気体
が完全に分離されることを特徴とするものであ
る。
It should be noted that each embodiment has been explained using the simplest configuration, and the shape of each member may be further modified.The important point is that the gas is completely separated between the workpiece side and the vacuum pump side. It is characterized by:

[考案の効果] 以上述べたように本考案によれば、ワークと真
空ポンプとの間に気液分離用のセパレータを設け
た真空引き装置において、前記セパレータ内にワ
ーク側と真空ポンプ側とを分離・区画する拡縮変
位自在な隔離部材を設けるようにしたので、ワー
ク側に付着した液体による蒸気が真空ポンプに吸
引されず、真空ポンプの接続用パツキン及び真空
ポンプ室壁部材が化学的変化を受けることを防止
する効果がある。このため、前記真空ポンプ及び
接続用パツキンを充填液体の種類に応じて選択す
る必要がなくなると共に、真空ポンプ等の性能を
劣化させない利点がある。
[Effects of the invention] As described above, according to the invention, in a vacuum evacuation device in which a separator for gas-liquid separation is provided between a workpiece and a vacuum pump, a workpiece side and a vacuum pump side are connected in the separator. Since the isolation member that can be expanded and contracted to separate and partition the workpiece is provided, the vapor from the liquid adhering to the workpiece side is not sucked into the vacuum pump, and the vacuum pump connection gasket and vacuum pump chamber wall members are prevented from chemical change. It has the effect of preventing damage. Therefore, there is no need to select the vacuum pump and the connecting gasket depending on the type of liquid to be filled, and there is an advantage that the performance of the vacuum pump etc. is not deteriorated.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の真空引き装置を示す構成図、第
2図は本考案の第1実施例を示す構成図、第3図
は本考案の第2実施例を示す構成図、第4図は本
考案の第3実施例を示す構成図である。 11……ワーク、12,15,25,28……
接続管、13,26,27……制御弁、14……
セパレータ、16……ワーク側吸排口部、19…
…真空ポンプ側吸排口部、20……開口部、21
……基部、22……ベローズ、23……ワーク側
気密室、24……真空ポンプ側気密室、29……
真空ポンプ、32……袋部材、33……膜部材。
Fig. 1 is a block diagram showing a conventional vacuum evacuation device, Fig. 2 is a block diagram showing a first embodiment of the present invention, Fig. 3 is a block diagram showing a second embodiment of the present invention, and Fig. 4 is a block diagram showing a second embodiment of the present invention. It is a block diagram which shows the 3rd Example of this invention. 11... Work, 12, 15, 25, 28...
Connection pipe, 13, 26, 27... Control valve, 14...
Separator, 16... Work side intake/discharge port, 19...
...Vacuum pump side suction/exhaust port, 20...Opening, 21
... Base, 22 ... Bellows, 23 ... Work side airtight chamber, 24 ... Vacuum pump side airtight chamber, 29 ...
Vacuum pump, 32... bag member, 33... membrane member.

Claims (1)

【実用新案登録請求の範囲】 (1) ワークと真空ポンプ側とを気液分離用のセパ
レータを介して接続し、前記セパレータを介し
てワークを真空引きするものにおいて、前記セ
パレータ内を真空ポンプ側室とワーク側室とに
分離・区画する一方この両室の夫々の容積を反
比例的に可変可能に拡縮変位する隔離部材をセ
パレータ内に配設し、前記ワークと真空ポンプ
とを不連通状態で該ワークを真空引きすること
を特徴とする真空引き装置。 (2) 前記隔離部材には、ベローズを用いたことを
特徴とする実用新案登録請求の範囲第1項に記
載の真空引き装置。 (3) 前記隔離部材には、前記セパレータ内で中空
球体状に拡縮自在な袋部材を用いたことを特徴
とする実用新案登録請求の範囲第1項に記載の
真空引き装置。 (4) 前記隔離部材には、膜部材を用いたことを特
徴とする実用新案登録請求の範囲第1項に記載
の真空引き装置。
[Claims for Utility Model Registration] (1) In a device in which a workpiece and a vacuum pump side are connected via a separator for gas-liquid separation, and the workpiece is evacuated via the separator, the inside of the separator is connected to a vacuum pump side chamber. An isolating member that separates and partitions the workpiece into a side chamber and a workpiece side chamber, and that expands and contracts the respective volumes of these chambers inversely proportionally, is disposed within the separator, and the workpiece and the vacuum pump are disconnected from each other. A vacuum device characterized by vacuuming. (2) The vacuum evacuation device according to claim 1, wherein the isolation member is a bellows. (3) The vacuum evacuation device according to claim 1, wherein the isolation member is a bag member that can be expanded and contracted in the shape of a hollow sphere within the separator. (4) The vacuum evacuation device according to claim 1, wherein a membrane member is used as the isolation member.
JP778683U 1983-01-21 1983-01-21 vacuum device Granted JPS59114470U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP778683U JPS59114470U (en) 1983-01-21 1983-01-21 vacuum device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP778683U JPS59114470U (en) 1983-01-21 1983-01-21 vacuum device

Publications (2)

Publication Number Publication Date
JPS59114470U JPS59114470U (en) 1984-08-02
JPH0118859Y2 true JPH0118859Y2 (en) 1989-06-01

Family

ID=30139304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP778683U Granted JPS59114470U (en) 1983-01-21 1983-01-21 vacuum device

Country Status (1)

Country Link
JP (1) JPS59114470U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4988541A (en) * 1972-12-25 1974-08-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4988541A (en) * 1972-12-25 1974-08-23

Also Published As

Publication number Publication date
JPS59114470U (en) 1984-08-02

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