JPS59114470U

JPS59114470U - vacuum device

Info

Publication number: JPS59114470U
Application number: JP778683U
Authority: JP
Inventors: 熊木　秀雄
Original assignee: 東応工業株式会社
Priority date: 1983-01-21
Filing date: 1983-01-21
Publication date: 1984-08-02
Also published as: JPH0118859Y2

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は従来の真空引き装置を示す構成画、第２図は本
考案の第１実施例を示す構成図、第３図　　　、は本考
案の第２実施例を示す構成図、第４図は本考案の第３実
施例を示す構成図である。１１・・・ワーク、１２，１５，２５．２８・・・接続
管、１３，２６．２７・・・制御弁、１４・・・セパレ
ータ、１６・・・ワーク側吸排口部、１９・・・真空ポ
ンプ側吸排口部、２０・・・開口部、２１・・・基部、
２２・・・ベローズ、２３・・・ワーク側気密室、２４
・・・真空ポンプ側気密室、２９・・・真空ポンプ、３
２・・・袋部材、３３・・・膜部材。補正　昭５８．　６．１７実用新案登録請求の範囲、図面の簡単な説明を次のよう
に補正する。Ｏ実用新案登録請求の範囲ワークと真空ポンプ側とを気液分離用のセパレータを介
して接続し、前記セパレータを通して前記ワークを略真
空にする真空引き装置において、前記セパレータ内に真
空ポンプ側とワーク側とを分離・区画する拡縮変位自在
な隔離部材を設け、この隔離部材が前記真空ポンプ側を
拡大するように変位したとき前記真空ポンプを吸引作動
して、この真空ポンプ側が収縮するように前記隔離部材
を変位させ、ワーク側を拡大させて気圧を低下させ、ワ
ーク側を真空引きするようにしたことを特徴とする真空
引き装置。（２）前記隔離部材には、ベローズを用いたことを特徴
とする実用新案登録請求の範囲第１項に記載の真空引き
装置。（３）　　前記隔離部材には、前記セパレータ内で中空
球体状に拡縮自在な袋部材を用いたことを特徴とする実
用新案登録請求の範囲第１項に記載の真空引き装置。（４）前記隔離部材には、膜部材を用いたことを特徴と
する実用新案登録請求の範囲第１項に記載の真空引き装
置。図面の簡単な説明第１図は従来の真空引き装置を示す構成図、第２図は本
考案の第１実施例を示す構成図、第３図は本考案の第２
実施例を示す構成図、第４図は本考案の第３実施例を示
す構成図である。１１・・・ワーク、１２．１５，２５．２８・・・接続
管、１３．　２６．　２７・・・制御弁、１４・・・セ
パレータ、１６・・・ワーク側吸排口部、１９・・・真
空ポンプ側排日部、２０・・・開口部、２１・・・基部
、２２・・・ベローズ、２３・・・ワーク側気密室、２
４・・・真空ポンプ側気密室、２９・・・真空ポンプ、
３２・・・袋部材、３３・・・膜部材。Fig. 1 is a block diagram showing a conventional vacuum evacuation device, Fig. 2 is a block diagram showing a first embodiment of the present invention, Fig. 3 is a block diagram showing a second embodiment of the present invention, and Fig. 4 is a block diagram showing a second embodiment of the present invention. FIG. 3 is a configuration diagram showing a third embodiment of the present invention. 11... Workpiece, 12, 15, 25.28... Connection pipe, 13, 26.27... Control valve, 14... Separator, 16... Work side intake/discharge port, 19... Vacuum pump side suction/exhaust port, 20... opening, 21... base,
22... Bellows, 23... Work side airtight chamber, 24
...Vacuum pump side airtight chamber, 29...Vacuum pump, 3
2... Bag member, 33... Membrane member. Revised 1984. 6.17 The claims for utility model registration and the brief description of the drawings are amended as follows. O Utility Model Registration Scope of Claims In a vacuum evacuation device in which a workpiece and a vacuum pump side are connected via a separator for gas-liquid separation, and the workpiece is evacuated through the separator to a substantially vacuum state, the vacuum pump side and the workpiece are connected within the separator. An isolating member that can be expanded and contracted to separate and partition the vacuum pump side is provided, and when the isolation member is displaced to expand the vacuum pump side, the vacuum pump is suction operated, and the vacuum pump side is contracted. A vacuum evacuation device characterized by displacing an isolation member to expand the work side to lower the air pressure and evacuate the work side. (2) The vacuum evacuation device according to claim 1, wherein a bellows is used as the isolation member. (3) The vacuum evacuation device according to claim 1, wherein the isolation member is a bag member that can be expanded and contracted in the shape of a hollow sphere within the separator. (4) The vacuum evacuation device according to claim 1, wherein a membrane member is used as the isolation member. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing a conventional vacuum evacuation device, Fig. 2 is a block diagram showing a first embodiment of the present invention, and Fig. 3 is a block diagram showing a second embodiment of the present invention.
FIG. 4 is a block diagram showing a third embodiment of the present invention. 11...Work, 12.15,25.28...Connecting pipe, 13. 26. 27... Control valve, 14... Separator, 16... Work side suction/exhaust port, 19... Vacuum pump side drainage part, 20... Opening, 21... Base, 22...・Bellows, 23... Work side airtight chamber, 2
4... Vacuum pump side airtight chamber, 29... Vacuum pump,
32... Bag member, 33... Membrane member.

Claims

[Claims for Utility Model Registration] In a vacuum evacuation device in which a workpiece and a vacuum pump side are connected via a separator for gas-liquid separation, and the workpiece is evacuated through the separator, the vacuum pump side and the vacuum pump side are connected in the separator. An isolation member that can be expanded and contracted is provided to separate and partition the work side, and when the isolation member is displaced to expand the vacuum pump side, the vacuum pump is operated to suction the vacuum pump side, so that the vacuum pump side contracts. Displace the isolation member to expand the work side and reduce the air pressure.
A vacuum evacuation device characterized in that it vacuums the work side. (2) The vacuum evacuation device according to claim 1, wherein a bellows is used as the isolation member. (3) The isolation member is provided with a vacuum inside the separator.
A vacuum evacuation device according to claim 1, which is characterized by using a spherically expandable and contractible bag member. (4) The vacuum evacuation device according to claim 1, wherein a membrane member is used as the isolation member.