JPH01184722A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPH01184722A JPH01184722A JP870388A JP870388A JPH01184722A JP H01184722 A JPH01184722 A JP H01184722A JP 870388 A JP870388 A JP 870388A JP 870388 A JP870388 A JP 870388A JP H01184722 A JPH01184722 A JP H01184722A
- Authority
- JP
- Japan
- Prior art keywords
- hard carbon
- thin
- magnetic recording
- carbon film
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 12
- 239000000314 lubricant Substances 0.000 claims abstract description 10
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 7
- 239000010936 titanium Substances 0.000 claims abstract description 7
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 6
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 6
- 229910052796 boron Inorganic materials 0.000 claims abstract description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 3
- 239000010703 silicon Substances 0.000 claims abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract 2
- 238000007738 vacuum evaporation Methods 0.000 claims abstract 2
- 239000010409 thin film Substances 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- 229920006254 polymer film Polymers 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- ZTSDOGSKTICNPQ-UHFFFAOYSA-N 2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,15,15,16,16,17,17,18,18,18-pentatriacontafluorooctadecanoic acid Chemical compound OC(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZTSDOGSKTICNPQ-UHFFFAOYSA-N 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract description 2
- 238000001771 vacuum deposition Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000014113 dietary fatty acids Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229930195729 fatty acid Natural products 0.000 description 2
- 239000000194 fatty acid Substances 0.000 description 2
- 150000004665 fatty acids Chemical class 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- ABDBNWQRPYOPDF-UHFFFAOYSA-N carbonofluoridic acid Chemical compound OC(F)=O ABDBNWQRPYOPDF-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、高密度磁気記録に適する強磁性金属薄膜を磁
気記録層とする磁気記録媒体の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method of manufacturing a magnetic recording medium having a magnetic recording layer made of a ferromagnetic metal thin film suitable for high-density magnetic recording.
従来の技術
高分子フィルム上に直接又は、下地層を介して、電子ビ
ーム蒸着法で、Ｃ０−Ｎｉを針め蒸着した、いわゆる蒸
着テープは、蒸着時に酸素ガスを導入することで、電磁
変換特性、耐久性、耐食性の向上をはかっている〔例え
ば、外国論文誌、アイイーイーイー トランザクション
ズオンマグネティクス（ＩＩＣＩＣＲＴＲＡＮＳＡＣＴ
ＩＯＮＳ ＯＮ ＭＡＧＮＥＴＩＣ３）ｖｏｌ、Ｍ
ＡＧ−２０％ＡＳ Ｐ、Ｐ、８２４−８２６（１９８
４）参照〕。更に耐久性の向上をはかる有効な手段は磁
気記録層の微細凹凸化である〔同論文誌、ｖｏｌ ｍＡ
Ｇ−２１、Ａ６、Ｐ、Ｐ、１５２４〜１６２６（１９８
６）参照〕が加えて、保護膜。Conventional technology The so-called vapor deposition tape, in which CO-Ni is needle-deposited by electron beam evaporation directly or through a base layer on a polymer film, has improved electromagnetic conversion characteristics by introducing oxygen gas during vapor deposition. , durability, and corrosion resistance [For example, foreign journals, IIC Transactions on Magnetics (IICICRTRANSACT
IONS ON MAGNETIC3) vol, M
AG-20% AS P, P, 824-826 (198
See 4)]. An effective means to further improve durability is to make the magnetic recording layer finely uneven [same journal, vol.
G-21, A6, P, P, 1524-1626 (198
6) In addition, a protective film.
潤滑剤との多くの組み合わせも提案され、とりわけ、ダ
イアモンド状硬質炭素薄膜（以下り、Ｌ、Ｏ。Many combinations with lubricants have also been proposed, in particular diamond-like hard carbon thin films (hereinafter L, O).
膜と記す）の保護性が注目されている〔電子通信学会、
磁気記録研究会質料、ＭＲ８５−６６（１９８６）参照
〕。The protective properties of membranes (hereinafter referred to as membranes) have been attracting attention [Institute of Electronics and Communication Engineers,
See Materials of the Magnetic Recording Research Society, MR85-66 (1986)].
発明が解決しようとする課題 しかしながら、Ｄ、Ｌ、Ｃ，膜をスパッタリング法。Problems that the invention aims to solve However, the D, L, and C films are sputtered.
化学気相蒸着法、プラズマ化学気相蒸着法等で強磁性金
属薄膜を形成し、溶液塗布法で脂肪酸、パーフルオロカ
ルボン酸、パーフルオロポリエーテル等の潤滑剤を配す
ることで製造される磁気記録媒体は耐久性は良好である
が、スペーシング損失が短波長域で大きくなることから
改善が望まれていた。本発明は上記した事情に鑑みなさ
れたもので短波長Ｃ／Ｎの優れた磁気記録媒体の製造方
法を提供するものである。Magnetism is produced by forming a ferromagnetic metal thin film using chemical vapor deposition, plasma enhanced chemical vapor deposition, etc., and applying a lubricant such as fatty acid, perfluorocarboxylic acid, perfluoropolyether, etc. using solution coating. Although the recording medium has good durability, improvements have been desired since the spacing loss increases in the short wavelength range. The present invention has been made in view of the above-mentioned circumstances, and provides a method for manufacturing a magnetic recording medium with an excellent short wavelength C/N.
課題を解決するだめの手段
上記した問題点を解決するため本発明の磁気記録媒体の
製造方法は、強磁性金属薄膜上にボロン。Means for Solving the Problems In order to solve the above-mentioned problems, the method for manufacturing a magnetic recording medium of the present invention includes a method of manufacturing a magnetic recording medium using boron on a ferromagnetic metal thin film.
チタン、シリコンのいずれかを含む硬質炭素薄膜を形成
した後、連続して真空蒸着法にて反応基を有する潤滑剤
を配するようにしたものである。After forming a hard carbon thin film containing either titanium or silicon, a lubricant having a reactive group is successively applied by vacuum deposition.
作用
本発明の磁気記録媒体の製造方法は上記した構成により
、潤滑剤が硬質炭素薄膜の一部と強固に反応し、硬質炭
素薄膜を薄くしても、応力集中を防ぐので、保護効果を
十分得られるので、スペーシング損失の小さい磁気記録
媒体を与えることができる。Function: Due to the above-described structure, the method for manufacturing a magnetic recording medium of the present invention allows the lubricant to react strongly with a part of the hard carbon thin film, and even if the hard carbon thin film is made thin, stress concentration is prevented, so that the protective effect is sufficient. Therefore, a magnetic recording medium with small spacing loss can be provided.
実施例
以下、図面を参照しながら本発明の磁気記録媒体の製造
方法について説明する。図は本発明を実施するのに用い
た磁気記録媒体の製造装置の要部構成図である。図で１
はポリエチレンテレフタレートフィルム、ポリフェニレ
ンサルファイドフィルム等の高分子フィルム又は、必要
に応じて下塗り層を配した高分子フィルム上に、高周波
スパッタリング法、電子ビーム蒸着法等によりＧｏ−Ｏ
ｒ。EXAMPLE Hereinafter, a method for manufacturing a magnetic recording medium of the present invention will be explained with reference to the drawings. The figure is a block diagram of the main parts of a magnetic recording medium manufacturing apparatus used to carry out the present invention. 1 in figure
Go-O is deposited on a polymer film such as polyethylene terephthalate film or polyphenylene sulfide film, or a polymer film with an undercoat layer if necessary, by high-frequency sputtering, electron beam evaporation, etc.
r.
Ｇｏ−Ｔｉ 、Ｇｏ −Ｍｏ 、Ｇｏ−Ｎｉ 、Ｇｏ−
Ｎｉ−０等の強磁性金属薄膜を形成したもので、ここで
は処理基板と呼ぶ。尚、該強磁性金属薄膜の形成と、こ
れからのべる処理を同じ真空容器内で行うようにしても
よいのは勿論であるがここでは、別に製造した例でのべ
る。２は送り出し軸、３は巻取り軸で、４は反応管で、
石英管で構成し、ガス導入孔６を配し、内部に加速電極
８、外部に高周波コイル７を配し、プラズマを発生でき
るようにした。８は潤滑剤蒸発源で加熱法は、熱媒循環
をはじめ、傍熱、直接加熱いずれの加熱手段でもよい。Go-Ti, Go-Mo, Go-Ni, Go-
A ferromagnetic metal thin film such as Ni-0 is formed here, and is referred to as a processed substrate here. Although it is of course possible to perform the formation of the ferromagnetic metal thin film and the subsequent processing in the same vacuum container, an example in which they are manufactured separately will be described here. 2 is the sending shaft, 3 is the winding shaft, 4 is the reaction tube,
It is made of a quartz tube, has a gas introduction hole 6, an accelerating electrode 8 inside, and a high frequency coil 7 outside, so that plasma can be generated. Reference numeral 8 denotes a lubricant evaporation source, and the heating method may be any of heating medium circulation, indirect heating, and direct heating.
９は防着マスクで、１ｏは真空容器、１１は真空排気系
、１２は回転支持体である。9 is an anti-fouling mask, 1o is a vacuum container, 11 is a vacuum exhaust system, and 12 is a rotating support.
図の装置で、直径６０ｆｆｉの回転支持体に沿わせて、
厚み１０μｍ のポリエチレンテレフタレートフィルム
上に直径１ｏｏ人のＡｌ２Ｏ，微粒子を１０ケ／（μｍ
）２ 配した上で、Ｃｏ−Ｎ１（Ｎ：２０ｗｔ％）を５
Ｘ １０−５（ＴＯｒｒ ）の酸素中で電子ビーム蒸
着を最小入射角４０度で行いＱ、１μｍの強磁性金属薄
膜を配した処理基板を、ａｍ／ｗｉｎで巻き取りながら
、ＯＨ４ガスを１．２１７ｍ１ｎＳＢ２Ｈ６ガスを０．
０４１／ｍｉｎ導入し１３．５ｓＭＨｚ、 １．２ＫＷ
の高同波により、Ｂを含むダイアモンド状硬質炭素薄膜
を３６０マの直流加速条件で８０人形成し、次に、パー
フルオロステアリン酸を４Ｘ １０−５（Ｔｏｒｒ）の
真空中で８０人真空蒸着し８ミリ幅の磁気テープとした
。−ガル転倒は、ＣＨ４ガスを１．２ （４／ｍ１ｎ）
導入し、１３．５６（ＭＨｚ）、１．４ＫＷ（７）高周
波を印加し、カロ速電圧３９０マでダイアモンド状硬質
炭素薄膜を１６０人配し、その上にパーフルオロステア
リン酸を８０人真空蒸着し、８ミリ幅の磁気テープとし
た。両者のテープを改造した８ミリビデてオにより、ギ
ャップ長０．２３μｍ のメタルインギャップ型のアモ
ルファスヘラ鼾°により、輝度信号の周波数を６０％増
加させた広帯域条件でのＣ／Ｎとスチル特性を比較した
。実施例は初期値のＣ／Ｎが比較例よｐ２．３（ｄＢ）
良好であった。又。With the device shown in the figure, along a rotating support with a diameter of 60ffi,
On a polyethylene terephthalate film with a thickness of 10 μm, 10 particles of Al2O with a diameter of 10 μm were deposited.
) 2 and then Co-N1 (N: 20wt%)
Electron beam evaporation was performed in oxygen at X 10-5 (TOrr) with a minimum incident angle of 40 degrees, Q, and the substrate on which a 1 μm ferromagnetic metal thin film was arranged was wound up with am/win while OH4 gas was evaporated at 1. 0.217m1nSB2H6 gas.
041/min introduced, 13.5sMHz, 1.2KW
A diamond-like hard carbon thin film containing B was formed by 80 people under a direct current acceleration condition of 360 m by using high frequency waves of It was made into a millimeter-wide magnetic tape. - Gal overturning is CH4 gas 1.2 (4/m1n)
A high frequency of 13.56 (MHz) and 1.4 KW (7) was applied, and 160 diamond-shaped hard carbon thin films were deposited at a Calorie speed voltage of 390 mA, and perfluorostearic acid was vacuum evaporated on top of it by 80 people. Then, it was made into an 8 mm wide magnetic tape. Using an 8mm video tape modified from both tapes, we measured the C/N and still characteristics under broadband conditions in which the frequency of the luminance signal was increased by 60% using a metal-in-gap type amorphous spatula with a gap length of 0.23 μm. compared. In the example, the initial value C/N is p2.3 (dB) compared to the comparative example.
It was good. or.
４０℃８０％ＲＨでくり返し記録再生を行った時、６０
回目の再生出力にジッター成分が比較例では画面に影響
が現われたが、実施例は、１６０回目の再生出力にもジ
ッター成分がみられず安定していた。２０Ｃ１５％ＲＨ
でのスチル特性は実施例も比較例もほぼ同程度の耐久性
を示した。即ち、１６分で出力が０．６〜１（ｄＢ）低
下し、３０分で１．１〜１．４（ｄＢ） 出力が低下す
る程度で良好であった。When recording and reproducing repeatedly at 40℃ and 80%RH, 60
Although the jitter component in the 160th reproduction output affected the screen in the comparative example, the example was stable with no jitter component observed even in the 160th reproduction output. 20C15%RH
Regarding the still characteristics, both the example and the comparative example showed almost the same durability. That is, the output decreased by 0.6 to 1 (dB) in 16 minutes, and by 1.1 to 1.4 (dB) in 30 minutes, which was good.
他に、Ｔｉ、Ｓｉの塩化物のガスを用いてＴｉ 、 Ｓ
ｉを含むダイアモンド状硬質炭素薄膜を形成し、スルフ
ォン酸、脂肪酸等の反応基を有する潤滑剤を真空蒸着し
てもよい。尚、Ｓｉ、Ｔｉ、ＢはＣに対し原子％で３％
〜１６％程度含むのが適当である。In addition, using Ti, Si chloride gas, Ti, S
A diamond-like hard carbon thin film containing i may be formed, and a lubricant having a reactive group such as sulfonic acid or fatty acid may be vacuum-deposited. In addition, Si, Ti, and B are 3% in atomic % with respect to C.
It is appropriate to contain about 16%.
発明の効果
以上のように本発明によれば、短波長域で優れたＣ／Ｎ
と耐久性を有する磁気記録媒体を製造することができる
といったすぐれた効果がある。Effects of the Invention As described above, according to the present invention, the C/N is excellent in the short wavelength range.
This has an excellent effect in that a magnetic recording medium having high durability and durability can be manufactured.
図は本発明を実施するのに用いた磁気記録媒体の製造装
置の要部構成図である。
１・・・・・・処理基板、４・・・・・・反応管、７・
・・・・・高周波コイル、８・・・・・潤滑剤蒸発源。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名／−
−恋理呈液
４−及斥管
７− 高ＭＪ−Ｊオル
８−一一ンＭ滑刑蒸亮源The figure is a block diagram of the main parts of a magnetic recording medium manufacturing apparatus used to carry out the present invention. 1... Processing substrate, 4... Reaction tube, 7.
...High frequency coil, 8...Lubricant evaporation source. Name of agent: Patent attorney Toshio Nakao and 1 other person/-
- Koi Ri Seishi 4 - and Repulsion Tube 7 - High MJ - J Ol 8 - Eleven M Slipping Steam Ryogen
Claims (1)
む硬質炭素薄膜を形成した後、連続して真空蒸着法にて
反応基を有する潤滑剤を配することを特徴とする磁気記
録媒体の製造方法。A method for manufacturing a magnetic recording medium, which comprises forming a hard carbon thin film containing boron, titanium, or silicon on a ferromagnetic metal thin film, and then continuously applying a lubricant having a reactive group by vacuum evaporation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP870388A JP2563425B2 (en) | 1988-01-19 | 1988-01-19 | Method of manufacturing magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP870388A JP2563425B2 (en) | 1988-01-19 | 1988-01-19 | Method of manufacturing magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01184722A true JPH01184722A (en) | 1989-07-24 |
| JP2563425B2 JP2563425B2 (en) | 1996-12-11 |
Family
ID=11700297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP870388A Expired - Fee Related JP2563425B2 (en) | 1988-01-19 | 1988-01-19 | Method of manufacturing magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2563425B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01286113A (en) * | 1988-05-13 | 1989-11-17 | Hitachi Ltd | Magnetic disk and its production |
| JPH0325723A (en) * | 1989-06-22 | 1991-02-04 | Hitachi Ltd | Magnetic recording medium and production thereof |
| JPH03113825A (en) * | 1989-09-26 | 1991-05-15 | Matsushita Electric Ind Co Ltd | Method and device for producing magnetic recording medium |
| JPH0467431A (en) * | 1990-07-06 | 1992-03-03 | Kubota Corp | Formation of protective lubricating film of magnetic recording medium |
| US5540957A (en) * | 1992-07-24 | 1996-07-30 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a magnetic recording medium |
| US5798135A (en) * | 1993-12-28 | 1998-08-25 | Matsushita Electric Industrial Co., Ltd. | Method for producing a magnetic recording medium having a carbon protective layer |
| US6171674B1 (en) * | 1993-07-20 | 2001-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Hard carbon coating for magnetic recording medium |
| US6835523B1 (en) * | 1993-05-09 | 2004-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus for fabricating coating and method of fabricating the coating |
| JP2006028273A (en) * | 2004-07-13 | 2006-02-02 | National Institute Of Advanced Industrial & Technology | Lubricant comprising hydrocarbonaceous organic thin film and lubrication method |
-
1988
- 1988-01-19 JP JP870388A patent/JP2563425B2/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01286113A (en) * | 1988-05-13 | 1989-11-17 | Hitachi Ltd | Magnetic disk and its production |
| JPH0325723A (en) * | 1989-06-22 | 1991-02-04 | Hitachi Ltd | Magnetic recording medium and production thereof |
| JPH03113825A (en) * | 1989-09-26 | 1991-05-15 | Matsushita Electric Ind Co Ltd | Method and device for producing magnetic recording medium |
| JPH0467431A (en) * | 1990-07-06 | 1992-03-03 | Kubota Corp | Formation of protective lubricating film of magnetic recording medium |
| US5540957A (en) * | 1992-07-24 | 1996-07-30 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing a magnetic recording medium |
| US5637393A (en) * | 1992-07-24 | 1997-06-10 | Matsuhita Electric Industrial Co., Ltd. | Magnetic recording medium and its manufacturing method |
| US6835523B1 (en) * | 1993-05-09 | 2004-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus for fabricating coating and method of fabricating the coating |
| US6171674B1 (en) * | 1993-07-20 | 2001-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Hard carbon coating for magnetic recording medium |
| US6183816B1 (en) | 1993-07-20 | 2001-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating the coating |
| US6468617B1 (en) | 1993-07-20 | 2002-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus for fabricating coating and method of fabricating the coating |
| US5798135A (en) * | 1993-12-28 | 1998-08-25 | Matsushita Electric Industrial Co., Ltd. | Method for producing a magnetic recording medium having a carbon protective layer |
| JP2006028273A (en) * | 2004-07-13 | 2006-02-02 | National Institute Of Advanced Industrial & Technology | Lubricant comprising hydrocarbonaceous organic thin film and lubrication method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2563425B2 (en) | 1996-12-11 |
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