JPH0467431A - Formation of protective lubricating film of magnetic recording medium - Google Patents
Formation of protective lubricating film of magnetic recording mediumInfo
- Publication number
- JPH0467431A JPH0467431A JP17995290A JP17995290A JPH0467431A JP H0467431 A JPH0467431 A JP H0467431A JP 17995290 A JP17995290 A JP 17995290A JP 17995290 A JP17995290 A JP 17995290A JP H0467431 A JPH0467431 A JP H0467431A
- Authority
- JP
- Japan
- Prior art keywords
- film
- medium
- lubricant
- recording medium
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 47
- 230000001681 protective effect Effects 0.000 title claims abstract description 15
- 230000001050 lubricating effect Effects 0.000 title abstract description 8
- 230000015572 biosynthetic process Effects 0.000 title description 5
- 239000000314 lubricant Substances 0.000 claims abstract description 26
- 239000010687 lubricating oil Substances 0.000 claims abstract description 20
- 239000010408 film Substances 0.000 claims description 72
- 238000000034 method Methods 0.000 claims description 19
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000000576 coating method Methods 0.000 claims description 18
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 238000013508 migration Methods 0.000 abstract description 5
- 230000005012 migration Effects 0.000 abstract description 5
- 238000011109 contamination Methods 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract 3
- 239000000853 adhesive Substances 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000007787 solid Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 239000010702 perfluoropolyether Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- -1 moisture Chemical compound 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、磁気記録媒体の表面を被覆する保護潤滑膜の
形成方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for forming a protective lubricant film covering the surface of a magnetic recording medium.
強磁性金属(Co系、Co−Cr系、Co−Cr−Ni
系等)からなる磁性膜を記録層とする金属薄膜型磁気記
録媒体は、スパッタリング法等の成膜法を利用し、成膜
チャンバ内において非磁性基体の表面に所定の成膜操作
を行うことにより製作される。Ferromagnetic metals (Co-based, Co-Cr-based, Co-Cr-Ni
For metal thin film magnetic recording media whose recording layer is a magnetic film made of a magnetic film made of Manufactured by.
その記録メディアとしての機能および耐用寿命を安定化
するには、磁性膜面に近接対向する記録・再生用磁気ヘ
ッドとの接触を滑らかにし、磁性膜と磁気ヘッドの摩耗
・損傷を防止することが必要なことは言うまでもない。In order to stabilize its function and service life as a recording medium, it is necessary to make smooth contact with the recording/reproducing magnetic head that faces the magnetic film surface in close proximity, and to prevent wear and damage between the magnetic film and the magnetic head. Needless to say, this is necessary.
従来より、そのための保護潤滑膜として、磁性膜表面に
液体潤滑剤(パーフルオロポリエーテル等)を塗布する
ことが行われている。磁性膜の表面にダイヤモンド・ラ
イク・カーボンやグラファイト・ライク・カーボン等の
炭素質膜に代表される固体保護膜を積層成膜する場合に
も、その固体保護膜に対する磁気ヘッドの接触を滑らか
にするために、固体保護膜の表面に液体潤滑剤を塗布す
るのが一般である。その潤滑膜厚さは、概ね10〜40
人である。Conventionally, a liquid lubricant (such as perfluoropolyether) has been applied to the surface of the magnetic film as a protective lubricant film for this purpose. Even when a solid protective film, such as a carbonaceous film such as diamond-like carbon or graphite-like carbon, is layered on the surface of a magnetic film, the contact of the magnetic head with the solid protective film is made smooth. Therefore, it is common to apply a liquid lubricant to the surface of the solid protective film. The thickness of the lubricating film is approximately 10 to 40
It's a person.
非磁性基体上に成膜された磁性膜の表面、またはその膜
面に積層形成された固体保護膜の表面(以下、その表面
を「媒体の表面」とも言う)に液体潤滑剤を塗布し、媒
体表面と磁気へンドとの間の摩擦・摩耗を緩和する保護
潤滑膜として安定に機能させるためには、媒体表面に対
してその潤滑膜を強固に付着させることが必要である。Applying a liquid lubricant to the surface of a magnetic film formed on a non-magnetic substrate or the surface of a solid protective film laminated on the film surface (hereinafter, the surface is also referred to as the "surface of the medium"), In order to stably function as a protective lubricant film that alleviates friction and wear between the medium surface and the magnetic head, it is necessary to firmly adhere the lubricant film to the medium surface.
付着力が十分でないと、記録再生操作過程における磁気
記録媒体の高速度回転に伴う遠心力の作用で液体潤滑剤
が媒体表面上を移動するマイグレーションを生じ、また
磁気ヘッドの反復接触により潤滑剤が飛散・消失し潤滑
効果が著しく減殺されてしまうからである。その付着力
を高める方法として、媒体表面に液体潤滑剤を塗布した
のち、約100°C前後の温度で加熱処理することが行
われているが、その効果は十分なものと言えない。If the adhesion is insufficient, the centrifugal force that accompanies high-speed rotation of the magnetic recording medium during the recording/reproduction process will cause migration of the liquid lubricant on the medium surface, and repeated contact with the magnetic head will cause the lubricant to migrate. This is because it scatters and disappears, significantly reducing the lubricating effect. As a method of increasing the adhesion force, a liquid lubricant is applied to the surface of the medium and then heat treated at a temperature of about 100° C., but the effect is not sufficient.
本発明は、媒体表面に対する上記潤滑膜の付着力を高め
、磁性膜・磁気へ・ノド間の保護潤滑膜としての機能を
向上安定させることを目的としてなされたものである。The present invention has been made for the purpose of increasing the adhesion of the lubricant film to the medium surface and improving and stabilizing the function as a protective lubricant film between the magnetic film, the magnetic layer, and the throat.
〔課題を解決するための手段および作用〕本発明は、成
膜チャンバ内でのスパッタリング等による所定の成膜操
作を経て製作される金属薄膜型磁気記録媒体の表面に液
体潤滑剤の塗膜を形成する方法において、
前記成膜チャンバ内で所定の成膜操作を終了した後の磁
気記録媒体の表面に対する潤滑剤の塗膜の形成を、(i
)その成膜チャンバ内において行うこと、また( ii
)成膜チャンバの外に取出す場合は、取出した後、2
4時間以内に行うこと、を特徴としている。[Means and effects for solving the problems] The present invention provides a coating film of a liquid lubricant on the surface of a metal thin film type magnetic recording medium that is manufactured through a predetermined film forming operation such as sputtering in a film forming chamber. In the method for forming a lubricant on the surface of a magnetic recording medium after completing a predetermined film forming operation in the film forming chamber,
) to be carried out in the film-forming chamber, and (ii
) When taking it out of the film forming chamber, after taking it out,
The feature is that it must be done within 4 hours.
以下、本発明について詳しく説明する。The present invention will be explained in detail below.
非磁性基体に、スパッタリング法等による成膜操作が施
されて製造された磁気記録媒体は、成膜チャンバ内から
大気中に取出された後の保管過程で、経時的に酸素、水
分、炭酸ガス、ハイドロカーボン等の分子レベルの物質
が吸着することによる汚染を免れない。Magnetic recording media manufactured by subjecting a non-magnetic substrate to a film forming operation using a sputtering method, etc., are exposed to oxygen, moisture, and carbon dioxide over time during storage after being taken out into the atmosphere from the film forming chamber. , contamination due to adsorption of molecular-level substances such as hydrocarbons is inevitable.
本発明は、磁気記録媒体の表面(磁性膜面、その膜面上
に固体保護膜が積層形成されている場合は固体保護膜の
表面)に吸着したこのような汚染物質の存在が媒体表面
と液体潤滑剤との均質で強固な付着関係を妨げる大きな
要因をなしていることに鑑み、媒体表面に対する液体潤
滑剤の塗布を、媒体表面が実質的に清浄な状態に保持さ
れている間に行うようにしたのである。The present invention is designed to prevent the presence of such contaminants adsorbed on the surface of a magnetic recording medium (the surface of the magnetic film, or the surface of the solid protective film if a solid protective film is laminated on the film surface) from the surface of the medium. In view of the fact that this is a major factor preventing a homogeneous and strong adhesion relationship with the liquid lubricant, the liquid lubricant is applied to the media surface while the media surface is maintained in a substantially clean state. That's what I did.
本発明の第一の方法により、媒体表面の潤滑剤の塗布を
成膜チャンバ内で行う場合は、大気との接触がなく、媒
体表面の汚染は完全に回避される。According to the first method of the present invention, when the lubricant is applied to the surface of the medium in the film forming chamber, there is no contact with the atmosphere, and contamination of the surface of the medium is completely avoided.
また、磁気記録媒体を成膜チャンバから取出した後に潤
滑剤の塗布を行う場合においても、24時間以内に塗布
を行うこととすれば、媒体表面の汚染の影響は少なく、
改良された塗膜付着力を得ることができる。むろん、チ
ャンバから取出した後の潤滑剤塗布までの経過時間は短
い程良い。本発明者の実験によれば、チャンバから取出
した後、5〜6時間以内であれば、チャンバ内で塗布を
行ったものと略同等の塗膜付着力が確保できる。Furthermore, even when applying lubricant after taking the magnetic recording medium out of the film forming chamber, if the lubricant is applied within 24 hours, the influence of contamination on the medium surface is small.
Improved coating adhesion can be obtained. Of course, the shorter the elapsed time until the lubricant is applied after being taken out from the chamber, the better. According to the inventor's experiments, within 5 to 6 hours after removal from the chamber, approximately the same coating adhesion as that applied in the chamber can be ensured.
本発明において使用される液体潤滑剤は、むろんその材
質に制限はなく、例えばパーフルオロポリエーテル等に
代表される公知の各種潤滑剤が任意に選択される。塗布
法についても制限はなく、所定の液体潤滑剤に媒体を浸
漬する浸漬塗布法、媒体を回転させながら液体潤滑剤を
吹付けるスピンコーティング法、または液体潤滑剤を加
熱蒸発させて媒体表面に沈着させる蒸着法等の公知の方
法に従って行えばよい。成膜チャンバ内で潤滑剤を塗布
する場合は、その成膜チャンバ内に、液体潤滑剤を収容
した容器を予め納置しておき、所定の成膜操作につづい
てそのチャンバ内で蒸着法による塗布を行うようにする
こともできる。The material of the liquid lubricant used in the present invention is of course not limited, and various known lubricants such as perfluoropolyether may be arbitrarily selected. There are no restrictions on the application method, including a dip coating method in which the medium is immersed in a specified liquid lubricant, a spin coating method in which the liquid lubricant is sprayed while rotating the medium, or a liquid lubricant that is heated and evaporated to be deposited on the surface of the medium. This may be carried out according to a known method such as a vapor deposition method. When applying a lubricant in a film-forming chamber, a container containing liquid lubricant is placed in the film-forming chamber in advance. It is also possible to perform coating.
本発明に従って、磁気記録媒体表面に対する潤滑剤の塗
布を成膜チャンバ内で行うか、または同チャンバから取
出した後、速やかに行うことにより、媒体表面と潤滑膜
の界面の密着性が向上すると共に、媒体表面に対する塗
膜構成分子の配向性が高められ、その効果として媒体表
面に対する塗膜の付着力が強化され、実機使用時のマイ
グレーションや磁気ヘッドの摺接による膜面損傷に対す
る抵抗性が向上し、長期に亘って良好な潤滑機能が維持
される。According to the present invention, by applying a lubricant to the surface of a magnetic recording medium in a film forming chamber or immediately after taking it out from the same chamber, the adhesion between the surface of the medium and the lubricant film is improved. , the orientation of the molecules constituting the coating film on the media surface is increased, and as a result, the adhesion of the coating film to the media surface is strengthened, which improves the resistance to damage to the film surface due to migration during actual machine use and sliding contact of the magnetic head. However, good lubrication function is maintained over a long period of time.
〔I〕供試磁気ディスク
アルミニウム合金基板(N’i−P無電解めっき処理)
に、クロム膜(膜厚: 1500人)、CoNiCr系
合金磁性膜(膜厚ニア00人)、および炭素膜(膜厚:
300人)がこの順に積層成膜され、膜面にバーニッシ
ュ処理が施された3、5″型磁気記録媒体を使用。[I] Test magnetic disk aluminum alloy substrate (N'i-P electroless plating treatment)
, a chromium film (thickness: 1500), a CoNiCr alloy magnetic film (thickness near 00), and a carbon film (thickness:
300 people) used a 3.5'' type magnetic recording medium in which the films were laminated in this order and the film surface was burnished.
(III液体潤滑剤の塗布
潤滑剤としてパーフルオロポリエーテル(モンテジソン
社製rAM2001J )を使用。膜厚はいずれも30
人とした。(Perfluoropolyether (rAM2001J manufactured by Montegisson) was used as the coating lubricant for III liquid lubricant. The film thickness was 30 mm in each case.
As a person.
(1)供試ディスクNo、 1
成膜チャンバ内でのスパッタ成膜完了後、同チャンバ内
に予め設置しておいて液体潤滑剤収容ルツボの潤滑剤を
加熱し蒸着法により塗膜を形成。(1) Test disk No. 1 After completion of sputtering film formation in a film forming chamber, a coating film was formed by heating the lubricant in a crucible containing liquid lubricant previously installed in the same chamber and using a vapor deposition method.
(2)供試ディスクNo、 2〜4
成膜チヤンバ内でスパッタ成膜を完了したディスクを同
チャンバから取出した後、浸漬塗布法により塗膜を形成
、チャンバ取出し後、浸漬塗布に付すまでの経過時間は
、No、 2 : 5 Hr、 No、 3 : 20
Hr。(2) Test disk No. 2 to 4 After taking out the disk on which sputtering film formation was completed in the film forming chamber, a coating film was formed by dip coating method. Elapsed time: No, 2:5 Hr, No, 3:20
Hr.
No、 4 : 30Hrとした。No. 4: 30 hours.
(3)供試ディスクN015
供試ディスクNo、 4と同じ条件で潤滑剤の塗布を行
ったのち、抵抗発熱体を内蔵した加熱チャンバ内で加熱
処理(100°CXIHr)を行った。(3) Test disk No. 015 After applying lubricant under the same conditions as test disk No. 4, heat treatment (100° CXIHr) was performed in a heating chamber containing a built-in resistance heating element.
(IV)C3Sテスト
各供試ディスクについて、表面に磁気ヘッドを反復接触
させるCSSテスト(Contact 5tartSt
op Te5t)を行い、反復回数104回後の摩擦係
数(μ)をテスト前のそれと比較した。ディスク回転速
度は3600rpmとした。使用した磁気ヘッドは薄膜
ヘッドである。(IV) C3S test A CSS test (Contact 5tartSt.
The friction coefficient (μ) after 104 repetitions was compared with that before the test. The disk rotation speed was 3600 rpm. The magnetic head used was a thin film head.
上記試験結果を第1表に示す。供試No、 4は、成膜
チャンバから取出した後、塗膜形成までに長時間を経過
した例であり、C8Sテスト後の摩擦係数は大幅に増大
している。この摩擦係数の大幅な増加は、C3Sテスト
過程でのマイグレーションや磁気ヘッドの反復接触によ
り、潤滑塗膜がテスト前の健全な膜面形態が損なわれた
からに他ならない。これに対し、成膜チャンバ内で塗膜
形成を行ったNα1の摩擦係数の変化はわずかであり、
C3Sテスト後も低い摩擦係数を保持している。また、
成膜チャンバから取出して塗膜形成を行う場合でも、N
o、 2やNα3に示すように塗膜形成までの経過時間
を規制し、一定時間内に行うことにより、摩擦係数の大
幅な増加が回避され、低摩擦係数を保持することができ
る。The above test results are shown in Table 1. Sample No. 4 is an example in which a long time elapsed before the coating film was formed after being taken out from the film forming chamber, and the friction coefficient after the C8S test was significantly increased. This significant increase in the coefficient of friction is due to the fact that the healthy surface morphology of the lubricant coating before the test was lost due to migration and repeated contact with the magnetic head during the C3S test process. On the other hand, the change in the friction coefficient of Nα1, which was formed in the film forming chamber, was small;
It maintains a low coefficient of friction even after the C3S test. Also,
Even when forming a coating after taking it out of the coating chamber, the N
By regulating the elapsed time until coating film formation as shown in o, 2 and Nα3 and performing the coating within a certain period of time, a significant increase in the friction coefficient can be avoided and a low friction coefficient can be maintained.
なお、塗膜形成の後に加熱処理を施した阻5の摩擦係数
の増加はや−少な(、Nα4に比し、改良された潤滑性
能を有してはいるが、発明例のそれとは比肩すべくもな
い。It should be noted that the increase in the friction coefficient of Nα5, which was heat-treated after coating film formation, was slightly smaller (although it has improved lubrication performance compared to Nα4, it is not comparable to that of the invention example). Not cloudy.
これらのことから、本発明の潤滑膜形成方法は、ディス
ク表面に対する潤滑膜の付着力を高め、潤滑機能の安定
化・耐久性向上に極めて有効であることがわかる。From these facts, it can be seen that the lubricant film forming method of the present invention is extremely effective in increasing the adhesion of the lubricant film to the disk surface and stabilizing the lubricating function and improving durability.
本発明方法により磁気記録媒体の表面に形成される保護
潤滑膜は、媒体表面に対して強い付着力を有し、記録再
生操作の反復過程におけるマイグレーションや磁気ヘッ
ドの摺接による膜面損傷を生じにく1、良好な潤滑作用
が長期に亘って保持されるので、磁性膜や磁気ヘッドの
保護効果にすくれ、記録メディアとしての信顛性、安定
性の向上に寄与するものである。The protective lubricant film formed on the surface of a magnetic recording medium by the method of the present invention has strong adhesion to the surface of the medium, and is susceptible to damage to the film surface due to migration or sliding contact of the magnetic head during the repeated process of recording and reproducing operations. (1) Since a good lubrication effect is maintained over a long period of time, it is effective in protecting the magnetic film and magnetic head, contributing to improved reliability and stability as a recording medium.
Claims (1)
成膜操作を経て製作される金属薄膜型磁気記録媒体の表
面に液体潤滑剤の塗膜を形成する方法において、 前記成膜チャンバ内で所定の成膜操作を終了した後、同
チャンバ内において媒体の表面に液体潤滑剤を蒸着させ
ることを特徴とする磁気記録媒体の保護潤滑膜形成方法
。 2、成膜チャンバ内でのスパッタリング等による所定の
成膜操作を経て製作される金属薄膜型磁気記録媒体の表
面に液体潤滑剤の塗膜を形成する方法において、 前記成膜チャンバ内で製作された磁気記録媒体を同チャ
ンバから取出した後、24時間以内にその表面に液体潤
滑剤を塗布することを特徴とする磁気記録媒体の保護潤
滑膜形成方法。[Claims] 1. A method for forming a coating film of a liquid lubricant on the surface of a metal thin film type magnetic recording medium manufactured through a predetermined film forming operation such as sputtering in a film forming chamber, comprising: 1. A method for forming a protective lubricant film on a magnetic recording medium, the method comprising: after completing a predetermined film forming operation within a film chamber, a liquid lubricant is deposited on the surface of the medium within the same chamber. 2. In a method of forming a coating film of a liquid lubricant on the surface of a metal thin film type magnetic recording medium manufactured through a predetermined film forming operation such as sputtering in a film forming chamber, A method for forming a protective lubricant film on a magnetic recording medium, which comprises applying a liquid lubricant to the surface of the magnetic recording medium within 24 hours after the magnetic recording medium is removed from the chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17995290A JPH0467431A (en) | 1990-07-06 | 1990-07-06 | Formation of protective lubricating film of magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17995290A JPH0467431A (en) | 1990-07-06 | 1990-07-06 | Formation of protective lubricating film of magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0467431A true JPH0467431A (en) | 1992-03-03 |
Family
ID=16074828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17995290A Pending JPH0467431A (en) | 1990-07-06 | 1990-07-06 | Formation of protective lubricating film of magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0467431A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01184722A (en) * | 1988-01-19 | 1989-07-24 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
JPH01184723A (en) * | 1988-01-19 | 1989-07-24 | Fuji Electric Co Ltd | Production of magnetic disk medium made of thin metallic film |
JPH02128321A (en) * | 1988-11-07 | 1990-05-16 | Matsushita Electric Ind Co Ltd | Method and device for producing magnetic recording medium |
-
1990
- 1990-07-06 JP JP17995290A patent/JPH0467431A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01184722A (en) * | 1988-01-19 | 1989-07-24 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
JPH01184723A (en) * | 1988-01-19 | 1989-07-24 | Fuji Electric Co Ltd | Production of magnetic disk medium made of thin metallic film |
JPH02128321A (en) * | 1988-11-07 | 1990-05-16 | Matsushita Electric Ind Co Ltd | Method and device for producing magnetic recording medium |
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