JPH01180974A - 蒸着用酸化セリウム材 - Google Patents

蒸着用酸化セリウム材

Info

Publication number
JPH01180974A
JPH01180974A JP480488A JP480488A JPH01180974A JP H01180974 A JPH01180974 A JP H01180974A JP 480488 A JP480488 A JP 480488A JP 480488 A JP480488 A JP 480488A JP H01180974 A JPH01180974 A JP H01180974A
Authority
JP
Japan
Prior art keywords
vapor deposition
ceo2
oxide
deposited
cerium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP480488A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0547625B2 (enExample
Inventor
Noboru Sugawara
菅原　登
Mitsunobu Kobiyama
小桧山　光信
Jiro Fujitani
藤谷　次郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OPUTORON KK
Canon Inc
Original Assignee
OPUTORON KK
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OPUTORON KK, Canon Inc filed Critical OPUTORON KK
Priority to JP480488A priority Critical patent/JPH01180974A/ja
Publication of JPH01180974A publication Critical patent/JPH01180974A/ja
Publication of JPH0547625B2 publication Critical patent/JPH0547625B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP480488A 1988-01-14 1988-01-14 蒸着用酸化セリウム材 Granted JPH01180974A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP480488A JPH01180974A (ja) 1988-01-14 1988-01-14 蒸着用酸化セリウム材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP480488A JPH01180974A (ja) 1988-01-14 1988-01-14 蒸着用酸化セリウム材

Publications (2)

Publication Number Publication Date
JPH01180974A true JPH01180974A (ja) 1989-07-18
JPH0547625B2 JPH0547625B2 (enExample) 1993-07-19

Family

ID=11593949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP480488A Granted JPH01180974A (ja) 1988-01-14 1988-01-14 蒸着用酸化セリウム材

Country Status (1)

Country Link
JP (1) JPH01180974A (enExample)

Also Published As

Publication number Publication date
JPH0547625B2 (enExample) 1993-07-19

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