JPH01180674U - - Google Patents

Info

Publication number
JPH01180674U
JPH01180674U JP7227088U JP7227088U JPH01180674U JP H01180674 U JPH01180674 U JP H01180674U JP 7227088 U JP7227088 U JP 7227088U JP 7227088 U JP7227088 U JP 7227088U JP H01180674 U JPH01180674 U JP H01180674U
Authority
JP
Japan
Prior art keywords
test chamber
test
circulation means
gas circulation
blowout nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7227088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0712943Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7227088U priority Critical patent/JPH0712943Y2/ja
Priority to US07/284,547 priority patent/US4918928A/en
Publication of JPH01180674U publication Critical patent/JPH01180674U/ja
Application granted granted Critical
Publication of JPH0712943Y2 publication Critical patent/JPH0712943Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7227088U 1987-12-17 1988-05-30 Ｉｃデバイスの低温試験装置 Expired - Lifetime JPH0712943Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7227088U JPH0712943Y2 (ja) 1988-05-30 1988-05-30 Ｉｃデバイスの低温試験装置
US07/284,547 US4918928A (en) 1987-12-17 1988-12-15 Apparatus for testing IC devices at low temperature and cooling bag for use in testing IC devices at low temperature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7227088U JPH0712943Y2 (ja) 1988-05-30 1988-05-30 Ｉｃデバイスの低温試験装置

Publications (2)

Publication Number Publication Date
JPH01180674U true JPH01180674U (OSRAM) 1989-12-26
JPH0712943Y2 JPH0712943Y2 (ja) 1995-03-29

Family

ID=31297442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7227088U Expired - Lifetime JPH0712943Y2 (ja) 1987-12-17 1988-05-30 Ｉｃデバイスの低温試験装置

Country Status (1)

Country Link
JP (1) JPH0712943Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534405A (ja) * 1991-07-31 1993-02-09 Hitachi Electron Eng Co Ltd Ｉｃハンドラの温度制御方式

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534405A (ja) * 1991-07-31 1993-02-09 Hitachi Electron Eng Co Ltd Ｉｃハンドラの温度制御方式

Also Published As

Publication number Publication date
JPH0712943Y2 (ja) 1995-03-29

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