JPH0117748B2 - - Google Patents

Info

Publication number
JPH0117748B2
JPH0117748B2 JP56047525A JP4752581A JPH0117748B2 JP H0117748 B2 JPH0117748 B2 JP H0117748B2 JP 56047525 A JP56047525 A JP 56047525A JP 4752581 A JP4752581 A JP 4752581A JP H0117748 B2 JPH0117748 B2 JP H0117748B2
Authority
JP
Japan
Prior art keywords
nozzle
solvent
shielding
solution
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56047525A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57162666A (en
Inventor
Muneo Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP4752581A priority Critical patent/JPS57162666A/ja
Publication of JPS57162666A publication Critical patent/JPS57162666A/ja
Publication of JPH0117748B2 publication Critical patent/JPH0117748B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP4752581A 1981-03-30 1981-03-30 Liquid dropping device Granted JPS57162666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4752581A JPS57162666A (en) 1981-03-30 1981-03-30 Liquid dropping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4752581A JPS57162666A (en) 1981-03-30 1981-03-30 Liquid dropping device

Publications (2)

Publication Number Publication Date
JPS57162666A JPS57162666A (en) 1982-10-06
JPH0117748B2 true JPH0117748B2 (enrdf_load_stackoverflow) 1989-03-31

Family

ID=12777531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4752581A Granted JPS57162666A (en) 1981-03-30 1981-03-30 Liquid dropping device

Country Status (1)

Country Link
JP (1) JPS57162666A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4748742B2 (ja) * 2009-02-13 2011-08-17 東京エレクトロン株式会社 基板処理装置及び基板処理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081067A (enrdf_load_stackoverflow) * 1973-11-16 1975-07-01
JPS5165882A (en) * 1974-12-05 1976-06-07 Sony Corp Fuotorejisutono tofuhoho
JPS528383U (enrdf_load_stackoverflow) * 1975-07-02 1977-01-20

Also Published As

Publication number Publication date
JPS57162666A (en) 1982-10-06

Similar Documents

Publication Publication Date Title
JPH0669019B2 (ja) 半導体製造装置
KR100231952B1 (ko) 기판표면상의 액체를 제거하기 위한 방법
US4528934A (en) Thin-film coating apparatus
JPH0117748B2 (enrdf_load_stackoverflow)
JPS6238034B2 (enrdf_load_stackoverflow)
JP2507966B2 (ja) 塗布装置
JPH0321224B2 (enrdf_load_stackoverflow)
JP2604010B2 (ja) 塗布装置
JP2802636B2 (ja) 塗布装置及び塗布方法
JP4232336B2 (ja) 半導体ウエハの表面処理方法
JPS6234425B2 (enrdf_load_stackoverflow)
JPH05228413A (ja) 塗布装置
US5261566A (en) Solution-dropping nozzle device
JPS62121669A (ja) 塗布装置
JPS5952563A (ja) コ−テイング装置
JP2593465B2 (ja) 半導体ウエーハの液処理装置
JPH0585224B2 (enrdf_load_stackoverflow)
JP2537611B2 (ja) 塗布材料の塗布装置
JP3794886B2 (ja) 半導体ウエハのエッチング方法及びエッチング装置
JPH0628224Y2 (ja) 基板回転処理装置
JPH0817700A (ja) レジスト塗布方法およびレジスト塗布装置
JPH10209114A (ja) スピンエッチング装置
JPS60152029A (ja) 塗布装置
JPH0350972B2 (enrdf_load_stackoverflow)
JPH10261578A (ja) レジスト塗布装置