JPS5165882A - Fuotorejisutono tofuhoho - Google Patents

Fuotorejisutono tofuhoho

Info

Publication number
JPS5165882A
JPS5165882A JP14017774A JP14017774A JPS5165882A JP S5165882 A JPS5165882 A JP S5165882A JP 14017774 A JP14017774 A JP 14017774A JP 14017774 A JP14017774 A JP 14017774A JP S5165882 A JPS5165882 A JP S5165882A
Authority
JP
Japan
Prior art keywords
tofuhoho
fuotorejisutono
fuotorejisutono tofuhoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14017774A
Other languages
Japanese (ja)
Inventor
Hiroki Sato
Toshio Ooboshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP14017774A priority Critical patent/JPS5165882A/en
Publication of JPS5165882A publication Critical patent/JPS5165882A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
JP14017774A 1974-12-05 1974-12-05 Fuotorejisutono tofuhoho Pending JPS5165882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14017774A JPS5165882A (en) 1974-12-05 1974-12-05 Fuotorejisutono tofuhoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14017774A JPS5165882A (en) 1974-12-05 1974-12-05 Fuotorejisutono tofuhoho

Publications (1)

Publication Number Publication Date
JPS5165882A true JPS5165882A (en) 1976-06-07

Family

ID=15262669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14017774A Pending JPS5165882A (en) 1974-12-05 1974-12-05 Fuotorejisutono tofuhoho

Country Status (1)

Country Link
JP (1) JPS5165882A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638632U (en) * 1979-09-01 1981-04-11
JPS57162666A (en) * 1981-03-30 1982-10-06 Tokyo Denshi Kagaku Kabushiki Liquid dropping device
JPS58214373A (en) * 1982-05-24 1983-12-13 イ−ストマン　コダック　カンパニ− Device for applying liquid
JPH02122520A (en) * 1988-10-31 1990-05-10 Tokyo Electron Ltd Application of resist

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638632U (en) * 1979-09-01 1981-04-11
JPS5846683Y2 (en) * 1979-09-01 1983-10-24 新日本鍛工株式会社 Assembly type floor shelf frame
JPS57162666A (en) * 1981-03-30 1982-10-06 Tokyo Denshi Kagaku Kabushiki Liquid dropping device
JPH0117748B2 (en) * 1981-03-30 1989-03-31 Tokyo Ohka Kogyo Co Ltd
JPS58214373A (en) * 1982-05-24 1983-12-13 イ−ストマン　コダック　カンパニ− Device for applying liquid
JPH02122520A (en) * 1988-10-31 1990-05-10 Tokyo Electron Ltd Application of resist

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