JPS57162666A - Liquid dropping device - Google Patents
Liquid dropping deviceInfo
- Publication number
- JPS57162666A JPS57162666A JP4752581A JP4752581A JPS57162666A JP S57162666 A JPS57162666 A JP S57162666A JP 4752581 A JP4752581 A JP 4752581A JP 4752581 A JP4752581 A JP 4752581A JP S57162666 A JPS57162666 A JP S57162666A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- solvent
- cover
- leading end
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title abstract 2
- 239000002904 solvent Substances 0.000 abstract 5
- 238000001704 evaporation Methods 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 230000037431 insertion Effects 0.000 abstract 1
- 238000003780 insertion Methods 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4752581A JPS57162666A (en) | 1981-03-30 | 1981-03-30 | Liquid dropping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4752581A JPS57162666A (en) | 1981-03-30 | 1981-03-30 | Liquid dropping device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57162666A true JPS57162666A (en) | 1982-10-06 |
| JPH0117748B2 JPH0117748B2 (enrdf_load_stackoverflow) | 1989-03-31 |
Family
ID=12777531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4752581A Granted JPS57162666A (en) | 1981-03-30 | 1981-03-30 | Liquid dropping device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57162666A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010186929A (ja) * | 2009-02-13 | 2010-08-26 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5081067A (enrdf_load_stackoverflow) * | 1973-11-16 | 1975-07-01 | ||
| JPS5165882A (en) * | 1974-12-05 | 1976-06-07 | Sony Corp | Fuotorejisutono tofuhoho |
| JPS528383U (enrdf_load_stackoverflow) * | 1975-07-02 | 1977-01-20 |
-
1981
- 1981-03-30 JP JP4752581A patent/JPS57162666A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5081067A (enrdf_load_stackoverflow) * | 1973-11-16 | 1975-07-01 | ||
| JPS5165882A (en) * | 1974-12-05 | 1976-06-07 | Sony Corp | Fuotorejisutono tofuhoho |
| JPS528383U (enrdf_load_stackoverflow) * | 1975-07-02 | 1977-01-20 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010186929A (ja) * | 2009-02-13 | 2010-08-26 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0117748B2 (enrdf_load_stackoverflow) | 1989-03-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5755573A (en) | Cassette storing device | |
| USD258563S (en) | Container for liquids | |
| EP0340993A3 (en) | Liquid dispensing pouch | |
| CA2053490A1 (en) | Garbage processing device | |
| SG33984G (en) | Condensation of the vapour of a volatile liquid | |
| GR3004439T3 (enrdf_load_stackoverflow) | ||
| JPS5726457A (en) | Magazine | |
| JPS57162666A (en) | Liquid dropping device | |
| ES2028844T3 (es) | Envase desechable de jarabe que tiene un conjunto integral de valvula desechable. | |
| USD280131S (en) | Case for a multiplicity of liquid sample containers for a multitest chemistry analyzer | |
| JPS5711117A (en) | Air cleaner device in autocycle | |
| JPS56138214A (en) | Apparatus storing box body | |
| SE7707216L (sv) | Elektronstraleforangare och behallare for upptagande av forangbart material | |
| GB2119280B (en) | Apparatus for cleaning air of paint entrained therein | |
| JPS6411506A (en) | Receiving body for cosmetics | |
| JPS52102799A (en) | Locking mechanism for inlet of coin container | |
| JPS5518214A (en) | Solvent recovery apparatus | |
| JPS541641A (en) | Toner supply device | |
| JPH0446630B2 (enrdf_load_stackoverflow) | ||
| SE8304196D0 (sv) | Spill-proof reservoir for vapor release | |
| JPS567988A (en) | Heat panel | |
| JPS5831316Y2 (ja) | 蓄電池 | |
| JPS5682641A (en) | Automatic unloading device for powdered substance for car body for transporting powdered substance | |
| JPS55141373A (en) | Flux feeder | |
| SE8305609D0 (sv) | Sekerhetsanordning vid en vatkondensatorbehallare for evakuering av overtryck i denna |