JPH01176924U - - Google Patents

Info

Publication number
JPH01176924U
JPH01176924U JP1988073201U JP7320188U JPH01176924U JP H01176924 U JPH01176924 U JP H01176924U JP 1988073201 U JP1988073201 U JP 1988073201U JP 7320188 U JP7320188 U JP 7320188U JP H01176924 U JPH01176924 U JP H01176924U
Authority
JP
Japan
Prior art keywords
substrate
side plate
resist
vacuum chuck
rotational direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988073201U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988073201U priority Critical patent/JPH01176924U/ja
Publication of JPH01176924U publication Critical patent/JPH01176924U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1988073201U 1988-05-31 1988-05-31 Pending JPH01176924U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988073201U JPH01176924U (enExample) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988073201U JPH01176924U (enExample) 1988-05-31 1988-05-31

Publications (1)

Publication Number Publication Date
JPH01176924U true JPH01176924U (enExample) 1989-12-18

Family

ID=31298347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988073201U Pending JPH01176924U (enExample) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH01176924U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05283511A (ja) * 1992-03-31 1993-10-29 Nippon Telegr & Teleph Corp <Ntt> 真空吸着装置
JP2001212492A (ja) * 2000-01-31 2001-08-07 Shin Sti Technology Kk スピンコーター

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05283511A (ja) * 1992-03-31 1993-10-29 Nippon Telegr & Teleph Corp <Ntt> 真空吸着装置
JP2001212492A (ja) * 2000-01-31 2001-08-07 Shin Sti Technology Kk スピンコーター

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