JPH01173936U - - Google Patents
Info
- Publication number
- JPH01173936U JPH01173936U JP6964788U JP6964788U JPH01173936U JP H01173936 U JPH01173936 U JP H01173936U JP 6964788 U JP6964788 U JP 6964788U JP 6964788 U JP6964788 U JP 6964788U JP H01173936 U JPH01173936 U JP H01173936U
- Authority
- JP
- Japan
- Prior art keywords
- section
- cover
- vertical
- cvd
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000376 reactant Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988069647U JP2534674Y2 (ja) | 1988-05-25 | 1988-05-25 | 縦形ｃｖｄボ−ト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988069647U JP2534674Y2 (ja) | 1988-05-25 | 1988-05-25 | 縦形ｃｖｄボ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173936U true JPH01173936U (enrdf_load_stackoverflow) | 1989-12-11 |
| JP2534674Y2 JP2534674Y2 (ja) | 1997-05-07 |
Family
ID=31294922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988069647U Expired - Lifetime JP2534674Y2 (ja) | 1988-05-25 | 1988-05-25 | 縦形ｃｖｄボ−ト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2534674Y2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04188721A (ja) * | 1990-11-22 | 1992-07-07 | Tokyo Electron Ltd | 縦型熱処理装置 |
| JP2009218583A (ja) * | 2008-02-20 | 2009-09-24 | Tera Semicon Corp | ボート |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62134936A (ja) * | 1985-12-05 | 1987-06-18 | アニコン・インコ−ポレ−テツド | 腐食耐性をもつたウエ−フア−・ボ−ト及びその製造法 |
| JPS62254422A (ja) * | 1986-04-28 | 1987-11-06 | Fukui Shinetsu Sekiei:Kk | ウエハ支持ボ−ト |
-
1988
- 1988-05-25 JP JP1988069647U patent/JP2534674Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62134936A (ja) * | 1985-12-05 | 1987-06-18 | アニコン・インコ−ポレ−テツド | 腐食耐性をもつたウエ−フア−・ボ−ト及びその製造法 |
| JPS62254422A (ja) * | 1986-04-28 | 1987-11-06 | Fukui Shinetsu Sekiei:Kk | ウエハ支持ボ−ト |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04188721A (ja) * | 1990-11-22 | 1992-07-07 | Tokyo Electron Ltd | 縦型熱処理装置 |
| JP2009218583A (ja) * | 2008-02-20 | 2009-09-24 | Tera Semicon Corp | ボート |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2534674Y2 (ja) | 1997-05-07 |