JPH01165557U - - Google Patents
Info
- Publication number
- JPH01165557U JPH01165557U JP6108088U JP6108088U JPH01165557U JP H01165557 U JPH01165557 U JP H01165557U JP 6108088 U JP6108088 U JP 6108088U JP 6108088 U JP6108088 U JP 6108088U JP H01165557 U JPH01165557 U JP H01165557U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- sliding body
- spherical bearing
- bearing
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6108088U JPH01165557U (nl) | 1988-05-11 | 1988-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6108088U JPH01165557U (nl) | 1988-05-11 | 1988-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165557U true JPH01165557U (nl) | 1989-11-20 |
Family
ID=31286757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6108088U Pending JPH01165557U (nl) | 1988-05-11 | 1988-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165557U (nl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014116185A (ja) * | 2012-12-10 | 2014-06-26 | Jeol Ltd | 試料位置決め装置、荷電粒子線装置、および試料ホルダー |
-
1988
- 1988-05-11 JP JP6108088U patent/JPH01165557U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014116185A (ja) * | 2012-12-10 | 2014-06-26 | Jeol Ltd | 試料位置決め装置、荷電粒子線装置、および試料ホルダー |
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