JPH01165433U - - Google Patents
Info
- Publication number
- JPH01165433U JPH01165433U JP6318988U JP6318988U JPH01165433U JP H01165433 U JPH01165433 U JP H01165433U JP 6318988 U JP6318988 U JP 6318988U JP 6318988 U JP6318988 U JP 6318988U JP H01165433 U JPH01165433 U JP H01165433U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- deformable member
- plate
- needle
- magnitude
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Description
第１図は本考案を適用した振動センサの概略構
成図、第２図は本考案を適用した温度センサの概
略構成図、第３図はセンサの動作を示す図、第４
図はｘ，ｙ，ｚ方向の配置例を示す図、第５図は
生産工程の概略図である。
１０……センサ、１２……ＳｉＯ２板ばね、１
４……剪断変形型圧電アクチユエータ、１６……
金属深針、２０……金属極板、２４……剪断変形
型圧電アクチユエータ、３８……演算装置、４０
……Ｃｕ板。
Figure 1 is a schematic configuration diagram of a vibration sensor to which the present invention is applied, Figure 2 is a schematic configuration diagram of a temperature sensor to which the present invention is applied, Figure 3 is a diagram showing the operation of the sensor, and Figure 4 is a diagram showing the operation of the sensor.
The figure shows an example of the arrangement in the x, y, and z directions, and FIG. 5 is a schematic diagram of the production process. 10...Sensor, 12...SiO 2 leaf spring, 1
4... Shear deformation type piezoelectric actuator, 16...
Metal deep needle, 20... Metal electrode plate, 24... Shear deformation type piezoelectric actuator, 38... Arithmetic device, 40
...Cu board.
Claims (1)
形部材と、前記変形部材の変形に伴つて相対位置
が変化するように対向配置された針状電極及び電
極板と、前記針状電極と前記電極板との間隙をト
ンネル領域まで近接させるアクチユエータと、前
記変形部材の変形に応じて変化するトンネル電流
の大きさに基づいて測定すべき物理量の大きさを
算出する算出手段と、を備えたトンネル電流を利
用したセンサ。 a deformable member that deforms in response to a change in a physical quantity to be measured; a needle-like electrode and an electrode plate that are arranged opposite to each other so that their relative positions change as the deformable member deforms; and the needle-like electrode and the electrode. A tunnel current comprising: an actuator that brings the gap between the plate and the plate close to the tunnel region; and a calculation means that calculates the magnitude of a physical quantity to be measured based on the magnitude of the tunnel current that changes according to the deformation of the deformable member. A sensor that uses
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6318988U JPH01165433U (en) | 1988-05-13 | 1988-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6318988U JPH01165433U (en) | 1988-05-13 | 1988-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165433U true JPH01165433U (en) | 1989-11-20 |
Family
ID=31288696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6318988U Pending JPH01165433U (en) | 1988-05-13 | 1988-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165433U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02253117A (en) * | 1989-03-28 | 1990-10-11 | Seiko Instr Inc | Sensor and minute pressure change detecting method |
-
1988
- 1988-05-13 JP JP6318988U patent/JPH01165433U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02253117A (en) * | 1989-03-28 | 1990-10-11 | Seiko Instr Inc | Sensor and minute pressure change detecting method |