JPS63137818U - - Google Patents
Info
- Publication number
- JPS63137818U JPS63137818U JP2888887U JP2888887U JPS63137818U JP S63137818 U JPS63137818 U JP S63137818U JP 2888887 U JP2888887 U JP 2888887U JP 2888887 U JP2888887 U JP 2888887U JP S63137818 U JPS63137818 U JP S63137818U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- metal plate
- piezoelectric element
- quantity sensor
- bonded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
第１図は本考案の一実施例図、第２図は第１図
の装置の作用説明図、第３〜１０図はそれぞれ本
考案の他の実施例図、第１１図は第１０図の実施
例の作用説明図、第１２図及び第１３図はそれぞ
れ本考案の他の実施例図、第１４図及び第１５図
は従来装置の一例の断面図及び圧電素子の平面図
である。
符号の説明、１……圧電ダイアフラム、１０…
…金属薄板、１１，１２……圧電素子、２０〜２
６……接着剤、５０，５３……金属薄板、５１，
５２……圧電素子、５４……切欠部、５５，５６
，５８，５９……電極、５７……接着部分。
Fig. 1 is an illustration of one embodiment of the present invention, Fig. 2 is an explanatory diagram of the operation of the device shown in Fig. 1, Figs. 3 to 10 are illustrations of other embodiments of the invention, Fig. FIG. 12 and FIG. 13 are diagrams showing another embodiment of the present invention, respectively, and FIGS. 14 and 15 are a cross-sectional view of an example of a conventional device and a plan view of a piezoelectric element. Explanation of symbols, 1...Piezoelectric diaphragm, 10...
...Thin metal plate, 11, 12...Piezoelectric element, 20-2
6... Adhesive, 50, 53... Metal thin plate, 51,
52... Piezoelectric element, 54... Notch, 55, 56
, 58, 59...electrode, 57...adhesive part.
Claims (1)
イアフラムの周辺部を固定してなる圧電型力学量
センサにおいて、上記金属薄板と上記圧電素子と
の接着面の所定部分に非接着部分を設けたことを
特徴とする圧電型力学量センサ。 In a piezoelectric mechanical quantity sensor formed by fixing the peripheral portion of a piezoelectric diaphragm in which a thin piezoelectric element is bonded to a thin metal plate, a non-bonded portion is provided at a predetermined portion of the bonding surface between the thin metal plate and the piezoelectric element. A piezoelectric mechanical quantity sensor featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2888887U JPS63137818U (en) | 1987-03-02 | 1987-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2888887U JPS63137818U (en) | 1987-03-02 | 1987-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137818U true JPS63137818U (en) | 1988-09-12 |
Family
ID=30832268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2888887U Pending JPS63137818U (en) | 1987-03-02 | 1987-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137818U (en) |
-
1987
- 1987-03-02 JP JP2888887U patent/JPS63137818U/ja active Pending