【図面の簡単な説明】[Brief explanation of the drawing]
第１図ないし第３図はこの考案に係る圧電型力
学量センサの第１実施例を示すもので、第１図は
縦断面図、第２図は圧電ダイヤフラムの平面図、
第３図は同上圧電ダイヤフラムの縦断面図、第４
図はこの考案の第２実施例を示す縦断面図、第５
図はこの考案の第３実施例を示す縦断面図、第６
図ないし第８図はこの考案の第４実施例を示すも
ので、第６図は縦断面図、第７図は圧電ダイヤフ
ラムの平面図、第８図は同上圧電ダイヤフラムを
高分子薄膜を破断して示す側面図、第９図はこの
考案の第５実施例における圧電ダイヤフラムの平
面図、第１０図は同上圧電ダイヤフラムを高分子
薄膜を破断して示す側面図、第１１図はこの考案
の第６実施例を筐体を破断して示す平面図、第１
２図は同上第６実施例の縦断面図、第１３図は同
上第６実施例の製造工程の一例を示す工程図、第
１４図はこの考案の第７実施例における圧電ダイ
ヤフラムの平面図、第１５図はこの考案の第８実
施例を示す縦断面図、第１６図はこの考案の第９
実施例を示す縦断面図、第１７図はこの考案の第
１０実施例を示す縦断面図、第１８図はこの考案
の第１１実施例における圧電ダイヤフラムの縦断
面図、第１９図はこの考案の第１２実施例におけ
る圧電ダイヤフラムの縦断面図、第２０図はこの
考案の第１３実施例における圧電ダイヤフラムの
縦断面図、第２１図は同上圧電ダイヤフラムの平
面図である。
１，１５，１６：筐体、２，３，１７，２２，
２３：圧電素子、４，１８，１９，２４：電極、
５：高分子薄膜、１０，２０，３０，４０，５０
：圧電ダイヤフラム、１１：支持部材。
1 to 3 show a first embodiment of the piezoelectric mechanical quantity sensor according to the invention, in which FIG. 1 is a longitudinal sectional view, FIG. 2 is a plan view of a piezoelectric diaphragm,
Figure 3 is a vertical cross-sectional view of the same piezoelectric diaphragm, Figure 4.
The figure is a longitudinal sectional view showing the second embodiment of this invention, and the fifth embodiment.
The figure is a vertical sectional view showing the third embodiment of this invention, and the sixth embodiment.
8 to 8 show a fourth embodiment of this invention, in which FIG. 6 is a longitudinal sectional view, FIG. 7 is a plan view of a piezoelectric diaphragm, and FIG. 8 is a piezoelectric diaphragm obtained by breaking a polymer thin film. 9 is a plan view of a piezoelectric diaphragm according to a fifth embodiment of this invention, FIG. 10 is a side view of the same piezoelectric diaphragm with the polymer thin film cut away, and FIG. 11 is a plan view of a piezoelectric diaphragm according to a fifth embodiment of this invention. 6. A plan view showing the 6th embodiment with the housing broken, 1st
FIG. 2 is a vertical cross-sectional view of the sixth embodiment, FIG. 13 is a process diagram showing an example of the manufacturing process of the sixth embodiment, and FIG. 14 is a plan view of the piezoelectric diaphragm in the seventh embodiment of the invention. Fig. 15 is a vertical sectional view showing the eighth embodiment of this invention, and Fig. 16 is a longitudinal sectional view showing the ninth embodiment of this invention.
FIG. 17 is a vertical cross-sectional view showing a tenth embodiment of this invention, FIG. 18 is a vertical cross-sectional view of a piezoelectric diaphragm in an eleventh embodiment of this invention, and FIG. 19 is a longitudinal cross-sectional view showing a piezoelectric diaphragm in an eleventh embodiment of this invention. 20 is a longitudinal sectional view of a piezoelectric diaphragm in a 13th embodiment of this invention, and FIG. 21 is a plan view of the same piezoelectric diaphragm. 1, 15, 16: Housing, 2, 3, 17, 22,
23: piezoelectric element, 4, 18, 19, 24: electrode,
5: Polymer thin film, 10, 20, 30, 40, 50
: piezoelectric diaphragm, 11: support member.