JPH01164756U - - Google Patents

Info

Publication number
JPH01164756U
JPH01164756U JP5920988U JP5920988U JPH01164756U JP H01164756 U JPH01164756 U JP H01164756U JP 5920988 U JP5920988 U JP 5920988U JP 5920988 U JP5920988 U JP 5920988U JP H01164756 U JPH01164756 U JP H01164756U
Authority
JP
Japan
Prior art keywords
vacuum
forming apparatus
cathode
film forming
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5920988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435413Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988059209U priority Critical patent/JPH0435413Y2/ja
Publication of JPH01164756U publication Critical patent/JPH01164756U/ja
Application granted granted Critical
Publication of JPH0435413Y2 publication Critical patent/JPH0435413Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988059209U 1988-04-30 1988-04-30 Expired JPH0435413Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988059209U JPH0435413Y2 (cs) 1988-04-30 1988-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988059209U JPH0435413Y2 (cs) 1988-04-30 1988-04-30

Publications (2)

Publication Number Publication Date
JPH01164756U true JPH01164756U (cs) 1989-11-17
JPH0435413Y2 JPH0435413Y2 (cs) 1992-08-21

Family

ID=31284993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988059209U Expired JPH0435413Y2 (cs) 1988-04-30 1988-04-30

Country Status (1)

Country Link
JP (1) JPH0435413Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008108018A1 (ja) * 2007-03-07 2008-09-12 Shinmaywa Industries, Ltd. 基板保持装置、ターゲット保持装置、及び真空成膜装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326443U (cs) * 1976-08-13 1978-03-06
JPS5635767A (en) * 1979-08-30 1981-04-08 Fuji Kinzoku Kako:Kk Basket type electrostatic plating apparatus and plating method
JPS60255973A (ja) * 1984-04-12 1985-12-17 プラスコ・ドクトル・エーリツヒ・プラズマ―コーテイング・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 真空中で材料を蒸発する方法および装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5326443U (cs) * 1976-08-13 1978-03-06
JPS5635767A (en) * 1979-08-30 1981-04-08 Fuji Kinzoku Kako:Kk Basket type electrostatic plating apparatus and plating method
JPS60255973A (ja) * 1984-04-12 1985-12-17 プラスコ・ドクトル・エーリツヒ・プラズマ―コーテイング・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 真空中で材料を蒸発する方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008108018A1 (ja) * 2007-03-07 2008-09-12 Shinmaywa Industries, Ltd. 基板保持装置、ターゲット保持装置、及び真空成膜装置

Also Published As

Publication number Publication date
JPH0435413Y2 (cs) 1992-08-21

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