JPH0116381B2 - - Google Patents
Info
- Publication number
- JPH0116381B2 JPH0116381B2 JP55185125A JP18512580A JPH0116381B2 JP H0116381 B2 JPH0116381 B2 JP H0116381B2 JP 55185125 A JP55185125 A JP 55185125A JP 18512580 A JP18512580 A JP 18512580A JP H0116381 B2 JPH0116381 B2 JP H0116381B2
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- platinum
- moisture
- temperature
- sensitive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 59
- 229910052697 platinum Inorganic materials 0.000 claims description 30
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 13
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims description 4
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims description 4
- 238000000034 method Methods 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 229910000809 Alumel Inorganic materials 0.000 description 1
- -1 Cr 2 O 3 Chemical class 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 150000003057 platinum Chemical class 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Description
【発明の詳細な説明】
本発明は、湿度測定時において、感湿素体の温
度も同時に測定できる構造の感湿素子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a humidity sensing element having a structure that can simultaneously measure the temperature of a humidity sensing element when measuring humidity.
湿度を測定するために、MnWO4、MgCrO4と
TiO2などの金属酸化物の焼結体であつて、周辺
雰囲気の湿度変化に対応して自らの電気抵抗を変
化する性質を有する感湿素体に、その電気抵抗測
定用の電極を添着した構造の感湿素子が用いられ
ている。 To measure humidity, MnWO4 , MgCrO4 and
An electrode for measuring electrical resistance is attached to a moisture-sensitive element, which is a sintered body of metal oxide such as TiO 2 and has the property of changing its electrical resistance in response to changes in the humidity of the surrounding atmosphere. A moisture-sensitive element with a structure is used.
この感湿素子は、ある温度におけるある湿度雰
囲気に置かれて用いられる。このとき、上記の焼
結体（感湿素体という）の電気抵抗を測定し、そ
の値を、予め作成してあるその温度における既知
湿度と電気抵抗値との関係図から周辺雰囲気の湿
度を換算するものである。 This humidity sensing element is used by being placed in a certain humidity atmosphere at a certain temperature. At this time, the electrical resistance of the above-mentioned sintered body (referred to as a humidity-sensitive element) is measured, and the value is calculated from the relationship diagram between the known humidity at that temperature and the electrical resistance value, which has been created in advance. It is to be converted.
このように、感湿素子においては、該感湿素体
の電気抵抗の変化が重要な意味を有するが、この
電気抵抗はその温度によつても変化する。すなわ
ち、感湿素体は温度依存性を有している。 As described above, in a humidity sensing element, a change in the electrical resistance of the humidity sensing element body has an important meaning, but this electrical resistance also changes depending on the temperature. That is, the humidity sensitive element has temperature dependence.
そのため、ある温度及び湿度の雰囲気中に感湿
素子が置かれ、かつ感湿素子自体の温度が雰囲気
温度と異なる場合には、感湿素子の電気抵抗から
読み取られる湿度の値は、感湿素子自体の温度に
おける値であつて、雰囲気の湿度を正確に表示す
るものではない。 Therefore, if a humidity sensing element is placed in an atmosphere with a certain temperature and humidity, and the temperature of the humidity sensing element itself is different from the ambient temperature, the humidity value read from the electrical resistance of the humidity sensing element will be The value is based on the temperature itself, and does not accurately indicate the humidity of the atmosphere.
とりわけ、雰囲気が動いている場合（例えば、
大気流）には、感湿素子の表面から蒸発する水が
感湿素子から奪う蒸発熱は無視し得ず、その結
果、感湿素子自体の温度が雰囲気温度よりも低下
することがある。例えば、風速約10ｍ／secのと
き、感湿素子の温度は周辺大気流の温度よりも約
２℃程低下し、それは、感湿素子からの読み取り
湿度の値と周辺気流の真の湿度の値との間で、相
対湿度にして２〜３％の誤差をうみ出すことにも
なる。 Especially if the atmosphere is moving (e.g.
In the atmospheric flow), the heat of evaporation taken away from the humidity sensing element by water evaporating from the surface of the humidity sensing element cannot be ignored, and as a result, the temperature of the humidity sensing element itself may fall below the ambient temperature. For example, when the wind speed is approximately 10 m/sec, the temperature of the humidity sensing element is approximately 2°C lower than the temperature of the surrounding airflow, which is the difference between the humidity value read from the humidity sensing element and the true humidity value of the surrounding airflow. This results in an error of 2 to 3% in relative humidity.
このようなことから、感湿素子で湿度を測定す
る場合、正確な湿度を測定するためには、感湿素
子自体の温度を正確に知ることが必要である。 For this reason, when measuring humidity with a humidity sensing element, in order to accurately measure humidity, it is necessary to accurately know the temperature of the humidity sensing element itself.
このために、感湿素体の両面に電極を付設し、
該電極を介して1MHz以上の高周波電流を印加す
ることにより該感湿素体の誘電率を測定し、その
値から該感湿素体の温度を知るという方法が提案
されている。しかしながら、この方法は、極めて
繁雑な測定回路を必要とするのみならず、温度測
定の精度も充分ではないという欠点があつた。 For this purpose, electrodes are attached to both sides of the moisture-sensitive element.
A method has been proposed in which the dielectric constant of the moisture sensitive element is measured by applying a high frequency current of 1 MHz or more through the electrode, and the temperature of the moisture sensitive element is determined from the measured value. However, this method not only requires an extremely complicated measuring circuit, but also has the disadvantage that the accuracy of temperature measurement is not sufficient.
本発明は、上記のような問題点を解消する感湿
素子の提供を目的とするものである。 An object of the present invention is to provide a moisture-sensitive element that solves the above-mentioned problems.
すなわち、本発明の感湿素子は、感湿素体１
と、該感湿素体の両面に添着された１対の電極
２，２′と、該電極に付設された１対のリード線
３，３′とから成る感湿素子であつて、該電極２，
２′の少なくとも一つを白金電極で、かつ、該白
金電極に付設されるリード線を白金リード線で構
成するとともに、該白金電極には、さらに、白金
−ロジウム細線４を付設して、白金リード線と白
金−ロジウム細線との間で熱電対を形成したこと
を特徴とする。 That is, the humidity sensing element of the present invention has a humidity sensing element body 1
, a pair of electrodes 2, 2' attached to both surfaces of the humidity-sensitive element body, and a pair of lead wires 3, 3' attached to the electrodes, the electrode 2,
2' is a platinum electrode, and a lead wire attached to the platinum electrode is a platinum lead wire.A platinum-rhodium thin wire 4 is further attached to the platinum electrode, It is characterized in that a thermocouple is formed between the lead wire and the platinum-rhodium thin wire.
本発明の感湿素子においては、感湿素体が湿度
検出素子、白金電極と白金−ロジウム細線とが熱
電対を形成することにより、温度検出素子を構成
する。そのため、感湿素体の温度は、直接、該白
金電極に付設された白金リード線と該白金−ロジ
ウム細線による熱電対から測定することができ
る。 In the humidity sensing element of the present invention, the humidity sensing element body forms a humidity sensing element, and the platinum electrode and the platinum-rhodium thin wire form a thermocouple, thereby forming a temperature sensing element. Therefore, the temperature of the humidity sensitive element can be directly measured from a thermocouple made of a platinum lead wire attached to the platinum electrode and the platinum-rhodium thin wire.
本発明の感湿素子の作成に当つては、まず感湿
特性を有する感湿素体が調製される。このような
感湿素体としては、従来から知られている
Cr2O3、Fe2O3、Ni2O3などの金属酸化物を常法
により焼結して容易に得られる。通常、板状形体
が好んで用いられる。 In producing the humidity-sensitive element of the present invention, first, a moisture-sensitive element body having moisture-sensitive properties is prepared. Such moisture-sensitive elements have been known for a long time.
It can be easily obtained by sintering metal oxides such as Cr 2 O 3 , Fe 2 O 3 , Ni 2 O 3 by conventional methods. Generally, plate-like shapes are preferred.
この感湿素体の両面には、該感湿素体の電気抵
抗を検出するために１対の電極が添着される。こ
の場合、通常は、半導体デバイスの製作技術にお
いて汎用されている膜厚法を適用することが好ま
しい。すなわち、感湿素体の両面に電極となる金
属のペーストを、例えばスクリーン印刷法、塗布
法などによつて所定パターンに塗布した後、これ
を適宜な温度で焼付けるものである。得られた電
極には、それぞれ、白金、金などから成るリード
線を、例えば、ペーストで焼付けて付設し、感湿
素体の電気抵抗を検出する引出し線が形成され
る。 A pair of electrodes are attached to both sides of the humidity sensitive element in order to detect the electrical resistance of the humidity sensitive element. In this case, it is usually preferable to apply a film thickness method that is commonly used in semiconductor device manufacturing technology. That is, a metal paste to serve as electrodes is applied to both sides of the moisture-sensitive element in a predetermined pattern by, for example, screen printing or coating, and then baked at an appropriate temperature. Lead wires made of platinum, gold, or the like are attached to each of the obtained electrodes by baking with paste, for example, to form lead wires for detecting the electrical resistance of the moisture-sensitive element.
本発明においては、この電極の一方が白金電極
として構成される。そして、他方の電極は酸化ル
テニウムで構成することが好ましい。更に該白金
電極には、白金−ロジウム細線が例えば熱圧着法
によつて付設されて、感湿素体の温度検出のため
の熱電対が形成される。 In the present invention, one of the electrodes is configured as a platinum electrode. The other electrode is preferably made of ruthenium oxide. Further, a thin platinum-rhodium wire is attached to the platinum electrode by, for example, thermocompression bonding to form a thermocouple for detecting the temperature of the moisture sensitive element.
このようにして構成された本発明の感湿素子を
用いて温度測定する場合には、感湿素体の温度
は、白金電極に付設された白金リード線と白金−
ロジウム細線との間に発生する熱電対の起電力
で、また湿度は１対のリード線からの電気信号と
して同時に検出することができる。 When measuring temperature using the humidity sensing element of the present invention configured in this manner, the temperature of the humidity sensing element is determined by the platinum lead wire attached to the platinum electrode and the platinum lead wire attached to the platinum electrode.
Humidity can be simultaneously detected by the electromotive force of the thermocouple generated between the rhodium thin wire and as an electric signal from a pair of lead wires.
本発明の感湿素子は、以上のように構成される
から、湿度を電気抵抗値に読み直すとともに感湿
素体自体の温度を同時に測定できるので、湿度の
測定精度を高めることができるとともに、全体の
形状を非常にコンパクトにすることができるとい
う利点を有している。 Since the humidity sensing element of the present invention is configured as described above, it is possible to reread humidity into an electrical resistance value and simultaneously measure the temperature of the humidity sensing element itself, thereby increasing the accuracy of humidity measurement and improving the overall humidity. It has the advantage that the shape can be made very compact.
以下に本発明を第１図に示した実施例に基づい
て説明する。 The present invention will be explained below based on the embodiment shown in FIG.
実施例
酸化亜鉛、酸化クロム、酸化チタンの粉末（平
均粒径1.0μｍ）を、それぞれモル比で50％、40
％、10％秤量し、これらを湿式ポツトミルで充分
に混合した。この混合粉末を120℃で充分に乾燥
した後、適当量のポリビニルアルコールを粘結剤
として添加し、得られた混練物を1000Kg／cm2の圧
力で板状に成形した。ついで、この成形板を1200
℃、２時間加熱処理して焼結体を得た後、該焼結
体の両面を2000番ホワイト・アランダムで充分に
研磨した。両面が研磨された縦10mm横６mm厚み
0.5mmの感湿素体の板１が得られた。Example Zinc oxide, chromium oxide, and titanium oxide powder (average particle size 1.0 μm) were mixed in molar ratios of 50% and 40%, respectively.
% and 10% were weighed out and thoroughly mixed in a wet pot mill. After sufficiently drying this mixed powder at 120° C., an appropriate amount of polyvinyl alcohol was added as a binder, and the resulting kneaded product was molded into a plate shape at a pressure of 1000 kg/cm 2 . Next, this molded plate is 1200
C. for 2 hours to obtain a sintered body, and then both sides of the sintered body were thoroughly polished with No. 2000 white alundum. Both sides polished, height 10mm width 6mm thickness
A 0.5 mm moisture sensitive element plate 1 was obtained.
この感湿素体の板１の片面には白金ペーシト
（8109：徳力化学研究所製）をスクリーン印刷し
た後、1000℃で焼付けた。厚み約2.0μｍの白金電
極２が形成された。ついで、この白金電極２に、
白金リード線３（線径50μｍ）を１本焼付けて付
設した。 One side of the plate 1 of this moisture-sensitive element was screen-printed with platinum paste (8109, manufactured by Tokuriki Kagaku Kenkyujo), and then baked at 1000°C. A platinum electrode 2 having a thickness of approximately 2.0 μm was formed. Next, to this platinum electrode 2,
One platinum lead wire 3 (wire diameter 50 μm) was attached by baking.
感湿素体の板１の他方の面には、酸化ルテニウ
ムペースト（Dupont4501）をスクリーン印刷し
た後、800℃で焼付け厚み約10μｍの酸化ルテニ
ウム電極２′が形成された。この電極２′にも上記
と同様にして白金リード線３′１本を焼付けて付
設した。 Ruthenium oxide paste (Dupont 4501) was screen printed on the other side of the plate 1 of the humidity sensitive element, and then baked at 800°C to form a ruthenium oxide electrode 2' having a thickness of about 10 μm. A single platinum lead wire 3' was attached to this electrode 2' by baking in the same manner as described above.
ついで、白金電極２には、白金−ロジウム細線
４（線径100μｍ）を熱圧着して付設した。 Next, a thin platinum-rhodium wire 4 (wire diameter 100 μm) was attached to the platinum electrode 2 by thermocompression bonding.
得られた感湿素子を風速0.5ｍ／secの25℃気流
中に置いた。気流の温度はクロメル・アルメル熱
電対を用いて直接測定した。 The obtained humidity sensing element was placed in a 25°C airflow with a wind speed of 0.5 m/sec. The temperature of the air stream was measured directly using a chromel-alumel thermocouple.
気流の温度を25℃に保つて相対湿度を変化させ
て、そのときの感湿素体の電気抵抗を測定した。
その結果を第２図に示した。感湿素体の温度を、
白金電極に付設した白金リード線と白金−ロジウ
ムの間に生じる熱起電力を測定して、熱起電力と
温度の関係を示す第３図から求めたところ、その
値は24.0℃であつた。なお、この熱電対は０〜50
℃の温度範囲において有効に使用することができ
る。 The temperature of the airflow was maintained at 25°C, the relative humidity was varied, and the electrical resistance of the humidity-sensitive element was measured.
The results are shown in Figure 2. The temperature of the humidity sensitive element body,
The thermoelectromotive force generated between the platinum lead wire attached to the platinum electrode and the platinum-rhodium was measured and determined from Figure 3, which shows the relationship between thermoelectromotive force and temperature, and the value was 24.0°C. In addition, this thermocouple is 0 to 50
It can be used effectively in the temperature range of ℃.
すなわち、第２図に示した感湿特性は、実際に
は感湿素体の温度が24℃のものであることが判明
した。 That is, it has been found that the humidity-sensitive characteristics shown in FIG. 2 are actually those when the temperature of the humidity-sensitive element is 24°C.
第１図は、本発明の感湿素子の一実施例を示す
斜視図である。第２図は本発明の感湿素子の24℃
における感湿特性を示すものである。第３図は、
本発明の感湿素子における白金リード線と白金−
ロジウム細線による熱電対の温度特性を示すもの
である。
FIG. 1 is a perspective view showing an embodiment of the moisture-sensitive element of the present invention. Figure 2 shows the humidity sensing element of the present invention at 24°C.
This shows the moisture sensitivity characteristics of . Figure 3 shows
Platinum lead wire and platinum in the moisture sensitive element of the present invention
This shows the temperature characteristics of a thermocouple made of rhodium thin wire.
Claims (1)
た１対の電極２，２′と、該電極に付設された１
対のリード線３，３′とから成る感湿素子であつ
て、 該電極２，２′の少なくとも一つを白金電極で、
かつ、該白金電極に付設されるリード線を白金リ
ード線で構成するとともに、該白金電極には、さ
らに、白金−ロジウム細線４を付設して、白金リ
ード線と白金−ロジウム細線との間で熱電対を形
成したことを特徴とする感湿素子。 ２ 感湿素体に添着された一対の電極２，２′は、
一方が白金から成り、他方が酸化ルテニウムから
成る特許請求の範囲第１項記載の感湿素子。[Claims] 1. A moisture-sensitive element 1, a pair of electrodes 2, 2' attached to both sides of the moisture-sensitive element, and 1 attached to the electrodes.
A moisture sensing element comprising a pair of lead wires 3, 3', at least one of the electrodes 2, 2' being a platinum electrode,
In addition, the lead wire attached to the platinum electrode is composed of a platinum lead wire, and a platinum-rhodium thin wire 4 is further attached to the platinum electrode, so that a wire between the platinum lead wire and the platinum-rhodium thin wire is formed. A moisture sensing element characterized by forming a thermocouple. 2 A pair of electrodes 2, 2' attached to the moisture sensitive element body are
The moisture-sensitive element according to claim 1, wherein one of the elements is made of platinum and the other is made of ruthenium oxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55185125A JPS57110949A (en) | 1980-12-27 | 1980-12-27 | Moisture sensing element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55185125A JPS57110949A (en) | 1980-12-27 | 1980-12-27 | Moisture sensing element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57110949A JPS57110949A (en) | 1982-07-10 |
| JPH0116381B2 true JPH0116381B2 (en) | 1989-03-24 |
Family
ID=16165298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55185125A Granted JPS57110949A (en) | 1980-12-27 | 1980-12-27 | Moisture sensing element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57110949A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01158340A (en) * | 1987-09-03 | 1989-06-21 | Murata Mfg Co Ltd | Humidity sensor |
-
1980
- 1980-12-27 JP JP55185125A patent/JPS57110949A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57110949A (en) | 1982-07-10 |
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