JP2645153B2 - Thin film temperature sensor element - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a thin-film temperature sensor element for measuring a surface temperature of an object to be measured.

(Prior Art) As shown in FIG.
On one surface of a substrate 1 such as N, Al ₂ O ₃ , a thin-film RTD 2 such as Pt
The thin film lead wire 3 is connected to both ends of the thin film lead wire 3, and the terminal portions 4 formed at both ends of the thin film lead wire 3 are provided.
And output output wires 5 each made of Pt or the like.

When measuring the surface temperature of the object to be measured, the thin-film temperature sensor element 6 having the above-described configuration is configured to contact the surface of the object to be measured 7 with the other surface of the substrate 1 as shown in FIG. As shown in FIG. 8, the measurement is performed by bringing the thin-film resistance thermometer 2 into contact with the surface of the object 7 to be measured.

(Problems to be Solved by the Invention) In the temperature measurement method shown in FIG. 7, the substrate 1 is interposed between the thin-film resistance temperature detector 2 and the object 7 to be measured. Further, since the surface of the thin-film resistance thermometer 2 is exposed to the outside air, a large temperature gradient occurs, and as a result,
When the temperature was measured in the range of 100 ° C., an error of 1% occurred in the resistance value of the thin-film resistance thermometer 2, and accurate temperature measurement could not be performed. In addition, in the temperature measurement method shown in FIG. 8, as shown in the drawing, the output extraction wire 5 hinders the thin-film resistance thermometer 2 from making good contact with the object 7 to be measured, and the terminal portion 3 rises to correct the temperature measurement. Could not warm.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a thin-film temperature sensor element capable of accurately measuring a temperature by directly contacting a thin-film resistance temperature detector with the surface of an object to be measured.

(Means for Solving the Problems) According to a thin film temperature sensor element of the present invention for solving the above problems, a thin film thermometer or a thin film thermocouple having thin film leads at both ends is provided on one surface of a substrate. A terminal thin film is provided on the other surface of the substrate at each end of the lead wire or the thin film thermocouple, and a through hole is formed in the substrate so that each terminal thin film and both ends of the thin film lead wire or the thin film thermocouple are formed in the substrate. Are connected by a thin film provided on the inner surface of the terminal, and an output extracting wire is attached to each terminal thin film.

(Function) In the thin-film temperature sensor element of the present invention configured as described above, the terminal thin film to which the output wire is attached is provided on the surface opposite to the thin-film thermometer or the thin-film thermocouple, Since the thin-film resistance thermometer or the thin-film thermocouple is flat, the thin-film resistance thermometer or the thin-film thermocouple can be directly adhered to the surface of the measured object when measuring the surface temperature of the measured object. Therefore, the thermal response is good, and the surface of the thin-film resistance temperature detector or the thin-film thermocouple is not exposed to the outside air, so that the surface temperature of the measured object can be accurately measured.

(Example) An example of the thin film temperature sensor element of the present invention will be described with reference to the drawings. As shown in Fig. 1, width 20mm, length 30mm, thickness
Two through holes 11 having an inner diameter of 2 mm were formed in one end of a 1 mm AlN substrate 10 by laser processing (or ultrasonic processing). Next, one side of the AlN substrate 10 and the through hole 11 are coated with Pt by 0.3 μm by sputtering, and then patterned to be 0.1 mm wide and 0.1 mm long between the left ends of the thin film lead wires 12 as shown in FIG. A thin-film resistance thermometer 13 having a thickness of 10 mm and a resistance value R = 100Ω was formed. Next, Pt is applied to a position including the through hole 11 on the other surface of the AlN substrate 10 by 1 μm
Coated 5mm wide, 8mm long thin film for two terminals 14
Was formed. Thereafter, as shown in FIG. 4, an output extraction wire 15 made of annealed Pt having a wire diameter of 0.5 mm is connected to each terminal thin film 14 by sintering and fixing with a Pt paste to form a thin film temperature sensor element 16. Was.

The thin-film temperature sensor element 16 of the embodiment thus manufactured is
The thin-film resistance thermometer 13 is flat, and the wire 15
Since the terminal thin film 14 on which the terminal is mounted is on the opposite surface, the thin film resistance temperature detector 13 can be directly adhered to the surface of the DUT 7 without any gap as shown in FIG. 5 to measure the surface temperature. In, the thermal response of the thin-film resistance thermometer 13 was good, and the surface of the thin-film resistance thermometer 13 was not exposed to the outside air, so that the surface temperature of the measured object could be measured accurately. And from room temperature
In the measurement of the surface temperature of the DUT 7 within the range of 100 ° C., the resistance value of the thin-film resistance thermometer 13 maintained an error within 0.5%.

The substrate 10 of the thin film temperature sensor element 16 of the above embodiment is
Although it is made of AlN, Al ₂ O ₃ , SiO ₂ or the like may be used. Also, the through hole 11 of the substrate 10 is perforated in a green sheet shape,
You may bake. Further, the output wire 15 is not limited to Pt, but Cu, Au, or the like is used depending on the operating temperature of the thin-film temperature sensor element 16.

The above embodiment is an example in which the DUT 6 is an insulator. However, when the DUT 6 is a conductive material such as a metal, the surface of the thin-film lead wire 12 and the thin-film resistance thermometer 13 is coated with AlN. , Al ₂ O ₃ , Si
Precise temperature measurement becomes possible by coating an insulating thin film (about 0.1 μm) such as O ₂ . Further, in the above embodiment, the case of the thin-film resistance thermometer has been described. However, the present invention is not limited to this, and similar effects can be obtained in the case of a thin-film thermocouple.

(Effects of the Invention) As can be seen from the above description, the thin-film temperature sensor element of the present invention has a flat thin-film resistance thermometer or a thin-film thermocouple, and the thin film for the terminal to which the output wire is attached is on the opposite side. The thin film resistance thermometer or thin film thermocouple can be directly adhered to the surface of the object to be measured because it is provided on the surface. Is not exposed to the outside air, so that the surface temperature of the measured object can be accurately measured.

[Brief description of the drawings]

1 to 4 are manufacturing process diagrams of one embodiment of the thin film temperature sensor element of the present invention, and FIG. 5 is a diagram showing a state in which the surface temperature of an object to be measured is measured by the thin film temperature sensor element of the present invention. FIG. 6 is a diagram showing a conventional thin film temperature sensor element, and FIGS. 7 and 8 are diagrams each showing a state in which the surface temperature of an object to be measured is measured by the thin film temperature sensor element.

Claims (1)

(57) [Claims] A thin-film resistance thermometer or a thin-film thermocouple provided with a thin-film lead at both ends is provided on one surface of a substrate, and terminals for connecting terminals to the other surface of the substrate at both ends of the thin-film lead or thin-film thermocouple, respectively. A thin film is provided, and the thin film for each terminal and both ends of the thin film lead wire or the thin film thermocouple are connected by a thin film provided on the inner surface of a through hole formed in the substrate. A thin-film temperature sensor element having a wire attached thereto.