JPS6145180B2 - - Google Patents
Info
- Publication number
- JPS6145180B2 JPS6145180B2 JP56050762A JP5076281A JPS6145180B2 JP S6145180 B2 JPS6145180 B2 JP S6145180B2 JP 56050762 A JP56050762 A JP 56050762A JP 5076281 A JP5076281 A JP 5076281A JP S6145180 B2 JPS6145180 B2 JP S6145180B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- humidity
- moisture
- sintered body
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005245 sintering Methods 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 238000009833 condensation Methods 0.000 description 11
- 230000005494 condensation Effects 0.000 description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 5
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910018068 Li 2 O Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 1
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910001922 gold oxide Inorganic materials 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Description
【発明の詳細な説明】
本発明は結露検出機能を付与した感湿素子に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a moisture sensitive element provided with a dew condensation detection function.
従来感湿素子は第１図に示すようにセラミツク
粉末を例えば円板状に成形焼結してなる焼結体１
の表裏両面に金ペーストまたは酸化ルテニウムペ
ーストなどの導電性電極剤を塗布焼付けし電極２
を形成し該電極２にリード端子３ａ，３ｂを取着
してなるものである。しかしてこのような感湿素
子は焼結体のバルク方向で相対湿度に対応する抵
抗値の変化を測定し機能するようにしている。す
なわち前記電極２間の抵抗値を測定しているが電
極周辺部の表面リークが抵抗成分に加算されるた
め感湿による正確な抵抗値が得られなく測定誤差
の原因となる欠点をもつていた。またこのような
構成では単に感湿性のみで結露を同時に測定する
ことはできなかつた。 A conventional moisture-sensitive element is a sintered body 1 made by molding and sintering ceramic powder into, for example, a disk shape, as shown in FIG.
A conductive electrode material such as gold paste or ruthenium oxide paste is applied and baked on both the front and back sides of the electrode 2.
, and lead terminals 3a and 3b are attached to the electrode 2. However, such a humidity sensing element functions by measuring a change in resistance value corresponding to relative humidity in the bulk direction of the sintered body. In other words, the resistance value between the electrodes 2 is measured, but since the surface leakage around the electrodes is added to the resistance component, an accurate resistance value cannot be obtained due to moisture sensitivity, which has the disadvantage of causing measurement errors. . Furthermore, with such a configuration, it was not possible to simultaneously measure dew condensation based solely on moisture sensitivity.
本発明は上記のような点に鑑みてなされたもの
で焼結体の画面に形成した感湿電極部の周囲に焼
結体を構成する組成より低抵抗のガードリング電
極を形成し、この場合該ガードリング電極と前記
感湿電極間の間隙を前記焼結体厚さより大きくし
感湿電極部およびガードリング電極の両面からそ
れぞれリード線を引出すようにすることによつて
正確な感湿特性を測定し、かつ結露の測定ができ
る感湿素子を提供することを目的とするものであ
る。 The present invention has been made in view of the above points, and a guard ring electrode having a lower resistance than the composition constituting the sintered body is formed around the moisture-sensitive electrode portion formed on the screen of the sintered body. The gap between the guard ring electrode and the humidity sensitive electrode is made larger than the thickness of the sintered body, and lead wires are drawn out from both sides of the humidity sensitive electrode portion and the guard ring electrode, thereby obtaining accurate moisture sensitive characteristics. The object of the present invention is to provide a moisture-sensitive element that can measure dew condensation.
以下本発明の一実施例につき図面を参照して説
明する。すなわち第２図および第３図に示すよう
に例えばNnO−V2O5−Li2Oを主成分とした金属
酸化物を適正量秤取しこれをボールミルなどでよ
く混合し600〜900℃の温度で焙焼しさらに５％ポ
リビニルアルコールの水溶液をバインダとして造
粒し円板状に成形する。ついでこの成形体を1000
〜1400℃で１〜５時間焼結しその後研磨して焼結
体１１を形成する。つぎに該焼結体１１の表裏両
面に金ペーストまたは酸化ルテニウムペーストな
どを円状に塗布しさらに円状塗布面の周囲にも前
記金ペーストまたは酸化ルテニウムペーストなど
を環状に塗布し、前記円状塗布面と環状塗布面を
同時に焼付し感湿電極１２ａ，１２ｂとガードリ
ング電極１３ａ，１３ｂを形成する。なおこの場
合、結露発生の場合に焼結体１１表面結露をすば
やく検出するため感湿電極１２ａ，１２ｂ外周辺
とガードリング電極１３ａ，１３ｂ内周辺それぞ
れの間隙寸法ｌを前記焼結体１１の厚さ寸法ｔよ
り大きくなるようにし、前記感湿電極１２ａと前
記ガードリング電極１３ａおよび前記感湿電極１
２ｂと前記ガードリング電極１３ｂ間で結露を測
定するものとする。しかして前記感湿電極１２
ａ，１２ｂおよびガードリング電極１３ａ，１３
ｂからリード端子１４ａ，１４ｂと１４ｃ，１４
ｄをそれぞれ引出してなるものである。第４図は
この場合の等価回路を示したものである。 An embodiment of the present invention will be described below with reference to the drawings. That is, as shown in Figures 2 and 3, for example, an appropriate amount of a metal oxide mainly composed of NnO-V 2 O 5 -Li 2 O is weighed out, mixed well in a ball mill, etc., and heated at 600 to 900°C. The mixture is roasted at a high temperature, then granulated using a 5% polyvinyl alcohol aqueous solution as a binder, and formed into a disk shape. Next, 1000 pieces of this molded body
A sintered body 11 is formed by sintering at ~1400° C. for 1 to 5 hours and then polishing. Next, gold paste, ruthenium oxide paste, etc. is applied in a circular manner to both the front and back surfaces of the sintered body 11, and the gold paste, ruthenium oxide paste, etc. is also applied in an annular manner around the circular application surface. The coated surface and the annular coated surface are baked simultaneously to form moisture sensitive electrodes 12a, 12b and guard ring electrodes 13a, 13b. In this case, in order to quickly detect dew condensation on the surface of the sintered body 11 when condensation occurs, the gap size l between the outer periphery of the moisture-sensitive electrodes 12a and 12b and the inner periphery of the guard ring electrodes 13a and 13b is determined by the thickness of the sintered body 11. The humidity sensing electrode 12a, the guard ring electrode 13a and the humidity sensing electrode 1
2b and the guard ring electrode 13b. However, the humidity sensitive electrode 12
a, 12b and guard ring electrodes 13a, 13
Lead terminals 14a, 14b and 14c, 14 from b
d. FIG. 4 shows an equivalent circuit in this case.
以上のように構成してなる感湿素子は感湿電極
１２ａ，１２ｂ周囲に形成したガードリング電極
１３ａ，１３ｂ内周と感湿電極１２ａ，１２ｂ外
周のそれぞれの間隙寸法ｌが焼結体１１の厚さ寸
法ｔより大きくなるように構成しているためリー
ド端子１４ａ，１４ｂ間で測定する感湿抵抗値
RHは感湿電極１２ａとガードリング電極１３ａ
間および感湿電極１２ｂとガードリング電極１３
ｂ間の表面リークの影響はなく、リード端子１４
ａ，１４ｃ間あるいはリード端子１４ｂ，１４ｄ
間で測定する結露抵抗値RKより常に小さくな
り、感湿電極１２ａ，１２ｂ形成間の焼結体１１
のバルク方向で相対湿度に対応する抵抗値の変化
を正確に測定できる。と同時に結露発生の場合リ
ード端子１４ａ，１４ｃ間およびリード端子１４
ｂ，１４ｄ間ですばやく結露抵抗値RKを測定で
きる効果を合せ持つ利点を有する。 In the humidity sensing element constructed as described above, the gap size l between the inner periphery of the guard ring electrodes 13a, 13b formed around the humidity sensing electrodes 12a, 12b and the outer periphery of the humidity sensing electrodes 12a, 12b is the same as that of the sintered body 11. Since it is configured to be larger than the thickness dimension t, the moisture-sensitive resistance value measured between the lead terminals 14a and 14b
RH is the humidity sensitive electrode 12a and guard ring electrode 13a
between the moisture sensitive electrode 12b and the guard ring electrode 13
There is no effect of surface leakage between lead terminals 14 and 14.
between a and 14c or lead terminals 14b and 14d
The sintered body 11 between the moisture-sensitive electrodes 12a and 12b is always smaller than the dew condensation resistance RK measured between
It is possible to accurately measure the change in resistance value corresponding to relative humidity in the bulk direction. At the same time, if condensation occurs between lead terminals 14a and 14c and between lead terminals 14
It has the advantage of being able to quickly measure the condensation resistance value RK between b and 14d.
つぎに本発明による感湿素子の25℃−1KHzに
おける相対湿度に対応する抵抗値の特性を第５図
によつて説明する。すなわち曲線Ａは前記リード
端子１４ａ，１４ｂ間の相対湿度に対応する抵抗
値の変化を示すもので、曲線Ｂは前記リード端子
１４ａ，１４ｃ間およびリード端子１４ｂ，１４
ｄ間の相対湿度に対応する抵抗値の変化を示した
ものである。第５図から明らかなように曲線Ａは
相対湿度と抵抗値は使い易い関係をもつているこ
とを示しておりリード端子１４ａ，１４ｂ間です
ぐれた感湿特性を発揮できる。また曲線Ｂは低湿
度側では湿度に関する感度は小さいが相対湿度90
〜100％近くになると急激に抵抗値の減少が認め
られている。特に相対湿度100％近くになると抵
抗値が対数で約２桁近く変化しておりリード端子
１４ａ，１４ｃ間およびリード端子１４ｂ，１４
ｄ間で結露検出として機能できることがわかつ
た。なお本実験に用いた感湿素子はZnO−V2O5
−Li2Oを主成分として感湿電極１２ａ，１２ｂ
は金ペースト、ガードリング電極１３ａ，１３ｂ
は酸化ルテニウムペーストを用いた焼結体１１の
厚み0.2mm感湿電極１２ａ，１２ｂとガードリン
グ電極１３ａ，１３ｂ間の間隙を0.25mmとしたも
のである。また上記実施例において電極材料とし
て金および酸化ルテニウムに限定して説明したが
例えば他に白金、ニツケル、銅などの金属または
酸化インジウム、酸化錫、酸化亜鉛、酸化カドミ
ウムなどの酸化物などを用いてもよい。 Next, the characteristics of the resistance value corresponding to the relative humidity at 25 DEG C. and 1 KHz of the humidity sensing element according to the present invention will be explained with reference to FIG. That is, curve A shows the change in resistance value corresponding to the relative humidity between the lead terminals 14a and 14b, and curve B shows the change in resistance value between the lead terminals 14a and 14c and between the lead terminals 14b and 14.
d shows the change in resistance value corresponding to relative humidity. As is clear from FIG. 5, curve A shows that relative humidity and resistance value have an easy-to-use relationship, and excellent moisture sensitivity characteristics can be exhibited between lead terminals 14a and 14b. Curve B has a small humidity sensitivity on the low humidity side, but the relative humidity is 90
It is observed that the resistance value decreases rapidly when it approaches ~100%. In particular, when the relative humidity is close to 100%, the resistance value changes logarithmically by about two orders of magnitude, and the resistance value changes logarithmically by about two orders of magnitude.
It was found that it can function as a dew condensation detection between d and d. The moisture sensing element used in this experiment was ZnO−V 2 O 5
- Moisture-sensitive electrodes 12a and 12b containing Li 2 O as the main component
gold paste, guard ring electrodes 13a, 13b
In this example, the thickness of the sintered body 11 made of ruthenium oxide paste is 0.2 mm, and the gap between the moisture-sensitive electrodes 12a, 12b and the guard ring electrodes 13a, 13b is 0.25 mm. In the above embodiments, the electrode materials were limited to gold and ruthenium oxide, but other metals such as platinum, nickel, and copper, or oxides such as indium oxide, tin oxide, zinc oxide, and cadmium oxide may also be used. Good too.
以上述べたように本発明によれば焼結体の両面
に形成した感湿電極部周囲に焼結体を構成する組
成により低抵抗のガードリング電極を形成し、こ
の場合該ガードリング電極外周と前記感湿電極内
周との間隙を前記焼結体厚さより大きくし感湿電
極およびガードリング電極の両面からそれぞれリ
ード端子を引出すようにすることによつて感湿電
極間で感湿抵抗特性を、ガードリング電極と感湿
電極間で結露抵抗特性を同時に測定可能な結露検
出機能を付与した感湿素子を提供することができ
る。 As described above, according to the present invention, a low-resistance guard ring electrode is formed around the moisture-sensitive electrode portions formed on both sides of the sintered body, and in this case, a low-resistance guard ring electrode is formed by the composition constituting the sintered body, and in this case, the outer periphery of the guard ring electrode By making the gap with the inner periphery of the humidity-sensitive electrode larger than the thickness of the sintered body and drawing out the lead terminals from both sides of the humidity-sensitive electrode and the guard ring electrode, the moisture-sensitive resistance characteristics can be improved between the humidity-sensitive electrodes. Accordingly, it is possible to provide a humidity sensing element having a dew condensation detection function that can simultaneously measure dew condensation resistance characteristics between a guard ring electrode and a humidity sensitive electrode.
第１図は従来例による感湿素子を示す正面図、
第２図および第３図は本発明による感湿素子を示
すもので第２図は正面図、第３図は側面図、第４
図は本発明による感湿素子の等価回路図、第５図
は抵抗−相対湿度特性を示す曲線図である。
１１……焼結体、１２ａ，１２ｂ……感湿電
極、１３ａ，１３ｂ……ガードリング電極、１４
ａ，１４ｂ，１４ｃ，１４ｄ……リード端子。
FIG. 1 is a front view showing a conventional moisture sensing element;
Figures 2 and 3 show the moisture sensing element according to the present invention, with Figure 2 being a front view, Figure 3 being a side view, and Figure 4 being a side view.
The figure is an equivalent circuit diagram of the humidity sensing element according to the present invention, and FIG. 5 is a curve diagram showing resistance-relative humidity characteristics. 11... Sintered body, 12a, 12b... Moisture sensitive electrode, 13a, 13b... Guard ring electrode, 14
a, 14b, 14c, 14d...Lead terminals.
Claims (1)
体と、該焼結体の表裏両面に形成した感湿電極
と、該感湿電極の周囲に該感湿電極外周辺から前
記焼結体の厚さ寸法より大きな間隙を設けて形成
したガードリング電極とを具備し、該ガードリン
グ電極と前記感湿電極とからそれぞれリード端子
を引出したことを特徴とする感湿素子。1. A plate-shaped sintered body formed by molding and sintering ceramic powder, a moisture-sensitive electrode formed on both the front and back surfaces of the sintered body, and the sintered body formed around the humidity-sensitive electrode from the outer periphery of the humidity-sensitive electrode. 1. A moisture sensing element comprising: a guard ring electrode formed with a gap larger than the thickness dimension of the moisture sensing element, and lead terminals are drawn out from the guard ring electrode and the humidity sensing electrode, respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56050762A JPS57165749A (en) | 1981-04-03 | 1981-04-03 | Humidity-sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56050762A JPS57165749A (en) | 1981-04-03 | 1981-04-03 | Humidity-sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57165749A JPS57165749A (en) | 1982-10-12 |
| JPS6145180B2 true JPS6145180B2 (en) | 1986-10-07 |
Family
ID=12867836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56050762A Granted JPS57165749A (en) | 1981-04-03 | 1981-04-03 | Humidity-sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57165749A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6363469U (en) * | 1986-10-15 | 1988-04-26 |
-
1981
- 1981-04-03 JP JP56050762A patent/JPS57165749A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6363469U (en) * | 1986-10-15 | 1988-04-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57165749A (en) | 1982-10-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4464647A (en) | Humidity sensor made of metal oxide | |
| JPS6145180B2 (en) | ||
| JPS639722B2 (en) | ||
| EP0123385B1 (en) | Humidity-sensitive resistive element | |
| JPS6145181B2 (en) | ||
| JPS6317205B2 (en) | ||
| JPS6317203B2 (en) | ||
| JPS6317207B2 (en) | ||
| JPS6317209B2 (en) | ||
| JPS6317201B2 (en) | ||
| JPS6317208B2 (en) | ||
| JPS6317206B2 (en) | ||
| JPS6359521B2 (en) | ||
| JPS6317204B2 (en) | ||
| JPS6351363B2 (en) | ||
| JPH0572157A (en) | Humidity sensing element | |
| JPH0122965B2 (en) | ||
| JPS5811721B2 (en) | Kanshitsusoshi | |
| JPH0116381B2 (en) | ||
| JPS5813003B2 (en) | Kanshitsusoshi | |
| JPS5813002B2 (en) | Kanshitsusoshi | |
| JPS5898901A (en) | Moisture sensitive element | |
| JPS5811722B2 (en) | Kanshitsusoshi | |
| JPS6024565B2 (en) | moisture sensing element | |
| JPS58166248A (en) | Temperature-and humidity-sensitive element |