JPS6145181B2 - - Google Patents
Info
- Publication number
- JPS6145181B2 JPS6145181B2 JP56050763A JP5076381A JPS6145181B2 JP S6145181 B2 JPS6145181 B2 JP S6145181B2 JP 56050763 A JP56050763 A JP 56050763A JP 5076381 A JP5076381 A JP 5076381A JP S6145181 B2 JPS6145181 B2 JP S6145181B2
- Authority
- JP
- Japan
- Prior art keywords
- dew condensation
- sintered body
- guard ring
- humidity
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009833 condensation Methods 0.000 claims description 32
- 230000005494 condensation Effects 0.000 claims description 32
- 238000005245 sintering Methods 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 230000020169 heat generation Effects 0.000 description 17
- 238000004140 cleaning Methods 0.000 description 16
- 238000001514 detection method Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910018068 Li 2 O Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Description
【発明の詳細な説明】
本発明は結露検出機能およびクリーニング用発
熱機能を付与した感湿素子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a moisture sensitive element provided with a dew condensation detection function and a heating function for cleaning.
従来感湿素子は第１図に示すようにセラミツク
粉末を例えば円板状に成型焼結した焼結体１の表
裏両面に金ペーストまたは酸化ルテニウムペース
トなどの導電性電極剤を塗布焼付けし電極２を形
成し該電極２にリード端子３ａ，３ｂを取着して
なるものである。しかしてこのような感湿素子は
焼結体のバルク方向で相対湿度に対応する抵抗値
の変化を測定し機能するようにしている。すなわ
ち前記電極２間の抵抗値を測定しているが経時変
化によつて電極周辺部の感湿による抵抗成分が影
響する。特に端部面における表面リークが抵抗成
分に加算されるため感度による正確な抵抗値が得
られなく測定誤差の原因になる欠点をもつてい
た。そのため初期状態の感湿性までもどすために
クリーニングを行つている。従来クリーニング手
段としてはクリーニングヒータを別に設けなけれ
ばならず作業工程を多く要するばかりか構造が複
雑になる欠点をもつていた。またこのような構成
では単に感湿性のみで結露を同時に測定すること
はできなかつた。 As shown in FIG. 1, a conventional moisture-sensitive element has a sintered body 1 made by molding and sintering ceramic powder into a disk shape, and then coating and baking a conductive electrode material such as gold paste or ruthenium oxide paste on both sides of the sintered body 1, which forms an electrode 2. , and lead terminals 3a and 3b are attached to the electrode 2. However, such a humidity sensing element functions by measuring a change in resistance value corresponding to relative humidity in the bulk direction of the sintered body. That is, although the resistance value between the electrodes 2 is measured, the resistance component due to moisture sensitivity around the electrodes is affected by changes over time. In particular, since surface leakage at the end surface is added to the resistance component, an accurate resistance value cannot be obtained due to sensitivity, resulting in measurement errors. Therefore, cleaning is performed to restore the moisture sensitivity to its initial state. Conventional cleaning means had the disadvantage that a cleaning heater had to be provided separately, which required many work steps and complicated the structure. Furthermore, with such a configuration, it was not possible to simultaneously measure dew condensation based solely on moisture sensitivity.
本発明は上記の点に鑑みてなされたもので焼結
体の両面に形成した感湿用電極部の周囲に焼結体
を構成する組成より低抵抗でしかも発熱に必要な
数Ωの抵抗値をもつ材質からなる結露検出兼発熱
用ガードリング電極を形成し、この場合該ガード
リング電極と前記感湿用電極間の間隙を前記焼結
体厚さ寸法より大きくし両面のガードリング電極
を結線し、該ガードリング電極の結線部および感
湿電極からそれぞれリード端子を引出すようにす
ることによつて常に正確な感湿特性を測定し、か
つすばやく結露の測定を可能にすると同時にクリ
ーニング機能をもつ感湿素子を提供することを目
的とするものである。 The present invention has been made in view of the above points, and has a lower resistance than the composition of the sintered body around the humidity sensing electrode portion formed on both sides of the sintered body, and a resistance value of several Ω necessary for heat generation. A guard ring electrode for detecting dew condensation and for generating heat is formed from a material having a material having a temperature of 1.5 mm. By drawing out the lead terminals from the connection part of the guard ring electrode and the moisture-sensitive electrode, it is possible to constantly measure accurate moisture-sensing characteristics and quickly measure condensation, and at the same time, it has a cleaning function. The object of the present invention is to provide a moisture sensitive element.
以下本発明の一実施例につき図面を参照して説
明する。すなわち第２図および第３図に示すよう
に例えばZnO−V2O5−Li2Oを主成分とした金属
酸化物を適量秤取しこれをボールミルなどでよく
混練し600〜900℃の温度で焙焼しさらに５％ポリ
ビニルアルコールの水溶液をバインダとして造粒
し円板状に成型する。ついでこの成型体を1000〜
1400℃の温度で１〜５時間焼結しその後研磨して
焼結体１１を形成する。つぎに該焼結体１１の表
裏両面にPt，Au，Mgまたはそれらの混合物など
の金ペーストまたはRuO2，I2O3，SiO2，PdO2ま
たはそれらの混合物などの酸化物ペーストを円状
に塗布し、さらに円状塗布面の周囲に前記焼結体
１１よりも低抵抗でかつ発熱に必要な数Ω程度の
抵抗値をもつ例えばRuO2，I2O3，SiO2，PdO2ま
たはそれらの混合物などの抵抗体ペーストを環状
に塗布ししかるのち焼付し感湿用電極１２ａ，１
２ｂと結露検出兼発熱用ガードリング電極１３
ａ，１３ｂを形成する。なおこの場合、結露発生
の場合に焼結体１１表面結露をすばやく検出する
ため感湿用電極１２ａ，１２ｂ外周辺と結露検出
兼発熱用ガードリング電極１３ａ，１３ｂ内周辺
それぞれの間隙寸法ｌを前記焼結体１１の厚さ寸
法ｔより大きくなるようにし、前記感湿用電極１
２ａと前記結露検出兼発熱用ガードリング電極１
３ａ間および前記感湿用電極１２ｂと前記結露検
出兼発熱用ガードリング電極１３ｂ間で結露を測
定するものとする。しかして前記結露検出兼発熱
用ガードリング電極１３ａ，１３ｂを接続線１４
ａ，１４ｂで対角線上に２箇所で結線し、該接続
線１４ａ，１４ｂ部および感湿用電極１２ａ，１
２ｂからそれぞれリード端子１５ａ，１５ｂ，１
５ｃ，１５ｄを引出してなるものである。なおこ
の場合結露検出兼発熱用ガードリング電極１３
ａ，１３ｂ同志を接続線１４ａ，１４ｂで対角線
上に２箇所結線し該接続線１４ａ，１４ｂ部分か
らリード端子１５ｃ，１５ｄを引出すのは結露検
出兼発熱用ガードリング電極１３ａ，１３ｂのも
つ抵抗値を最大限生かしクリーニング時の有効な
発熱効果を得るためであり、仮りに結露検出兼発
熱用ガードリング電極同志を１箇所結露としリー
ド端子を適宜な箇所から引出した場合あるいは適
当な箇所を２箇所結線しても抵抗値が一定せずク
リーニング電圧がバラツキ有効なクリーニング効
果を得ることができない理由にもとづくものであ
る。第４図にこの場合の等価回路を示す。 An embodiment of the present invention will be described below with reference to the drawings. That is, as shown in Figs. 2 and 3, for example, an appropriate amount of a metal oxide containing ZnO-V 2 O 5 - Li 2 O as a main component is weighed out, thoroughly kneaded in a ball mill, etc., and heated at a temperature of 600 to 900°C. The mixture is roasted and then granulated using a 5% polyvinyl alcohol aqueous solution as a binder, and molded into a disk shape. Next, this molded body will be sold for 1000 ~
The sintered body 11 is formed by sintering at a temperature of 1400° C. for 1 to 5 hours and then polishing. Next, a gold paste such as Pt, Au, Mg or a mixture thereof or an oxide paste such as RuO 2 , I 2 O 3 , SiO 2 , PdO 2 or a mixture thereof is applied in a circular shape to both the front and back surfaces of the sintered body 11. The sintered body 11 is coated with a material such as RuO 2 , I 2 O 3 , SiO 2 , PdO 2 or the like, which has a resistance lower than that of the sintered body 11 and has a resistance value of several Ω necessary for heat generation. A resistor paste such as a mixture thereof is applied in an annular shape and then baked to form the moisture sensing electrodes 12a, 1.
2b and guard ring electrode 13 for dew condensation detection and heat generation
a, 13b are formed. In this case, in order to quickly detect dew condensation on the surface of the sintered body 11 when condensation occurs, the gap size l between the outer periphery of the humidity sensing electrodes 12a and 12b and the inner periphery of the guard ring electrodes 13a and 13b for dew condensation detection and heat generation is set as described above. The humidity sensing electrode 1 is made to be larger than the thickness t of the sintered body 11.
2a and the guard ring electrode 1 for detecting condensation and generating heat.
3a and between the humidity sensing electrode 12b and the dew condensation detection and heat generation guard ring electrode 13b. Therefore, the guard ring electrodes 13a and 13b for detecting dew condensation and heat generation are connected to the connecting wire 14.
A, 14b are connected diagonally at two places, and the connecting wires 14a, 14b and the humidity sensing electrodes 12a, 1
Lead terminals 15a, 15b, 1 from 2b, respectively.
5c and 15d are drawn out. In this case, the guard ring electrode 13 for dew condensation detection and heat generation
The reason why comrades a and 13b are connected diagonally at two locations with connecting wires 14a and 14b and lead terminals 15c and 15d are drawn out from the connecting wires 14a and 14b is due to the resistance value of the guard ring electrodes 13a and 13b for detecting condensation and generating heat. This is to maximize the heat generation effect during cleaning, and if the guard ring electrodes for dew condensation detection and heat generation are condensed in one place, and the lead terminals are pulled out from an appropriate place, or if the lead terminals are pulled out from two appropriate places. This is based on the reason that even when wires are connected, the resistance value is not constant and the cleaning voltage varies, making it impossible to obtain an effective cleaning effect. FIG. 4 shows an equivalent circuit in this case.
以上のように構成してなる感湿素子は感湿用電
極１２ａ，１２ｂ周囲に形成した結露検出兼発熱
用ガードリング電極１３ａ，１３ｂと感湿用電極
１２ａ，１２ｂのそれぞれの間隙寸法ｌが焼結体
１１の厚さ寸法ｔより大きくなるように構成して
いるためリード端子１５ａ，１５ｂ間で測定する
感湿抵抗値RHは感湿用電極１２ａと結露検出兼
発熱用ガードリング電極１３ａ間および感湿用電
極１２ｂと結露検出兼発熱用ガードリング電極１
３ｂ間の表面リークの影響はなく、リード端子１
５ａ，１５ｃ間あるいはリード端子１５ｂ，１５
ｄ間で測定する結露抵抗値RKより常に小さくな
り、感湿用電極１２ａ，１２ｂ形成間の焼結体１
１のバルク方向で相対湿度に対応する抵抗値の変
化を正確に測定できる。と同時に結露発生の場合
リード端子１５ａ，１５ｃ間およびリード端子１
５ｂ，１５ｄ間ですばやく結露抵抗値RKを測定
できる効果を有する。とともに結露検出兼発熱用
ガードリング電極１３ａ，１３ｂが焼結体１１よ
り低抵抗で、かつ発熱に必要な数Ωの抵抗値をも
つ材質からなり、しかもその抵抗値を最大限生か
した結線をしているため、リード端子１５ｃ，１
５ｄ間に50ｍＷ以下の電流を流すことによつて結
露検出兼発熱用ガードリング電極１３ａ，１３ｂ
を発熱させ初期の感湿特性までもどせるクリーニ
ング効果を合せ持つ利点を有している。 The humidity sensing element configured as described above has a gap size l between the guard ring electrodes 13a, 13b for detecting dew condensation and heat generation formed around the humidity sensing electrodes 12a, 12b and the humidity sensing electrodes 12a, 12b. Since the structure is configured to be larger than the thickness dimension t of the body 11, the humidity-sensitive resistance value RH measured between the lead terminals 15a and 15b is the same as that between the humidity-sensing electrode 12a and the guard ring electrode 13a for detecting and generating heat. Moisture sensing electrode 12b and guard ring electrode 1 for dew condensation detection and heat generation
There is no effect of surface leakage between lead terminals 1 and 3b.
Between 5a and 15c or lead terminals 15b and 15
It is always smaller than the dew condensation resistance value RK measured between
Changes in resistance corresponding to relative humidity can be accurately measured in the bulk direction of No. 1. If condensation occurs at the same time, between lead terminals 15a and 15c and lead terminal 1.
This has the effect of quickly measuring the condensation resistance value RK between 5b and 15d. At the same time, the guard ring electrodes 13a and 13b for dew condensation detection and heat generation are made of a material that has a resistance lower than that of the sintered body 11 and has a resistance value of several Ω necessary for heat generation, and is connected to make maximum use of the resistance value. Therefore, the lead terminals 15c, 1
Guard ring electrodes 13a and 13b for detecting dew condensation and generating heat by passing a current of 50mW or less between 5d.
It also has the advantage of having a cleaning effect that generates heat and restores the initial moisture sensitivity characteristics.
つぎに本発明による感湿素子の25℃−1KHzに
おける感湿抵抗特性、結露抵抗特性およびクリー
ニング特性を第５図に示す。すなわち第５図は25
℃−70％RHの雰囲気中で２分間経過後前記リー
ド端子１５ｃ，１５ｄに50mWの電流を１分間印
加し加熱クリーニングを行い初期から７分経過後
25℃−100％RHの加湿器による結露試験槽中に初
期から10分まで入れた場合の時期に対応する抵抗
値の変化を示したものであり、曲線Ａは前記リー
ド端子１５ａ，１５ｂ間の抵抗値の変化であり、
曲線Ｂはリード端子１５ａ，１５ｃ間および１５
ｂ，１５ｄ間の抵抗値の変化である。第５図から
明らかなように曲線Ａはクリーニング開始から２
分間でクリーニング効果を発揮し25℃−100％RH
の条件下でもそれに応じた抵抗値の減少を示しす
ぐれた感湿抵抗特性を示した。また曲線Ｂは曲線
Ａと同じくクリーニング開始から２分間でクリー
ニング効果を発揮し25℃−100％RHの条件下では
抵抗値が約３桁変化し結露抵抗特性を示した。し
たがつてリード端子１５ａ，１５ｂ間で感湿抵抗
特性としリード端子１５ａ，１５ｃ間および１５
ｂ，１５ｄ間で結露抵抗特性としさらにリード端
子１５ａ，１５ｄ間でクリーニング特性としての
各機能を発揮できることがわかつた。なお本実験
に用いた感湿素子はZnO−V2O5−Li2Oを主成分
として感湿用電極は金、および結露検出兼発熱用
電極は酸化ルテニウムを用い焼結体の厚み寸法ｔ
を0.2mm感湿用電極と結露検出兼発熱用ガードリ
ング電極間の間隙寸法ｌを0.25mmとしたものを用
いた。 Next, FIG. 5 shows the humidity sensitive resistance characteristics, dew condensation resistance characteristics, and cleaning characteristics of the humidity sensing element according to the present invention at 25 DEG C. and 1 KHz. In other words, Figure 5 is 25
After 2 minutes in an atmosphere of ℃-70% RH, apply a current of 50 mW to the lead terminals 15c and 15d for 1 minute to perform heating cleaning, and after 7 minutes have passed from the initial stage.
It shows the change in resistance value corresponding to the time when it is placed in a dew condensation test tank using a humidifier at 25°C and 100% RH from the initial stage to 10 minutes. It is a change in resistance value,
Curve B is between lead terminals 15a and 15c and 15
This is the change in resistance value between b and 15d. As is clear from Figure 5, curve A is 2 times from the start of cleaning.
Cleans effectively in minutes at 25℃ - 100%RH
Even under these conditions, the resistance value decreased accordingly and showed excellent moisture-sensitive resistance characteristics. Similarly to curve A, curve B exhibited a cleaning effect within 2 minutes from the start of cleaning, and under the conditions of 25° C. and 100% RH, the resistance value changed by about 3 orders of magnitude, showing dew condensation resistance characteristics. Therefore, the moisture sensitive resistance characteristic is assumed to be between the lead terminals 15a and 15b, and between the lead terminals 15a and 15c.
It has been found that dew condensation resistance characteristics can be achieved between lead terminals 15a and 15d, and cleaning characteristics can also be achieved between lead terminals 15a and 15d. The humidity sensing element used in this experiment is mainly composed of ZnO-V 2 O 5 -Li 2 O, the humidity-sensing electrode is gold, and the dew condensation detection/heating electrode is ruthenium oxide, and the thickness of the sintered body is t.
The gap size l between the 0.2 mm humidity sensing electrode and the guard ring electrode for dew condensation detection and heat generation was 0.25 mm.
以上述べたように本発明によれば焼結体の両面
に形成した感湿用電極周囲に焼結体を構成する組
成より低抵抗でしかも発熱に必要な数Ωの抵抗値
をもつ材質からなる結露検出兼発熱用ガードリン
グ電極を形成し、この場合該ガードリング電極と
前記感湿用電極間の間隙を前記焼結体原さ寸法よ
り大きくしガードリング電極同志を対角線上に２
箇所で結線し該結線部および感湿用電極からそれ
ぞれリード端子を引出すようにすることによつて
正確な相対湿度および結露に測定ならびにクリー
ニング機能を兼ねそなえた感湿素子を得ることが
できる。 As described above, according to the present invention, the area around the humidity sensing electrodes formed on both sides of the sintered body is made of a material that has a resistance lower than the composition of the sintered body and has a resistance value of several Ω necessary for heat generation. A guard ring electrode for dew condensation detection and heat generation is formed, and in this case, the gap between the guard ring electrode and the humidity sensing electrode is made larger than the original size of the sintered body, and the guard ring electrodes are arranged diagonally two times.
By connecting the wires at certain points and pulling out the lead terminals from the connecting portions and the humidity-sensing electrodes, it is possible to obtain a humidity-sensing element that has both accurate relative humidity and dew condensation measurement and cleaning functions.
第１図は従来例による感湿素子を示す正面図、
第２図および第３図は本発明による感湿素子を示
すもので第２図は正面図、第３図は側面図、第４
図は本発明による感湿素子の等価回路図、第５図
は時間−抵抗値を示す特性曲線図である。
１１……焼結体、１２ａ，１２ｂ……感湿用電
極、１３ａ，１３ｂ……結露兼発熱用ガードリン
グ電極、１４ａ，１４ｂ……接続線、１５ａ，１
５ｂ，１５ｃ，１５ｄ……リード端子。
FIG. 1 is a front view showing a conventional moisture-sensitive element;
Figures 2 and 3 show the moisture sensing element according to the present invention, with Figure 2 being a front view, Figure 3 being a side view, and Figure 4 being a side view.
The figure is an equivalent circuit diagram of the humidity sensing element according to the present invention, and FIG. 5 is a characteristic curve diagram showing time-resistance values. 11... Sintered body, 12a, 12b... Moisture sensing electrode, 13a, 13b... Guard ring electrode for dew condensation and heat generation, 14a, 14b... Connection wire, 15a, 1
5b, 15c, 15d...Lead terminals.
Claims (1)
体と、該焼結体の表裏両面に形成した感湿電極
と、該感湿電極の周囲に前記焼結体の厚さ寸法よ
り大きな間隙を設けて形成した結露検出兼発熱用
ガードリング電極と、該ガードリング電極それぞ
れを対角線上に２箇所で結線した接続線とを具備
し、該接続線部および前記感湿電極部からそれぞ
れリード端子を引出し相対湿度および結露の測定
を行うようにしたことを特徴とする感湿素子。1. A plate-shaped sintered body formed by molding and sintering ceramic powder, a moisture-sensitive electrode formed on both the front and back surfaces of the sintered body, and a gap larger than the thickness of the sintered body around the humidity-sensitive electrode. A guard ring electrode for detecting dew condensation and generating heat is provided, and a connection wire is formed by connecting each of the guard ring electrodes diagonally at two locations, and a lead terminal is connected from the connection wire portion and the moisture sensitive electrode portion, respectively. A humidity sensing element characterized in that it measures relative humidity and dew condensation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56050763A JPS57165750A (en) | 1981-04-03 | 1981-04-03 | Humidity-sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56050763A JPS57165750A (en) | 1981-04-03 | 1981-04-03 | Humidity-sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57165750A JPS57165750A (en) | 1982-10-12 |
| JPS6145181B2 true JPS6145181B2 (en) | 1986-10-07 |
Family
ID=12867865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56050763A Granted JPS57165750A (en) | 1981-04-03 | 1981-04-03 | Humidity-sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57165750A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57165751A (en) * | 1981-04-03 | 1982-10-12 | Marcon Electronics Co Ltd | Humidity-sensitive element |
| JPS60338A (en) * | 1983-06-16 | 1985-01-05 | Junkosha Co Ltd | Liquid leakage detector |
-
1981
- 1981-04-03 JP JP56050763A patent/JPS57165750A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57165750A (en) | 1982-10-12 |
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