JPH0116035B2 - - Google Patents
Info
- Publication number
- JPH0116035B2 JPH0116035B2 JP9165585A JP9165585A JPH0116035B2 JP H0116035 B2 JPH0116035 B2 JP H0116035B2 JP 9165585 A JP9165585 A JP 9165585A JP 9165585 A JP9165585 A JP 9165585A JP H0116035 B2 JPH0116035 B2 JP H0116035B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- gaas
- algaas
- grooves
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 54
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 40
- 238000005253 cladding Methods 0.000 claims description 33
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 9
- 230000010355 oscillation Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 239000007791 liquid phase Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Landscapes
- Semiconductor Lasers (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9165585A JPS61251092A (ja) | 1985-04-27 | 1985-04-27 | 半導体レ−ザの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9165585A JPS61251092A (ja) | 1985-04-27 | 1985-04-27 | 半導体レ−ザの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61251092A JPS61251092A (ja) | 1986-11-08 |
| JPH0116035B2 true JPH0116035B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-03-22 |
Family
ID=14032516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9165585A Granted JPS61251092A (ja) | 1985-04-27 | 1985-04-27 | 半導体レ−ザの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61251092A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1985
- 1985-04-27 JP JP9165585A patent/JPS61251092A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61251092A (ja) | 1986-11-08 |