JPH0115909B2 - - Google Patents

Info

Publication number
JPH0115909B2
JPH0115909B2 JP57094958A JP9495882A JPH0115909B2 JP H0115909 B2 JPH0115909 B2 JP H0115909B2 JP 57094958 A JP57094958 A JP 57094958A JP 9495882 A JP9495882 A JP 9495882A JP H0115909 B2 JPH0115909 B2 JP H0115909B2
Authority
JP
Japan
Prior art keywords
pattern
inspection
maximum
symmetry
coordinate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57094958A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58213380A (ja
Inventor
Michiaki Myagawa
Tadayuki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP57094958A priority Critical patent/JPS58213380A/ja
Publication of JPS58213380A publication Critical patent/JPS58213380A/ja
Publication of JPH0115909B2 publication Critical patent/JPH0115909B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection

Landscapes

  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
JP57094958A 1982-06-04 1982-06-04 パタ−ン検査装置 Granted JPS58213380A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57094958A JPS58213380A (ja) 1982-06-04 1982-06-04 パタ−ン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57094958A JPS58213380A (ja) 1982-06-04 1982-06-04 パタ−ン検査装置

Publications (2)

Publication Number Publication Date
JPS58213380A JPS58213380A (ja) 1983-12-12
JPH0115909B2 true JPH0115909B2 (OSRAM) 1989-03-22

Family

ID=14124434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57094958A Granted JPS58213380A (ja) 1982-06-04 1982-06-04 パタ−ン検査装置

Country Status (1)

Country Link
JP (1) JPS58213380A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5236330B2 (ja) * 2008-03-27 2013-07-17 オーム電機株式会社 貫通孔の検査方法および貫通孔の検査装置

Also Published As

Publication number Publication date
JPS58213380A (ja) 1983-12-12

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