JPH01158904U - - Google Patents
Info
- Publication number
- JPH01158904U JPH01158904U JP5427188U JP5427188U JPH01158904U JP H01158904 U JPH01158904 U JP H01158904U JP 5427188 U JP5427188 U JP 5427188U JP 5427188 U JP5427188 U JP 5427188U JP H01158904 U JPH01158904 U JP H01158904U
- Authority
- JP
- Japan
- Prior art keywords
- light
- objective lens
- sample surface
- light source
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 210000001747 pupil Anatomy 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5427188U JPH01158904U (he) | 1988-04-22 | 1988-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5427188U JPH01158904U (he) | 1988-04-22 | 1988-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01158904U true JPH01158904U (he) | 1989-11-02 |
Family
ID=31280207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5427188U Pending JPH01158904U (he) | 1988-04-22 | 1988-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01158904U (he) |
-
1988
- 1988-04-22 JP JP5427188U patent/JPH01158904U/ja active Pending
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