JPH01155651U - - Google Patents

Info

Publication number
JPH01155651U
JPH01155651U JP5288388U JP5288388U JPH01155651U JP H01155651 U JPH01155651 U JP H01155651U JP 5288388 U JP5288388 U JP 5288388U JP 5288388 U JP5288388 U JP 5288388U JP H01155651 U JPH01155651 U JP H01155651U
Authority
JP
Japan
Prior art keywords
implantation
injection
dose
platen
setting value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5288388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5288388U priority Critical patent/JPH01155651U/ja
Publication of JPH01155651U publication Critical patent/JPH01155651U/ja
Pending legal-status Critical Current

Links

JP5288388U 1988-04-19 1988-04-19 Pending JPH01155651U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5288388U JPH01155651U (enrdf_load_stackoverflow) 1988-04-19 1988-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5288388U JPH01155651U (enrdf_load_stackoverflow) 1988-04-19 1988-04-19

Publications (1)

Publication Number Publication Date
JPH01155651U true JPH01155651U (enrdf_load_stackoverflow) 1989-10-25

Family

ID=31278878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5288388U Pending JPH01155651U (enrdf_load_stackoverflow) 1988-04-19 1988-04-19

Country Status (1)

Country Link
JP (1) JPH01155651U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292845A (ja) * 1985-06-20 1986-12-23 Sumitomo Electric Ind Ltd イオン注入方法および装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292845A (ja) * 1985-06-20 1986-12-23 Sumitomo Electric Ind Ltd イオン注入方法および装置

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