JPH0252257U - - Google Patents
Info
- Publication number
- JPH0252257U JPH0252257U JP13157688U JP13157688U JPH0252257U JP H0252257 U JPH0252257 U JP H0252257U JP 13157688 U JP13157688 U JP 13157688U JP 13157688 U JP13157688 U JP 13157688U JP H0252257 U JPH0252257 U JP H0252257U
- Authority
- JP
- Japan
- Prior art keywords
- analysis
- magnetic flux
- flux density
- analysis electromagnet
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004458 analytical method Methods 0.000 claims description 18
- 238000000605 extraction Methods 0.000 claims description 8
- 238000005468 ion implantation Methods 0.000 claims description 6
- 238000004949 mass spectrometry Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims 12
- 230000004907 flux Effects 0.000 claims 9
- 239000000284 extract Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000001819 mass spectrum Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13157688U JPH0648738Y2 (ja) | 1988-10-06 | 1988-10-06 | イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13157688U JPH0648738Y2 (ja) | 1988-10-06 | 1988-10-06 | イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0252257U true JPH0252257U (enrdf_load_stackoverflow) | 1990-04-16 |
| JPH0648738Y2 JPH0648738Y2 (ja) | 1994-12-12 |
Family
ID=31387777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13157688U Expired - Lifetime JPH0648738Y2 (ja) | 1988-10-06 | 1988-10-06 | イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648738Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-10-06 JP JP13157688U patent/JPH0648738Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648738Y2 (ja) | 1994-12-12 |
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