JPH0648738Y2 - イオン注入装置 - Google Patents
イオン注入装置Info
- Publication number
- JPH0648738Y2 JPH0648738Y2 JP13157688U JP13157688U JPH0648738Y2 JP H0648738 Y2 JPH0648738 Y2 JP H0648738Y2 JP 13157688 U JP13157688 U JP 13157688U JP 13157688 U JP13157688 U JP 13157688U JP H0648738 Y2 JPH0648738 Y2 JP H0648738Y2
- Authority
- JP
- Japan
- Prior art keywords
- flux density
- magnetic flux
- electromagnet
- beam current
- analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 75
- 230000004907 flux Effects 0.000 claims description 64
- 238000004458 analytical method Methods 0.000 claims description 37
- 238000004949 mass spectrometry Methods 0.000 claims description 27
- 238000000605 extraction Methods 0.000 claims description 17
- 238000005468 ion implantation Methods 0.000 claims description 17
- 238000003860 storage Methods 0.000 claims description 8
- 230000005284 excitation Effects 0.000 claims 1
- 238000001228 spectrum Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000001819 mass spectrum Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13157688U JPH0648738Y2 (ja) | 1988-10-06 | 1988-10-06 | イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13157688U JPH0648738Y2 (ja) | 1988-10-06 | 1988-10-06 | イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0252257U JPH0252257U (enrdf_load_stackoverflow) | 1990-04-16 |
| JPH0648738Y2 true JPH0648738Y2 (ja) | 1994-12-12 |
Family
ID=31387777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13157688U Expired - Lifetime JPH0648738Y2 (ja) | 1988-10-06 | 1988-10-06 | イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648738Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-10-06 JP JP13157688U patent/JPH0648738Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0252257U (enrdf_load_stackoverflow) | 1990-04-16 |
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