JPH01152232U - - Google Patents
Info
- Publication number
- JPH01152232U JPH01152232U JP4951888U JP4951888U JPH01152232U JP H01152232 U JPH01152232 U JP H01152232U JP 4951888 U JP4951888 U JP 4951888U JP 4951888 U JP4951888 U JP 4951888U JP H01152232 U JPH01152232 U JP H01152232U
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- measured
- communication path
- crystal substrate
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 17
- 239000013078 crystal Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000002485 combustion reaction Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4951888U JPH01152232U (enrdf_load_stackoverflow) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4951888U JPH01152232U (enrdf_load_stackoverflow) | 1988-04-13 | 1988-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01152232U true JPH01152232U (enrdf_load_stackoverflow) | 1989-10-20 |
Family
ID=31275611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4951888U Pending JPH01152232U (enrdf_load_stackoverflow) | 1988-04-13 | 1988-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01152232U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010175294A (ja) * | 2009-01-27 | 2010-08-12 | Ulvac Japan Ltd | 圧力センサ |
-
1988
- 1988-04-13 JP JP4951888U patent/JPH01152232U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010175294A (ja) * | 2009-01-27 | 2010-08-12 | Ulvac Japan Ltd | 圧力センサ |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5821688B2 (ja) | アツリヨクゲ−ジ | |
| CN1325879C (zh) | 温度、风速、风向和气压集成传感器 | |
| JPH01152232U (enrdf_load_stackoverflow) | ||
| JPH08233678A (ja) | 燃焼室圧トランスデューサ及びその製造方法 | |
| JPS61243333A (ja) | 温度検出器 | |
| CN201221989Y (zh) | 一种模拟、数字双模汽车歧管压力、温度一体化传感器 | |
| JPH073311Y2 (ja) | 半導体差圧測定装置 | |
| JPS62174247U (enrdf_load_stackoverflow) | ||
| JPS585951Y2 (ja) | ハンドウタイアツリヨクケンチソウチ | |
| JPS5655831A (en) | Mounting method for pressure-sensor assembly | |
| JPH0260837U (enrdf_load_stackoverflow) | ||
| JPS6312178A (ja) | 圧力検出器 | |
| JPH0220129U (enrdf_load_stackoverflow) | ||
| JPH02245631A (ja) | 半導体圧力センサ | |
| JPH0237342U (enrdf_load_stackoverflow) | ||
| JPH01179237U (enrdf_load_stackoverflow) | ||
| JPS635232A (ja) | 圧力検出器 | |
| JPS6398665U (enrdf_load_stackoverflow) | ||
| JPS63137824U (enrdf_load_stackoverflow) | ||
| JPS6427636U (enrdf_load_stackoverflow) | ||
| JPS58154439U (ja) | 内燃機関筒内圧力検出器 | |
| JPS6398666U (enrdf_load_stackoverflow) | ||
| JPS6450454U (enrdf_load_stackoverflow) | ||
| JPS6219760U (enrdf_load_stackoverflow) | ||
| JPS61100137U (enrdf_load_stackoverflow) |