JPH0115082B2 - - Google Patents
Info
- Publication number
- JPH0115082B2 JPH0115082B2 JP7897781A JP7897781A JPH0115082B2 JP H0115082 B2 JPH0115082 B2 JP H0115082B2 JP 7897781 A JP7897781 A JP 7897781A JP 7897781 A JP7897781 A JP 7897781A JP H0115082 B2 JPH0115082 B2 JP H0115082B2
- Authority
- JP
- Japan
- Prior art keywords
- cos
- light
- diffraction gratings
- aligned
- interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001427 coherent effect Effects 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7897781A JPS57193818A (en) | 1981-05-25 | 1981-05-25 | Positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7897781A JPS57193818A (en) | 1981-05-25 | 1981-05-25 | Positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57193818A JPS57193818A (en) | 1982-11-29 |
| JPH0115082B2 true JPH0115082B2 (en, 2012) | 1989-03-15 |
Family
ID=13676948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7897781A Granted JPS57193818A (en) | 1981-05-25 | 1981-05-25 | Positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57193818A (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL194811C (nl) * | 1986-01-16 | 2003-03-04 | Mitsubishi Electric Corp | Servoschakeling. |
-
1981
- 1981-05-25 JP JP7897781A patent/JPS57193818A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57193818A (en) | 1982-11-29 |
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