JPH0114915Y2 - - Google Patents

Info

Publication number
JPH0114915Y2
JPH0114915Y2 JP8707183U JP8707183U JPH0114915Y2 JP H0114915 Y2 JPH0114915 Y2 JP H0114915Y2 JP 8707183 U JP8707183 U JP 8707183U JP 8707183 U JP8707183 U JP 8707183U JP H0114915 Y2 JPH0114915 Y2 JP H0114915Y2
Authority
JP
Japan
Prior art keywords
inspection device
illumination system
article
capsule
optical inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8707183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59194048U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8707183U priority Critical patent/JPS59194048U/ja
Publication of JPS59194048U publication Critical patent/JPS59194048U/ja
Application granted granted Critical
Publication of JPH0114915Y2 publication Critical patent/JPH0114915Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8707183U 1983-06-09 1983-06-09 同軸反射形光学検査器 Granted JPS59194048U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8707183U JPS59194048U (ja) 1983-06-09 1983-06-09 同軸反射形光学検査器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8707183U JPS59194048U (ja) 1983-06-09 1983-06-09 同軸反射形光学検査器

Publications (2)

Publication Number Publication Date
JPS59194048U JPS59194048U (ja) 1984-12-24
JPH0114915Y2 true JPH0114915Y2 (enrdf_load_stackoverflow) 1989-05-02

Family

ID=30216994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8707183U Granted JPS59194048U (ja) 1983-06-09 1983-06-09 同軸反射形光学検査器

Country Status (1)

Country Link
JP (1) JPS59194048U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5556733B2 (ja) * 2011-04-15 2014-07-23 シーシーエス株式会社 光照射装置

Also Published As

Publication number Publication date
JPS59194048U (ja) 1984-12-24

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