JPH01148718A - 石英るつぼの製造方法 - Google Patents

石英るつぼの製造方法

Info

Publication number
JPH01148718A
JPH01148718A JP30462487A JP30462487A JPH01148718A JP H01148718 A JPH01148718 A JP H01148718A JP 30462487 A JP30462487 A JP 30462487A JP 30462487 A JP30462487 A JP 30462487A JP H01148718 A JPH01148718 A JP H01148718A
Authority
JP
Japan
Prior art keywords
silicon dioxide
quartz crucible
dioxide powder
quartz
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30462487A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422861B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hiroshi Uchikawa
啓 内川
Atsushi Iwasaki
淳 岩崎
Toshito Fukuoka
福岡　敏人
Mitsuo Matsumura
光男 松村
Hiroshi Matsui
宏 松井
Yasuhiko Sato
恭彦 佐藤
Masaaki Aoyama
青山　雅明
Hidekazu Shinomiya
篠宮　英一
Akira Fujinoki
朗 藤ノ木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd, Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP30462487A priority Critical patent/JPH01148718A/ja
Priority to US07/278,591 priority patent/US4935046A/en
Priority to DE3888797T priority patent/DE3888797T2/de
Priority to EP19880120166 priority patent/EP0319031B1/en
Publication of JPH01148718A publication Critical patent/JPH01148718A/ja
Priority to US07/376,136 priority patent/US4956208A/en
Publication of JPH0422861B2 publication Critical patent/JPH0422861B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP30462487A 1987-12-03 1987-12-03 石英るつぼの製造方法 Granted JPH01148718A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP30462487A JPH01148718A (ja) 1987-12-03 1987-12-03 石英るつぼの製造方法
US07/278,591 US4935046A (en) 1987-12-03 1988-12-01 Manufacture of a quartz glass vessel for the growth of single crystal semiconductor
DE3888797T DE3888797T2 (de) 1987-12-03 1988-12-02 Verfahren zur Herstellung eines Quarzglasgefässes für Halbleiter-Einkristallzüchtung.
EP19880120166 EP0319031B1 (en) 1987-12-03 1988-12-02 Manufacture of a quartz glass vessel for the growth of single crystal semiconductor
US07/376,136 US4956208A (en) 1987-12-03 1989-07-06 Manufacture of a quartz glass vessel for the growth of single crystal semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30462487A JPH01148718A (ja) 1987-12-03 1987-12-03 石英るつぼの製造方法

Publications (2)

Publication Number Publication Date
JPH01148718A true JPH01148718A (ja) 1989-06-12
JPH0422861B2 JPH0422861B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-20

Family

ID=17935266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30462487A Granted JPH01148718A (ja) 1987-12-03 1987-12-03 石英るつぼの製造方法

Country Status (1)

Country Link
JP (1) JPH01148718A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046198A (ja) * 1990-04-25 1992-01-10 Nkk Corp シリコン単結晶製造用のるつぼと、るつぼ内の仕切りの製造方法
JPH05105577A (ja) * 1990-06-25 1993-04-27 Shinetsu Quartz Prod Co Ltd シリコン単結晶引き上げ用石英ガラスルツボとその製造方法
JPH0826759A (ja) * 1994-07-19 1996-01-30 Shinetsu Quartz Prod Co Ltd 石英ガラスルツボ、その製造方法及び製造装置
WO1999061685A1 (fr) * 1998-05-25 1999-12-02 Shin-Etsu Quartz Products Co., Ltd. Creuset en verre de quartz destine a la croissance d'un monocristal de silicium et son procede de fabrication
WO2000006811A1 (fr) * 1998-07-31 2000-02-10 Shin-Etsu Quartz Products Co., Ltd. Creuset en verre de quartz servant a faire croitre un monocristal de silicium et procede de production de celui-ci
JP2001233629A (ja) * 1999-04-06 2001-08-28 Nanwa Kuorutsu:Kk 石英ガラスるつぼの製造方法
JP2008081373A (ja) * 2006-09-28 2008-04-10 Covalent Materials Corp シリカガラスルツボ及びシリカガラスルツボの製造方法
EP1094039A4 (en) * 1999-04-06 2009-01-28 Nanwa Quartz Inc METHOD FOR PRODUCING A QUARTZ GLASS LEVER
WO2009069773A1 (ja) * 2007-11-30 2009-06-04 Japan Super Quartz Corporation 石英ガラスルツボの製造方法および製造装置
US7587912B2 (en) 2003-02-28 2009-09-15 Heraeus Quarzglas Gmbh & Co. Kg Method for producing quartz glass crucible for use in pulling silicon single crystal and quartz glass crucible produced by said method
EP2113491A1 (en) 2008-04-30 2009-11-04 Japan Super Quartz Corporation Crucible lift device and method for taking-out crucible
EP2182099A1 (en) 2008-10-31 2010-05-05 Japan Super Quartz Corporation Silica glass crucible having multilayered structure
WO2011019012A1 (ja) * 2009-08-12 2011-02-17 ジャパンスーパークォーツ株式会社 シリカガラスルツボの製造装置及びシリカガラスルツボの製造方法
US7905112B2 (en) 2002-08-15 2011-03-15 Japan Super Quartz Corporation Reforming process of quartz glass crucible
CN102336527A (zh) * 2011-09-15 2012-02-01 江苏华尔光电材料股份有限公司 一种用于石英坩埚氢氧化钡涂层的装置及方法
WO2020145378A1 (ja) * 2019-01-11 2020-07-16 株式会社Sumco シリカガラスルツボの製造装置および製造方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2431338B1 (en) 2009-04-28 2021-08-25 Shin-Etsu Quartz Products Co., Ltd. Silica vessel
CN102395535B (zh) 2009-05-26 2014-07-02 信越石英株式会社 二氧化硅容器及其制造方法
JP4922355B2 (ja) 2009-07-15 2012-04-25 信越石英株式会社 シリカ容器及びその製造方法
JP4951040B2 (ja) 2009-08-05 2012-06-13 信越石英株式会社 シリカ容器及びその製造方法
JP4969632B2 (ja) 2009-10-14 2012-07-04 信越石英株式会社 シリカ粉及びシリカ容器並びにそれらの製造方法
JP5250097B2 (ja) 2011-12-12 2013-07-31 信越石英株式会社 単結晶シリコン引き上げ用シリカ容器及びその製造方法
KR101516602B1 (ko) 2012-03-23 2015-05-04 신에쯔 세끼에이 가부시키가이샤 단결정 실리콘 인상용 실리카 용기 및 그 제조방법
JP5595615B2 (ja) 2012-05-16 2014-09-24 信越石英株式会社 単結晶シリコン引き上げ用シリカ容器及びその製造方法
CN104395509A (zh) 2013-04-08 2015-03-04 信越石英株式会社 单晶硅提拉用二氧化硅容器及其制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850955A (ja) * 1981-09-22 1983-03-25 株式会社フオ−ブレイン レジン床義歯やクラウンの成形用レジンカプセル
US4416680A (en) * 1980-04-15 1983-11-22 Heraeus Quarzschmelze Gmbh Method of making quartz glass crucibles, and apparatus carrying out the method
JPS5934659A (ja) * 1982-08-20 1984-02-25 Toshiba Corp 固体撮像装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4416680A (en) * 1980-04-15 1983-11-22 Heraeus Quarzschmelze Gmbh Method of making quartz glass crucibles, and apparatus carrying out the method
JPS5850955A (ja) * 1981-09-22 1983-03-25 株式会社フオ−ブレイン レジン床義歯やクラウンの成形用レジンカプセル
JPS5934659A (ja) * 1982-08-20 1984-02-25 Toshiba Corp 固体撮像装置

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046198A (ja) * 1990-04-25 1992-01-10 Nkk Corp シリコン単結晶製造用のるつぼと、るつぼ内の仕切りの製造方法
JPH05105577A (ja) * 1990-06-25 1993-04-27 Shinetsu Quartz Prod Co Ltd シリコン単結晶引き上げ用石英ガラスルツボとその製造方法
JPH0826759A (ja) * 1994-07-19 1996-01-30 Shinetsu Quartz Prod Co Ltd 石英ガラスルツボ、その製造方法及び製造装置
WO1999061685A1 (fr) * 1998-05-25 1999-12-02 Shin-Etsu Quartz Products Co., Ltd. Creuset en verre de quartz destine a la croissance d'un monocristal de silicium et son procede de fabrication
WO2000006811A1 (fr) * 1998-07-31 2000-02-10 Shin-Etsu Quartz Products Co., Ltd. Creuset en verre de quartz servant a faire croitre un monocristal de silicium et procede de production de celui-ci
US6280522B1 (en) 1998-07-31 2001-08-28 Shin-Etsu Quartz Products Co. Ltd. Quartz glass crucible for pulling silicon single crystal and production process for such crucible
JP2001233629A (ja) * 1999-04-06 2001-08-28 Nanwa Kuorutsu:Kk 石英ガラスるつぼの製造方法
EP1094039A4 (en) * 1999-04-06 2009-01-28 Nanwa Quartz Inc METHOD FOR PRODUCING A QUARTZ GLASS LEVER
US7905112B2 (en) 2002-08-15 2011-03-15 Japan Super Quartz Corporation Reforming process of quartz glass crucible
US7587912B2 (en) 2003-02-28 2009-09-15 Heraeus Quarzglas Gmbh & Co. Kg Method for producing quartz glass crucible for use in pulling silicon single crystal and quartz glass crucible produced by said method
JP2008081373A (ja) * 2006-09-28 2008-04-10 Covalent Materials Corp シリカガラスルツボ及びシリカガラスルツボの製造方法
WO2009069773A1 (ja) * 2007-11-30 2009-06-04 Japan Super Quartz Corporation 石英ガラスルツボの製造方法および製造装置
JP5541777B2 (ja) * 2007-11-30 2014-07-09 株式会社Ｓｕｍｃｏ 石英ガラスルツボの製造方法および製造装置
US8196430B2 (en) 2007-11-30 2012-06-12 Japan Super Quartz Corporation Method and apparatus for manufacturing vitreous silica crucible
EP2113491A1 (en) 2008-04-30 2009-11-04 Japan Super Quartz Corporation Crucible lift device and method for taking-out crucible
US8141389B2 (en) 2008-04-30 2012-03-27 Japan Super Quartz Corporation Crucible lift device and method for taking-out crucible
EP2182099A1 (en) 2008-10-31 2010-05-05 Japan Super Quartz Corporation Silica glass crucible having multilayered structure
KR101331181B1 (ko) * 2009-08-12 2013-11-20 쟈판 스파 쿼츠 가부시키가이샤 실리카 유리 도가니의 제조 장치 및 실리카 유리 도가니의 제조 방법
US8739573B2 (en) 2009-08-12 2014-06-03 Japan Super Quartz Corporation Apparatus and method for manufacturing vitreous silica crucible
WO2011019012A1 (ja) * 2009-08-12 2011-02-17 ジャパンスーパークォーツ株式会社 シリカガラスルツボの製造装置及びシリカガラスルツボの製造方法
JP5713903B2 (ja) * 2009-08-12 2015-05-07 株式会社Sumco シリカガラスルツボの製造装置及びシリカガラスルツボの製造方法
CN102336527A (zh) * 2011-09-15 2012-02-01 江苏华尔光电材料股份有限公司 一种用于石英坩埚氢氧化钡涂层的装置及方法
WO2020145378A1 (ja) * 2019-01-11 2020-07-16 株式会社Sumco シリカガラスルツボの製造装置および製造方法
US12091346B2 (en) 2019-01-11 2024-09-17 Sumco Corporation Apparatus and method for manufacturing silica glass crucible

Also Published As

Publication number Publication date
JPH0422861B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-20

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