JPH011483A - ultrasonic motor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention uses super wave vibration to move a moving body! Regarding Ultrasonic Tanabata Driven by JRA.

(Prior Art) A superhigh wave motor is composed of a stator made of an electrostrictive or magnetostrictive element material and a movable body adhesively fixed to the stator, and a movable body that is in frictional contact with the movable body.

FIG. 1 is a block diagram of a conventional disk-shaped ultrasonic Tanabata device, in which an electrostrictive ceramic 2 having a thickness of 1111 mm or less is stacked and integrated with a stator base 1 serving as a moving body. The protrusion 3 on the vibrating body 1 is provided at a position where the bending vibration in the vertical direction of the vibrating body disc is maximum, and by making a notch, it is soft and expands the imaging width in the circumferential direction and the vertical direction. The rotor 4 of the movable body has a friction material 5 attached to the contact portion with the stator, and is pressed against the protrusion 3 of the stator to cause frictional movement. The electrostrictive material 2 is provided with a polarized electrode that causes vibration, and when an electric field is applied in the thickness direction, it expands in the thickness direction when the direction of the electric field is the same as the polarization direction, and contracts when the direction of the electric field is opposite to the polarization direction. When the electrodes are arranged so that positive and negative electric fields can be applied alternately and an alternating high-frequency electric field is applied, it vibrates up and down at a speed corresponding to the frequency, and a sine wave corresponding to the electrode arrangement is generated.

As shown in Figure 2, E! Two sets of electrode groups 6, E2 and E2, are provided, and the standing waves excited by the respective electrode groups are positioned at 90°.
When the electrodes 6 are arranged so as to be shifted by 1°, and an AC electric field with a temporal phase difference of 90'' is applied to the power sources E1 and [2, E
A traveling wave is generated in which the solid line generated by l and the dotted line wave generated by F2 overlap.

A, B, C, and D in FIG. 3 show traveling waves in which the wave amplitude moves with time. When this electrostrictive material 2 is provided with eight electrodes 6 and vibrated by two power sources E+ and F2, a traveling wave with four peaks that moves in one direction with time when two standing waves overlap is generated. The moving body 1 photographs the vibration displacement distribution as shown in FIG. As a result of this photographing, the movable body 4, which is in pressure contact with the protruding portion 3 through the friction material 5, moves its contact point with the four circumferential peaks of the vibrating body one after another, and rotates due to the contact friction force.

〔problem〕

As described above, since the movable body roller rotates due to the action of frictional force when pressed against the vibrating body, it is necessary to efficiently transmit the photographing driving force of the vibrating body to the movable body through friction. For this purpose, the movable body is provided with a friction material. Conventionally, resin, fiber sheets, etc. have been used as the friction material, but the coefficient of friction is not sufficient. Furthermore, if the friction material is made of synthetic resin or the like, there is a drawback that the friction material deteriorates over time due to wear and the characteristics deteriorate.

(Means for Solving Problems) The present invention was proposed in view of the above-mentioned drawbacks, and a friction layer is formed by micro-welding a wear-resistant material into an uneven shape on one or both of the contact surfaces between the vibrating body and the moving body. It is characterized by this.

〔Example〕

The present invention will be explained below with reference to an embodiment of the drawings.

FIG. 5 is an exploded configuration diagram of an annular ultrasonic motor. The annular vibrating body 1 has a vertical notch 8 in order to avoid mechanical stiffness for ultrasonic imaging and to increase the amplitude. It is a provision. 2 is an annular electrostrictive ceramic material (!1 strained material is also used), which is welded to the vibrating body 1. 4 is vibrating body 1
This is a partially cut piece of the annular moving body that comes into pressure contact with the vibrating body 1.
It rotates by annular movement due to the vibration traveling wave. Reference numeral 7 denotes a friction layer in which a wear-resistant material is micro-welded to the contact surfaces of the vibrating body 1 and the movable body 4 in a concavo-convex shape. WClTi is the wear-resistant material
0% Ba C, Hf C, Zr C, Ta
C,, TiN, BN...... Using the same highly wear-resistant materials, we micro-welded them to a thickness of 10 mm.
It is formed into a layer of about 25 μm.

Micro welding may use electric discharge (plasma) or laser.

FIG. 6 shows an example in which electric discharge is used, in which the electromagnetic coil 9 is excited with alternating current to vibrate the vibrating piece 10, and the coating material is applied to the supporting chuck 12 of the tip vibrating head 11 in a minute depth 1.
3 is attached and caused to vibrate into contact and release by vibration corresponding to the coating base material 14.

Pulse discharge is performed between the two by a pulse power source 15,
The minute discharge point portion melted by the discharge of the depth 13 is transferred and welded to the base material 14 having a large heat capacity during vibration contact, and this minute welding is performed while repeating vibration, and manually υ1t11. N
While moving the opposing gap between the chip 3 and the base material 14 by relative movement using C control or the like, micro deposits are welded to the entire surface of the base material 14 to form a layer.

This deposit is applied to the discharge pulse condition (i
p, ron, z: off, etc.), vibration conditions due to electromagnetic coil 9 (frequency, etc.), NG! By precisely controlling the relative movement speed etc. by 1Jtl1 etc. and controlling each deposit precisely and constant, a coating layer is formed as an accumulation of them, and a uniform uneven surface with a surface roughness of μ order of 10μRwax or less is formed. Covered? I-layer can be formed with a thickness of 5 to 30 μm
It can be formed in a relatively short time.

Figure 7 shows the coating material in the form of a wire with a wire diameter of approximately 0.5 to 2 m.
6, stored on a reel 17, continuously supplied, and guided by the vibrating head 11. A pulse discharge is caused between the tip of the wire 16 and the base material 14 to connect the tip of the wire to the base material 14.
This is applied to the entire coated surface of the base material 14 as the head 11 vibrates.

FIG. 8 shows a rod-shaped electrode 19 inserted coaxially into a cylindrical electrode 18,
A pulse power source 20 is connected between the two, and the coating material is stored as a powder 22 in a hopper 21, and the required amount is transferred from the hopper to the electrode 18.
．． 19 to the discharge gap, and the cylinder body 18 is
It is sprayed from the tip and is impact-welded to the base material 23.

By controlling the particle size of the powder 22, a coating layer with a surface roughness on the order of μ can be easily obtained.

Figure 9 shows the coating material formed into a thin wire 24 with a wire diameter of 0.05 to 0.51 + 1111 culm, which is stretched between electrodes 25 and subjected to an impact current to melt and discharge. The fine particles are impact-welded to the base material 26. This also makes it easy to obtain a coating layer with a surface roughness of about several μRll1ax, and by stretching the coating thin wire 24 in a circular shape corresponding to the shape of the base material 26, for example, an annular shape, the material can be formed into a predetermined shape at once. The required rIJm can be formed.

The above is an example of micro welding using electric discharge or plasma. Furthermore, the coating material is formed into a disk, rod, or wire shape, and pulsed discharge is applied to the gap formed by rotating and sliding the coating material while it is in contact with the base material. Alternatively, an electric discharge may be applied to the gap between opposing electrodes of the coating material, and the fine particles that are dissolved by the discharge and scattered around will be impact-welded to the base material placed nearby. A coating layer is formed by discharge deposition in an inert gas, or a coating layer is formed by discharge in a reactive gas. ! It is also possible to simultaneously perform treatments such as carbonization, nitridation, and boronization of the layer to form a wear-resistant layer. In any discharge coating process, the control of the pulse conditions of the discharge market, the control of the vibration and rotation conditions, and the control of the moving speed are kept constant and finely controlled, and each deposit is coated quantitatively. It is possible to form a friction layer with an uneven surface of an order of magnitude.

For example, a WC material was micro-welded to the contact surfaces of a vibrating body and a movable body made of steel using the apparatus shown in FIG. Base material 27 is NC
8#J Fixed to table 28, covering material electrode 29 has a diameter of 3
It is formed into a rod shape of mlφ, and is fixedly supported by a head 30 that provides vertical vibration of 100 FIZ and rotation of 80 Orpm. This rotating electrode 29 is brought into contact with and released from the base material 27, and a pulse power source 31 is applied between the two to provide Ip=60Δ, ron=
A pulse of 20 μs and roff = 40 μs is applied to cause discharge, and the NG device 32 causes the motor 33.34 to
While driving the table at a moving speed of 150 mm/min, the entire surface of the base material 21 was coated with the WC material. When the surface roughness of the coating layer is approximately 8 μI and the thickness is approximately 20 μm, the friction coefficient is approximately 0.2 (dynamic friction) and the load is 60 μm.
H/CI2'Z-When tested for wear resistance, it showed about 10 to 50 times more wear resistance than hardened steel.

The surface shape of the coating layer can be determined by feeding the NG table 2B in pulse steps (a) as shown in FIG.
It can be formed into dots as shown in the figure, and by continuous radial feeding (1) it can be formed into radial lines as shown in the figure.

In the case of the embodiments shown in FIGS. 8 and 9, a satin-like surface layer can be formed, and by using a mask, it can be formed in a square shape and on any desired surface. Moreover, the coating layer can be formed partially, without being uniformly formed over the entire surface of the quality material.

Figure 12 shows an example of micro welding using a laser.
A coating material powder 36 is supplied onto the base material 35 and is irradiated with a laser beam to weld and coat it. 37 is a laser oscillator, 3
8 is an irradiation lens, 39 is a support head, 40 is a feed shaft, 41
is the drive motor. The feed axes are provided on the XY axes, and by controlling each axis drive motor with the NG device, the movement of the laser beam irradiation point is controlled, the coating material is spot-welded at the laser irradiation point, and this is fixed by the movement of the head. A coating layer is formed and covered by running M on the surface of the material 35. The laser oscillator uses a CO2 gas laser, YAG laser, etc. of approximately 50 W to 500 W, and irradiates continuously or in an intermittent pulsed manner.

Note that the coating material is not limited to powder, and can be supplied to the surface of the base material in the form of a wire, band, or thin plate, and welded and coated in dots or continuous lines. It is also possible to adhere the powder layer in advance with an adhesive and remove excess powder after the micro-welding process.

〔Effect of the invention〕

As described above, the friction layer 7 formed by micro-welding a wear-resistant material on the contact friction surface of one or both of the vibrating body 1 and the movable body 4 has a uniform uneven surface of μ order with a roughness of 10 μRmax or less. It is easily formed and the friction of this friction layer υ1
! 11, it is possible to efficiently transmit the driving force due to standing waves or traveling waves of ultrasonic vibrations generated in the moving body 1 to the movable body 4, thereby providing stable rotation with high torque. or,
Low speed and high torque can be easily obtained, and holding torque is also large.
A motor with excellent responsiveness can be easily obtained. In addition, since the friction layer 1 is micro-welded with a wear-resistant material such as carbide, there is little wear, little change in contact friction force over time, and stable motor drive with always higher electrical and mechanical energy conversion efficiency. It will be done.

Note that the Tanabata is not limited to a rotating case; a linear motor can also be used, and any moving body driving method such as a standing wave method or a traveling wave method can be adopted.

[Brief explanation of drawings]

Fig. 1 is an exploded view of the conventional Choshoha Tanabata, Fig. 2 is an explanatory view of a part of the main body developed, Fig. 3 is an explanatory view of its characteristics, and Fig. 4 is a photographic explanatory view of a part of it. FIG. 5 is an exploded view of an embodiment of the present invention, FIGS. 6 to 10 and 12 are explanatory diagrams of an embodiment of micro welding of the present invention, and FIG. 11 is an explanatory diagram of the micro welding covered surface. Yes. 1...Moving body 2...Electrostrictive element material 3...Vibrating body protrusion 4... ...Moving body 5...Friction material 1...Micro welding friction layer Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 5 Fig. 6 Fig. 7 Figure b Figure 8 Figure 12

Claims (1)

[Claims] A stator comprising an electrostrictive or magnetostrictive element material and a vibrating body adhesively fixed to the stator, a movable body in frictional contact with the vibrating body, and a control power source for ultrasonically driving the electrostrictive or magnetostrictive element material. 1. An ultrasonic motor characterized in that a friction layer is formed on one or both of the contact surfaces between the vibrating body and the movable body by micro-welding a wear-resistant material into an uneven shape.