JP2008238398A - Manufacturing equipment of lapping machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a process of manufacturing a lapping plate with a number of abrasive grains embedded in a surface in a short time. <P>SOLUTION: The manufacturing process of the lapping machine with the abrasive grains embedded in the surface comprises a step of preparing a metal board, a slurry supplier for supplying abrasive grain slurry to a surface of the metal board, an abrasive grain pressing tool for pressing abrasive grains on the metal board to the metal board, and an ultrasonic vibration generating means attached to the abrasive grain pressing tool, a step of arranging the abrasive grain pressing tool on the metal board, rotating the metal board while applying ultrasonic vibrations to the abrasive grain pressing tool by the ultrasonic vibration generating means, simultaneously interposing the abrasive grain slurry between the metal board and the abrasive grain pressing tool by supplying the abrasive grain slurry onto the metal board and embedding the abrasive grains of the abrasive grain slurry into the surface of the metal board under influence of vibration energy of the ultrasonic vibrations applied through the abrasive grain pressing tool, and a step of removing the abrasive grain slurry including non-embedded abrasive grains from the metal board. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for manufacturing and using a lapping machine.

  The surface of the substrate used for forming the integrated circuit or the surface of the thin film magnetic head is subjected to high-precision polishing.

  As one method for polishing a polishing object with high accuracy, a polishing method using an abrasive slurry is known. A method of polishing an object to be polished with abrasive grains is also called lapping. Lapping is performed by interposing an abrasive slurry between an object to be polished and a lapping machine formed from a soft metal, and rotating the lapping machine. In lapping using an abrasive slurry, the surface of the object to be polished is scratched during processing, and the processing accuracy of the object to be polished (eg, thin film magnetic head) having surface portions with different hardnesses. Have problems such as low. This is because when the low-hardness surface of the object to be polished is polished before the high-hardness surface, the abrasive grains in the abrasive slurry gather on the low-hardness surface after polishing. This is to promote it.

  Patent Document 1 discloses a lapping method in which the above problem is improved. The lapping method described in Patent Document 1 is carried out by interposing a lubricant between an object to be polished and a lapping machine having abrasive grains fixed on the surface, and rotating the lapping machine.

  The lapping machine used in this lapping method is manufactured, for example, by applying a mixture of diamond abrasive grains and a lubricant to the surface of a tin metal disk and rotating the metal disk while pressing a dedicated polishing body. The By applying mechanical energy due to the rotation of the metal disk to the abrasive grains, the abrasive grains are embedded and fixed in a state where a part of the particles are exposed on the surface of the metal disk.

  In Patent Document 1, the lapping method using such a lapping machine restricts the movement of the abrasive grains as compared with the method using an abrasive slurry (the abrasive grains are fixed to the lapping machine surface). Therefore, the occurrence of scratches on the surface of the polishing object during processing can be reduced, and the polishing object having surface portions with different hardnesses can be lapped with high accuracy. ing.

JP-A-7-299737

  The lapping machine described in Patent Document 1 is manufactured by applying mechanical energy and embedding and fixing diamond abrasive grains on the surface of a tin metal board. Such a lapping machine manufacturing method requires a long time to fix a sufficient number of abrasive grains on the surface of the metal disk, and if the abrasive grain fixing time is shortened, a sufficient number of abrasive grains are embedded and fixed. There is a problem that it is difficult to do.

  An object of the present invention is to provide a method of manufacturing a lapping plate having a large number of abrasive grains embedded and fixed on the surface in a short time.

This invention exists in the manufacturing method of the lapping machine by which the abrasive grain was embedded and fixed in the state which exposed some particles on the surface including the following processes.
(1) A metal disk having a soft metal surface, an abrasive slurry supplier for supplying abrasive slurry to the metal disk surface, and an abrasive grain having a hard surface that presses the abrasive grains supplied to the metal disk surface against the metal disk surface A step of preparing a pressing tool and ultrasonic vibration generating means attached to the metal disk and / or the abrasive pressing tool.
(2) An abrasive grain pressing tool is disposed on the surface of the metal disk, and the ultrasonic vibration generated by the ultrasonic vibration generating means is applied to the metal disk and / or the abrasive grain pressing tool, The abrasive slurry is interposed between the metal disc and the surface of the abrasive pressing device by simultaneously rotating the abrasive shaft from the abrasive slurry supplier to the metal disc surface. By exposing the abrasive grains in the abrasive slurry to the surface of the metal disk under the influence of the vibration energy of ultrasonic vibration applied through the metal disk and / or abrasive pressing tool, a part of the particles is exposed. The process of embedding and fixing in the finished state.
(3) A step of removing the abrasive slurry containing unfixed abrasive grains from the surface of the metal disk.

The preferable aspect of the manufacturing method of the lapping machine of this invention is as follows.
1) Along with the rotation of the metal plate, the abrasive grain pressing tool is rotated around an axis perpendicular to the surface of the metal plate.
2) The abrasive grain pressing tool is in a cylindrical shape with the metal plate side as the bottom surface, more preferably in a cylindrical shape.
3) One or two or more grooves extending along the thickness direction of the cylindrical peripheral wall are formed on the bottom surface of the cylindrical body of the cylindrical abrasive grain pressing tool.

  The present invention also includes a cylindrical abrasive pressing tool and ultrasonic vibration generating means attached to the inner peripheral surface, outer peripheral surface, or upper surface of the cylindrical body of the abrasive pressing tool. There is also an ultrasonic vibration applying device for manufacturing a lapping machine.

Preferred embodiments of the ultrasonic vibration applying device of the present invention are as follows.
1) The cylindrical abrasive grain pressing tool is in a cylindrical shape.
2) One or two or more grooves extending along the thickness direction of the cylindrical peripheral wall are formed on the lower surface of the cylindrical body of the abrasive pressing tool.

This invention also exists in the lapping method of the grinding | polishing target object containing the following processes.
(1) A lapping machine manufactured by any one of the methods of the present invention, a lubricant supply tool for supplying a lubricant to the surface of the lapping machine, and an object to be polished are held. A step of preparing a polishing object holder that is brought into contact with the surface via a lubricant.
(2) The polishing object holder is arranged on the surface of the lapping machine so that the polishing object side is the lapping machine side, and the lapping machine is rotated around an axis perpendicular to the surface, and at the same time, the lapping machine surface A step of lapping the object to be polished while interposing the lubricant between the lapping machine and the surface of the object to be polished by supplying the lubricant from the lubricant supply tool.

Preferred embodiments of the lapping method of the present invention are as follows.
1) With the rotation of the lapping machine, the polishing object holder is rotated about an axis perpendicular to the lapping machine surface.
2) An ultrasonic vibration generating means is attached to the lapping machine and / or the polishing object holder, and the ultrasonic vibration generated by the ultrasonic vibration generating means is generated along with the rotation of the lapping machine, and the lapping machine and / or the polishing object. Apply to the holder.

  According to the present invention, a lapping machine having a large number of abrasive grains embedded and fixed on the surface can be manufactured in a short time. By manufacturing the lapping machine according to the present invention, the time required for the lapping process preparation work (abrasive fixing process) is shortened, so that the object to be polished can be lapped efficiently. Furthermore, the lapping object can be lapped with high accuracy by applying ultrasonic vibration to at least one of the lapping machine and the lapping object holder during lapping.

  First, an apparatus used for carrying out the lapping machine manufacturing method of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a front view showing a configuration example of an apparatus used for carrying out the lapping machine manufacturing method of the present invention, and FIG. 2 is a plan view of the apparatus of FIG.

  The apparatus shown in FIG. 1 is connected to a motor 12 fixed to a base 11 and a rotary shaft 13 of the motor 12, and is erected on a base 15 and a base 11 for fixing a metal plate 14 as a material of a lapping machine. An abrasive slurry supply tool 18 that is fixed to the support 16 and supplies the abrasive slurry 17 to the surface of the metal disk 14, is disposed on the surface of the metal disk 14, and abrasive grains in the abrasive slurry supplied to the surface of the metal disk 14 It is comprised from the abrasive grain pressing tool 19 pressed against the metal disk surface, the ultrasonic vibration generating means 20 attached to the abrasive grain pressing tool 19, and the like.

  The side surface of the abrasive grain pressing tool 19 provided with the ultrasonic vibration generating means 20 is supported by a pair of rollers 21. Each roller 21 is rotatably supported by a roller support member 23 fixed to the upper end of a support column 22 erected on the base 11. The metal plate 14 fixed to the cradle 15 rotates about an axis perpendicular to the surface thereof by driving the motor 12. As the metal plate 14 rotates, the abrasive grain pressing tool 19 supported by the pair of rollers 21 rotates about an axis perpendicular to the surface of the metal plate 14.

  As the ultrasonic vibration generating means 20, a piezoelectric vibrator composed of a disk-shaped piezoelectric ceramic 24 and electrodes 25 attached to each surface thereof is sandwiched between an upper metal member 26 and a lower metal member 27. A Langevin type vibrator bolted in a state is used. A slip ring 28 is attached to the upper surface of the ultrasonic vibration generating means 20. As the piezoelectric vibrator of the ultrasonic vibration generating means 20, a longitudinal vibration mode piezoelectric vibrator is used. An AC power supply 30 is electrically connected to the electrode 25 of the piezoelectric vibrator via an electric wiring 29a, a slip ring 28, and an electric wiring 29b. When an AC voltage is applied to the electrode 25 of the piezoelectric vibrator of the ultrasonic vibration generating means 20 by the AC power source 30, the ultrasonic vibration generating means 20 generates ultrasonic vibration that vibrates in a direction perpendicular to the surface of the metal plate, This ultrasonic vibration is applied to the abrasive pressing tool 19.

  The abrasive grain pressing tool 19 is formed of a material having high hardness such as aluminum oxide, for example. The abrasive pressing tool 19 shown in FIG. 1 has a cylindrical shape. FIG. 3 is a bottom view of the abrasive grain pressing tool 19. As shown in FIG. 3, twelve grooves 31 extending along the thickness direction of the cylindrical peripheral wall are formed on the bottom surface of the cylindrical body of the abrasive pressing tool 19.

  Next, the manufacturing method of the lapping machine according to the present invention will be described by taking the case of using the apparatus of FIG. 1 as an example. The manufacturing method of the lapping machine of the present invention is characterized by sequentially performing the following steps (1) to (3).

  (1) A metal disk 14, an abrasive slurry supply tool 18 for supplying an abrasive slurry 17 to the surface of the metal disk 14, an abrasive pressing tool 19 for pressing the abrasive particles supplied to the surface of the metal disk 14 against the surface of the metal disk 14, And the process of preparing the ultrasonic vibration generation means 20 attached to the abrasive grain pressing tool 19.

  (2) An abrasive grain pressing tool 19 is disposed on the surface of the metal disk 14 and the ultrasonic vibration generated by the ultrasonic vibration generating means 20 is applied to the abrasive grain pressing tool 19 while the metal disk 14 is applied to the surface. Abrasive grains are rotated between the metal disk 14 and the surface of the abrasive pressing tool 19 by rotating around a vertical axis and simultaneously supplying the abrasive slurry 17 from the abrasive slurry supply tool 18 to the surface of the metal disk 14. By interposing the slurry, the abrasive grains in the abrasive slurry are partly applied to the surface of the metal disk 14 under the influence of the vibration energy of ultrasonic vibration applied through the abrasive pressing tool 19. A process of embedding and fixing in an exposed state.

  As described above, as shown in the apparatus of FIG. 1, it is desirable that the abrasive grain pressing tool 19 rotates around an axis perpendicular to the surface of the metal plate 14 as the metal plate 14 rotates.

  (3) A step of removing abrasive slurry containing unfixed abrasive grains from the surface of the metal plate 14.

  As described above, a lapping machine is manufactured in which the abrasive grains are embedded and fixed in a state where a part of the particles are exposed on the surface.

  In the lapping machine manufacturing method of the present invention, the abrasive grains in the abrasive slurry are applied through the abrasive pressing tool 19 by the mechanical energy generated by the rotation of the metal disk 14 and by the ultrasonic vibration applying means 20. It is affected by vibration energy of ultrasonic vibration. The abrasive grains are embedded and fixed on the surface of the metal disk 14 under the influence of these energies (particularly, the energy of ultrasonic vibration) with some of the particles exposed. By applying the vibration energy of ultrasonic vibration to the abrasive grains in this way, the abrasive grains collide with the metal disk, and a lapping machine in which a large number of abrasive grains are embedded and fixed on the surface can be manufactured in a short time. .

  Further, the speed of lapping using such a lapping machine gradually decreases because the abrasive grains embedded and fixed on the lapping machine surface are gradually detached from the lapping machine surface by repeating lapping. . When the lapping speed becomes a value below a certain level, the work of fixing the abrasive grains to the surface of the metal disk is performed again. According to the manufacturing method of the present invention, a large number of abrasive grains can be embedded and fixed in a short time on the surface of the metal disk, that is, the time required for the lapping preparation work (abrasive fixing work) can be shortened. In addition, the working efficiency of lapping can be increased.

  In the following, the ultrasonic vibration generating means, the abrasive grain pressing tool and the like used for carrying out the lapping machine manufacturing method of the present invention will be described in detail.

  The ultrasonic vibration generating means applies ultrasonic vibration to the abrasive grains included in the abrasive slurry supplied between the metal disk and the abrasive pressing tool. In order to apply ultrasonic vibration to the abrasive grains, the ultrasonic vibration generating means may be attached to at least one of the metal disk and the abrasive pressing tool. The ultrasonic vibration generating means is preferably attached to a metal disk or an abrasive pressing tool via a contact medium such as grease in order to efficiently transmit the ultrasonic vibration.

  The ultrasonic vibration applying means can be attached to a metal disk or an abrasive pressing tool through another member formed of a material (for example, a metal material) that transmits ultrasonic waves. For example, when the ultrasonic vibration generating means is attached to the metal plate 14 of the apparatus of FIG. 1, the ultrasonic vibration generating means can be attached to the bottom surface of the cradle 15. When the ultrasonic vibration generating means is attached to the bottom surface of the cradle of the apparatus shown in FIG. 1, a plurality of ultrasonic vibration generating means can be provided side by side along the circumferential direction of the cradle.

  As the ultrasonic vibration generating means, an electrostrictive vibrator, a magnetostrictive vibrator, or the like can be used. Examples of the electrostrictive vibrator include a piezoelectric vibrator and a Langevin vibrator having a configuration in which the piezoelectric vibrator is bolted with a pair of metal members. Examples of the magnetostrictive vibrator include a metal magnetostrictive vibrator and a ferrite vibrator. As the vibrator, an electrostrictive vibrator (particularly, a Langevin vibrator) is preferably used.

  The abrasive grain pressing tool functions to press the abrasive grains against the surface of the metal disk. Usually, as the abrasive grains, diamond particles having higher hardness than the object to be polished are used. Therefore, in order to suppress the surface of the metal disk side of the abrasive pressing tool from being lapped by such abrasive grains, the abrasive pressing tool needs to have a hard surface as its surface. . For this purpose, the abrasive pressing tool is a ceramic material typified by aluminum oxide, zirconium oxide, silicon nitride, and silicon carbide, or super typified by WC-Ta-Co alloy and WC-TiC-Co alloy. It is preferably formed from a hard material such as a hard alloy. Moreover, only a part including the surface (surface on the metal disk side) of the abrasive pressing tool can be formed from the hard material.

  The abrasive pressing tool is not particularly limited in its shape as long as it has a hard surface on the metal plate side. When the abrasive pressing tool is rotated together with the rotation of the metal disc as in the apparatus of FIG. 1, the peripheral speed of the surface portion near the rotation center of the metal disc side surface of the abrasive pressing device is the surface near the outer edge of the surface. It shows a very small value compared to the peripheral speed of the part. For this reason, the mechanical energy given to the abrasive grains by the surface portion near the rotation center is much smaller than the energy given to the abrasive grains by the surface portion near the outer edge. Thus, the presence of variation in the magnitude of the mechanical energy applied to the abrasive grains is not preferable for uniformly embedding and fixing the abrasive grains on the surface of the metal disk. In addition, the magnitude of the vibration energy of the ultrasonic vibration generated by the ultrasonic vibration generating means slightly varies between the surface portion near the rotation center and the surface portion near the outer edge. In order to reduce the influence of such variation and to uniformly embed and fix the abrasive grains on the surface of the metal disk, the abrasive grain pressing tool may have a cylindrical shape with the metal disk side surface as the bottom surface. Preferably, a cylindrical shape is more preferable.

  Furthermore, it is preferable that one or two or more grooves extending along the thickness direction of the cylindrical peripheral wall are formed on the bottom surface of the cylindrical body of the abrasive grain pressing tool. By forming such a groove, the abrasive slurry supplied to the surface of the metal plate is efficiently supplied between the metal plate and the abrasive pressing device (the portion where the groove on the annular bottom surface is not formed). A large number of abrasive grains can be embedded and fixed on the surface of the metal disk.

  If the metal disk used for manufacture of a lapping machine has a soft metal surface, there will be no restriction | limiting in particular in the structure. That is, the whole metal disk may be formed from a soft metal material, or a part including the surface of the metal disk may be formed from a soft metal material. Examples of soft metal materials include metal materials such as tin and lead, or alloy compositions containing these metal materials. Examples of the alloy composition include a tin-antimony alloy, a tin-bismuth alloy, a tin-lead alloy, and brass. By applying the manufacturing method of the present invention, it is also possible to manufacture a lapping machine having a configuration in which a resin board is used as a material of the lapping machine and abrasive grains are embedded and fixed on the surface of the resin board.

  Examples of the abrasive grains contained in the abrasive slurry include aluminum oxide particles, silicon oxide particles, chromium oxide particles, iron oxide particles, silicon carbide particles, boron nitride particles, and diamond particles. The type of abrasive grains is appropriately selected depending on the hardness of the polishing object to be lapped. Water, oil, or the like is used as a solvent for the abrasive slurry. The grain size of the abrasive grains is preferably in the range of 10 nm to 1 μm.

  Next, a method for using the lapping machine manufactured as described above, that is, a lapping method of the present invention using the produced lapping machine will be described. First, a lapping apparatus used for carrying out the lapping method of the present invention will be described. FIG. 4 is a front view illustrating a configuration example of the lap device.

  The configuration of the lapping apparatus of FIG. 4 is that a lapping machine 44 produced on the cradle 15 is fixed, and a disc-shaped polishing object holder 42 with a polishing object 41 held on the surface of the lapping machine 44. It is the same as that of the apparatus of FIG. 1 except having been arrange | positioned and the lubricant supply tool 48 being provided.

  Next, the lapping method of the present invention will be described using the lapping apparatus of FIG. 4 as an example. The manufacturing method of the lapping machine of the present invention is characterized by sequentially performing the following steps (1) and (2).

  (1) A lapping machine 44 manufactured according to the above-described method of the present invention, a lubricant supply tool 48 for supplying a lubricant 47 to the surface of the lapping machine 44, and a polishing object 41 are held, and the polishing object 41 is lapped. A step of preparing a polishing object holder 42 that is brought into contact with the surface of the board 44 through a lubricant.

  (2) The polishing object holder 42 is disposed on the surface of the lapping machine 44 so that the polishing object side is on the lapping machine side, and the lapping machine 44 is rotated around an axis perpendicular to the surface, and simultaneously lapped. By supplying the lubricant 47 from the lubricant supply tool 48 to the surface of the board 44, the polishing object 41 is lapped while a lubricant is interposed between the lapping machine 44 and the surface of the polishing object 41. Process.

  In the lapping apparatus of FIG. 4, the polishing object holder 42 supported by the pair of rollers 21 rotates about an axis perpendicular to the surface of the lapping machine 44 as the lapping machine 44 rotates.

  Typical examples of the lubricant used in the lapping process include water and oil. Examples of oils include olive oil, silicone oil, and machine oil.

  In this way, by lapping the object to be polished using a lapping machine in which abrasive grains are embedded and fixed on the surface, it is possible to reduce the occurrence of scratches on the surface of the object to be polished during processing, and the hardness of each other It is possible to lapping a polishing object having different surface portions with high accuracy. This is because the entire surface of the object to be polished is uniformly lapped by the abrasive grains being fixed to the lapping machine surface.

  FIG. 5 is a front view showing another configuration example of the lapping apparatus used for carrying out the lapping method of the present invention. The configuration of the lapping apparatus of FIG. 5 is the same as that of the lapping apparatus of FIG. 4 except that an ultrasonic vibration generating means 50 is attached to the polishing object holder 52.

  The lapping method of the polishing object 41 using the lapping apparatus of FIG. 5 is other than applying the ultrasonic vibration generated by the ultrasonic vibration generating means 50 to the polishing object holder 52 as the lapping machine 44 rotates. Is carried out in the same manner as the lapping method using the lapping apparatus of FIG.

  In this way, when the polishing object is lapped while applying ultrasonic vibration to the polishing object holder (or lapping machine) by the ultrasonic vibration generating means, than when lapping without applying ultrasonic vibration, The lapping object can be lapped with high accuracy. The reason why the polishing object can be lapped with high accuracy by applying ultrasonic vibration to the polishing object holder is understood as follows.

  In general, it is known that the accuracy of lapping is mainly determined by the grain size of abrasive grains. This is the same as the accuracy of polishing being determined by the roughness of the sandpaper when the object to be polished is polished by sandpaper. That is, in order to increase the accuracy of lapping, it is necessary to use smaller-sized abrasive grains.

  The reason why the accuracy of the lapping process is increased by applying ultrasonic vibration is that when the polishing object holder 52 is ultrasonically vibrated by applying ultrasonic vibration, the distance between the surface of the lapping machine 44 and the surface of the polishing object 41 is increased. When the lapping is performed using a lapping machine in which abrasive grains embedded and fixed on the surface of the lapping machine have a reduced contact area with the surface of the object to be polished and a smaller size of the abrasive grains is fixed and fixed. It is understood that this is because the same processing accuracy can be obtained.

  In a lapping method using a conventional abrasive slurry, it is necessary to use smaller size abrasive grains in order to increase the processing accuracy. For example, in lapping a thin film magnetic head, diamond particles having a particle size of about 80 nm are used as abrasive grains. Although studies have been made to further reduce the particle size of diamond particles to further improve processing accuracy, it is necessary to solve problems such as agglomeration of abrasive grains in an abrasive slurry.

  In the lapping method of the present invention, since the abrasive grains are embedded and fixed on the surface of the lapping machine, the abrasive grains do not aggregate with each other. It has the advantage that lapping can be realized.

  Next, an ultrasonic vibration applying device for manufacturing a lapping machine according to the present invention will be described. The ultrasonic vibration imparting device of the present invention includes a cylindrical abrasive pressing tool, and an ultrasonic vibration generating means attached to the inner peripheral surface, outer peripheral surface, or upper surface of the cylindrical body of the pressing tool. The Preferred embodiments of the ultrasonic vibration generating means and the abrasive pressing tool are the same as the ultrasonic vibration generating means and the abrasive pressing tool used in the above-described lapping machine manufacturing method of the present invention.

  In the apparatus of FIG. 1, an ultrasonic vibration applying device having a configuration in which ultrasonic vibration generating means 20 is provided on the upper surface of a cylindrical body of a cylindrical abrasive grain pressing tool 19 is used. As described above, the Langevin type vibrator is used as the ultrasonic vibration generating means of the apparatus of FIG. As the piezoelectric vibrator included in the Langevin type vibrator, a piezoelectric vibrator in a longitudinal vibration mode is used. By applying an AC voltage to the electrodes of the piezoelectric vibrator, the surface on the abrasive grain pressing tool side of the Langevin vibrator vibrates in a direction perpendicular to the surface. The direction perpendicular to the surface on the abrasive grain pressing tool side of the Langevin type vibrator means a direction within a range of ± 30 degrees with respect to the direction perpendicular to the surface. The ultrasonic vibration generating means may be attached to the inner peripheral surface or the outer peripheral surface of the cylindrical body of the abrasive pressing tool.

  In this way, by using the ultrasonic vibration applying device having the configuration in which the ultrasonic vibration generating means is attached to the abrasive pressing device, for example, in the lapping apparatus of FIG. 4, the lapping is repeated on the surface of the lapping machine. The ultrasonic vibration applying device of the present invention is arranged on the surface of the lapping machine in place of the polishing object holder 42 holding the polishing object 41 when it is detached from the lapping machine 44. It is possible to embed and fix the abrasive grains again on the surface of the metal disk. In this case, the abrasive slurry used for embedding and fixing the abrasive grains may be supplied using the lubricant supply tool 47, or an abrasive slurry supply tool prepared separately from the lubricant supply tool 47 is used. May be supplied.

[Example 1]
The lapping machine was produced using the apparatus having the configuration shown in FIG. First, as shown in FIG. 1, a tin plate having a diameter of 380 mm and a thickness of 40 mm is used as a material for a lapping machine on a receiving base 15 connected to a rotating shaft 13 of a motor 12 fixed to a base 11. An antimony metal plate 14 was fixed.

  Next, the abrasive grain pressing tool 19 to which the ultrasonic vibration generating means 20 was fixed was placed on the metal plate 14.

  The abrasive grain pressing tool 19 has a cylindrical shape with an outer diameter of 140 mm, an inner diameter of 120 mm, and a length of 40 mm. The abrasive grain pressing tool 19 is made of aluminum oxide. As shown in FIG. 3, twelve grooves 31 are formed on the lower surface of the cylindrical body of the abrasive pressing tool 19. The width of the groove is 5 mm and the depth is 20 mm.

  As the ultrasonic vibration generating means 20, a Langevin type vibrator is used in which a piezoelectric vibrator is bolted in a state of being sandwiched between an upper metal member 26 and a lower metal member 27. The upper metal member 26 and the lower metal member 27 are made of aluminum. The piezoelectric vibrator is composed of a disk-shaped piezoelectric ceramic 24 and electrodes 25 provided on each surface thereof. A slip ring 28 is attached to the top surface of the ultrasonic vibration generating means 20. An AC power supply 30 is connected to the slip ring 28. The ultrasonic vibration generating means 20 generates an ultrasonic vibration that vibrates in a direction perpendicular to the surface of the metal disk 14 when an AC voltage is applied to the piezoelectric vibrator from the AC power supply 30 via the slip ring 28. .

  Next, while dropping olive oil (abrasive slurry) in which diamond abrasive grains having a particle size of about 0.1 μm are dropped from the abrasive slurry supply tool 18 onto the surface of the metal disc 14, the metal disc 14 is moved at 20 rpm. Rotated at speed. At the same time, an AC vibration having a frequency of 20 kHz was applied to the piezoelectric vibrator, and ultrasonic vibration was generated by the ultrasonic vibration generating means 20. The vibration amplitude of the bottom surface of the ultrasonic vibration generating means 20 is about 2 μm.

  By the rotation of the metal plate 14, the abrasive grain pressing tool 19 whose side surfaces are supported by the pair of rollers 21 rotates, and an abrasive slurry is supplied between the metal disk 14 and the abrasive grain pressing tool 19.

  Then, the metal plate 14 was stopped one hour after starting to rotate. Thereafter, the abrasive slurry on the surface of the metal plate 14 was wiped off using a cloth soaked with ethanol.

  In this way, while applying the ultrasonic vibration generated by the ultrasonic vibration applying means 20 to the abrasive grain pressing tool 19, the metal disk 14 and the abrasive grain pressing tool 19 are connected to each other between the metal disk and the abrasive grain pressing tool. A lapping machine was produced by rotating with an abrasive slurry in between.

  FIG. 6 is an electron micrograph of the surface of the produced lapping machine. In the electron micrograph of FIG. 6, the white portion is the surface of the metal disk, and the black dots are diamond abrasive grains. As shown in FIG. 6, it can be seen that a large number of abrasive grains are embedded and fixed on the surface of the lapping machine.

[Comparative Example 1]
A lapping machine was produced in the same manner as in Example 1 except that the ultrasonic vibration was not generated by the ultrasonic vibration generating means 20 when the metal disk 14 was rotated. FIG. 7 is an electron micrograph of the surface of the produced lapping machine. As shown in FIG. 7, it can be seen that the number of diamond abrasive grains embedded and fixed on the surface of the lapping machine is much smaller than that of the lapping machine produced in Example 1.

It is a front view which shows the structure of an example of the apparatus used for implementation of the manufacturing method of the lapping machine of this invention. FIG. 2 is a plan view of the apparatus of FIG. 1. It is a bottom view of the abrasive grain pressing tool of the apparatus of FIG. It is a front view which shows the structural example of the lapping apparatus used for implementation of the lapping method of this invention. It is a front view which shows another structural example of the lapping apparatus used for implementation of the lapping method of this invention. 2 is an electron micrograph of the surface of a lapping machine produced in Example 1. FIG. 2 is an electron micrograph of the surface of a lapping machine produced in Comparative Example 1.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Base 12 Motor 13 Rotating shaft 14 Metal board 15 Base 16 Support column 17 Abrasive slurry 18 Abrasive slurry supply tool 19 Abrasive pressing device 20 Ultrasonic vibration generating means 21 Roller 22 Support column 24 Roller support member 24 Piezoelectric ceramic 25 Electrode 26 Upper metal member 27 Lower metal member 28 Slip ring 29a, 29b Electric wiring 30 AC power supply 31 Groove 41 Polishing target 42 Polishing target holder 44 Lapping machine 47 Lubricant 48 Lubricant supply tool 50 Ultrasonic vibration generating means 52 Abrasive object holder

Claims (10)

  A base, a rotary shaft erected on the base, a motor connected to the rotary shaft, a metal plate supported by the rotary shaft and having a soft metal surface on the top surface, and above the metal plate Wrapping comprising an abrasive slurry supply tool disposed, and an abrasive pressing tool provided on the upper surface of the metal disk and having an ultrasonic vibration generating means and having a flat bottom surface made of a hard material. Board manufacturing equipment.   The lapping machine manufacturing apparatus according to claim 1, wherein the abrasive pressing tool has a cylindrical shape.   The lapping machine manufacturing apparatus according to claim 2, wherein one or two or more grooves extending along the thickness direction of the peripheral wall of the pressing tool are formed on the bottom surface of the cylindrical abrasive pressing tool.   The lapping machine manufacturing apparatus according to claim 1, wherein the ultrasonic vibration generating means is a Langevin type vibrator.   The lapping machine manufacturing apparatus according to claim 1, wherein the abrasive pressing tool is made of a ceramic material or a cemented carbide.   A metal having a base, a rotating shaft standing on the base, a motor connected to the rotating shaft, an ultrasonic vibration generating means supported by the rotating shaft, and having a soft metal surface on the upper surface Wrapping comprising a disc, an abrasive slurry supply device disposed above the metal disc, and an abrasive pressing device having a flat bottom surface made of a hard material and placed on the upper surface of the metal disc Board manufacturing equipment.   The lapping machine manufacturing apparatus according to claim 6, wherein the abrasive grain pressing tool has a cylindrical shape.   The lapping machine manufacturing apparatus according to claim 7, wherein one or more grooves extending along the thickness direction of the peripheral wall of the pressing tool are formed on the bottom surface of the cylindrical abrasive pressing tool.   The lapping machine manufacturing apparatus according to claim 6, wherein the ultrasonic vibration generating means is a Langevin type vibrator.   The lapping machine manufacturing apparatus according to claim 6, wherein the abrasive pressing tool is formed of a ceramic material or a cemented carbide.

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