JPH01144810U - - Google Patents

Info

Publication number
JPH01144810U
JPH01144810U JP4111288U JP4111288U JPH01144810U JP H01144810 U JPH01144810 U JP H01144810U JP 4111288 U JP4111288 U JP 4111288U JP 4111288 U JP4111288 U JP 4111288U JP H01144810 U JPH01144810 U JP H01144810U
Authority
JP
Japan
Prior art keywords
light
displacement
measuring device
displacement measuring
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4111288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0726648Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988041112U priority Critical patent/JPH0726648Y2/ja
Publication of JPH01144810U publication Critical patent/JPH01144810U/ja
Application granted granted Critical
Publication of JPH0726648Y2 publication Critical patent/JPH0726648Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)
JP1988041112U 1988-03-30 1988-03-30 変位測定装置 Expired - Lifetime JPH0726648Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988041112U JPH0726648Y2 (ja) 1988-03-30 1988-03-30 変位測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988041112U JPH0726648Y2 (ja) 1988-03-30 1988-03-30 変位測定装置

Publications (2)

Publication Number Publication Date
JPH01144810U true JPH01144810U (OSRAM) 1989-10-04
JPH0726648Y2 JPH0726648Y2 (ja) 1995-06-14

Family

ID=31267563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988041112U Expired - Lifetime JPH0726648Y2 (ja) 1988-03-30 1988-03-30 変位測定装置

Country Status (1)

Country Link
JP (1) JPH0726648Y2 (OSRAM)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157512A (ja) * 1983-02-28 1984-09-06 Matsushita Electric Works Ltd 光学式位置検出装置
JPS59180614U (ja) * 1983-05-20 1984-12-03 キヤノン株式会社 自動焦点検出装置
JPS6082208U (ja) * 1983-11-14 1985-06-07 大日本スクリーン製造株式会社 被測定面の位置測定装置
JPS63275912A (ja) * 1987-05-08 1988-11-14 Nikon Corp 表面変位検出装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157512A (ja) * 1983-02-28 1984-09-06 Matsushita Electric Works Ltd 光学式位置検出装置
JPS59180614U (ja) * 1983-05-20 1984-12-03 キヤノン株式会社 自動焦点検出装置
JPS6082208U (ja) * 1983-11-14 1985-06-07 大日本スクリーン製造株式会社 被測定面の位置測定装置
JPS63275912A (ja) * 1987-05-08 1988-11-14 Nikon Corp 表面変位検出装置

Also Published As

Publication number Publication date
JPH0726648Y2 (ja) 1995-06-14

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