JPH01140143A - パターン形成材料 - Google Patents

パターン形成材料

Info

Publication number
JPH01140143A
JPH01140143A JP62299313A JP29931387A JPH01140143A JP H01140143 A JPH01140143 A JP H01140143A JP 62299313 A JP62299313 A JP 62299313A JP 29931387 A JP29931387 A JP 29931387A JP H01140143 A JPH01140143 A JP H01140143A
Authority
JP
Japan
Prior art keywords
group
forming material
pattern forming
light
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62299313A
Other languages
English (en)
Japanese (ja)
Other versions
JPH057706B2 (cs
Inventor
Masataka Endo
政孝 遠藤
Masaru Sasako
勝 笹子
Kazufumi Ogawa
一文 小川
Masazumi Hasegawa
正積 長谷川
Masaaki Toyuka
正明 戸床
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Panasonic Holdings Corp
Original Assignee
Tosoh Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp, Matsushita Electric Industrial Co Ltd filed Critical Tosoh Corp
Priority to JP62299313A priority Critical patent/JPH01140143A/ja
Publication of JPH01140143A publication Critical patent/JPH01140143A/ja
Publication of JPH057706B2 publication Critical patent/JPH057706B2/ja
Granted legal-status Critical Current

Links

JP62299313A 1987-11-27 1987-11-27 パターン形成材料 Granted JPH01140143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62299313A JPH01140143A (ja) 1987-11-27 1987-11-27 パターン形成材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62299313A JPH01140143A (ja) 1987-11-27 1987-11-27 パターン形成材料

Publications (2)

Publication Number Publication Date
JPH01140143A true JPH01140143A (ja) 1989-06-01
JPH057706B2 JPH057706B2 (cs) 1993-01-29

Family

ID=17870920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62299313A Granted JPH01140143A (ja) 1987-11-27 1987-11-27 パターン形成材料

Country Status (1)

Country Link
JP (1) JPH01140143A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03223857A (ja) * 1990-01-30 1991-10-02 Matsushita Electric Ind Co Ltd パターン形成方法
KR100558190B1 (ko) * 1998-03-20 2006-03-10 후지 샤신 필름 가부시기가이샤 원자외선 노광용 포지티브 포토레지스트 조성물

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03223857A (ja) * 1990-01-30 1991-10-02 Matsushita Electric Ind Co Ltd パターン形成方法
KR100558190B1 (ko) * 1998-03-20 2006-03-10 후지 샤신 필름 가부시기가이샤 원자외선 노광용 포지티브 포토레지스트 조성물

Also Published As

Publication number Publication date
JPH057706B2 (cs) 1993-01-29

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