JPH01137529U - - Google Patents
Info
- Publication number
- JPH01137529U JPH01137529U JP3331088U JP3331088U JPH01137529U JP H01137529 U JPH01137529 U JP H01137529U JP 3331088 U JP3331088 U JP 3331088U JP 3331088 U JP3331088 U JP 3331088U JP H01137529 U JPH01137529 U JP H01137529U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- wafers
- plasma
- remove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004380 ashing Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 9
- 238000010849 ion bombardment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3331088U JPH01137529U (enrdf_load_stackoverflow) | 1988-03-14 | 1988-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3331088U JPH01137529U (enrdf_load_stackoverflow) | 1988-03-14 | 1988-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137529U true JPH01137529U (enrdf_load_stackoverflow) | 1989-09-20 |
Family
ID=31259964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3331088U Pending JPH01137529U (enrdf_load_stackoverflow) | 1988-03-14 | 1988-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137529U (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59161825A (ja) * | 1983-03-07 | 1984-09-12 | Mitsubishi Electric Corp | 半導体素子の製造方法 |
| JPS6117730B2 (enrdf_load_stackoverflow) * | 1975-12-15 | 1986-05-09 | Ricoh Kk |
-
1988
- 1988-03-14 JP JP3331088U patent/JPH01137529U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6117730B2 (enrdf_load_stackoverflow) * | 1975-12-15 | 1986-05-09 | Ricoh Kk | |
| JPS59161825A (ja) * | 1983-03-07 | 1984-09-12 | Mitsubishi Electric Corp | 半導体素子の製造方法 |
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