JPH01137404U - - Google Patents

Info

Publication number
JPH01137404U
JPH01137404U JP3466088U JP3466088U JPH01137404U JP H01137404 U JPH01137404 U JP H01137404U JP 3466088 U JP3466088 U JP 3466088U JP 3466088 U JP3466088 U JP 3466088U JP H01137404 U JPH01137404 U JP H01137404U
Authority
JP
Japan
Prior art keywords
reference plate
cross
exposing
developing
covering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3466088U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3466088U priority Critical patent/JPH01137404U/ja
Publication of JPH01137404U publication Critical patent/JPH01137404U/ja
Pending legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

図は校正基準板を拡大して示すものであり、第
1図は本考案の基準板の製造工程の第1段階を示
す説明図、第2図は製造工程第2段階の露光状態
を示す説明図、第3図は現像処理工程後の状態を
示す説明図、第4図は製造完了後の本案による基
準板の構成を示す断面説明図、第5図は従来の基
準板の断面形状説明図である。 1…基板、2…乳剤コーテイング層、4…ガラ
スマスク、5…不透明な平行線パターン、6…金
属硬化膜。
The figures show an enlarged view of the calibration reference plate. Figure 1 is an explanatory diagram showing the first stage of the manufacturing process of the reference plate of the present invention, and Figure 2 is an explanatory diagram showing the exposure state in the second stage of the manufacturing process. Fig. 3 is an explanatory view showing the state after the development process, Fig. 4 is an explanatory cross-sectional view showing the configuration of the reference plate according to the present invention after manufacturing is completed, and Fig. 5 is an explanatory view of the cross-sectional shape of the conventional reference plate. It is. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Emulsion coating layer, 4... Glass mask, 5... Opaque parallel line pattern, 6... Metal cured film.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板素材上にコーテイングされた乳剤層を露光
、現像処理により断面においてsin曲線状とし
て形成し、かつその表面を金属による硬化膜をも
つて覆つてなる表面粗さ測定機の校正基準板。
A calibration reference plate for a surface roughness measuring machine, which is formed by exposing and developing an emulsion layer coated on a substrate material to form a sinusoidal curve in cross section, and covering the surface with a hardened metal film.
JP3466088U 1988-03-16 1988-03-16 Pending JPH01137404U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3466088U JPH01137404U (en) 1988-03-16 1988-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3466088U JPH01137404U (en) 1988-03-16 1988-03-16

Publications (1)

Publication Number Publication Date
JPH01137404U true JPH01137404U (en) 1989-09-20

Family

ID=31261358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3466088U Pending JPH01137404U (en) 1988-03-16 1988-03-16

Country Status (1)

Country Link
JP (1) JPH01137404U (en)

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