JPH01136913U - - Google Patents
Info
- Publication number
- JPH01136913U JPH01136913U JP3232688U JP3232688U JPH01136913U JP H01136913 U JPH01136913 U JP H01136913U JP 3232688 U JP3232688 U JP 3232688U JP 3232688 U JP3232688 U JP 3232688U JP H01136913 U JPH01136913 U JP H01136913U
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- reference mirror
- optical path
- predetermined position
- tilting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Microscoopes, Condenser (AREA)
- Lenses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988032326U JP2520950Y2 (ja) | 1988-03-11 | 1988-03-11 | 二光束干渉用対物レンズ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988032326U JP2520950Y2 (ja) | 1988-03-11 | 1988-03-11 | 二光束干渉用対物レンズ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01136913U true JPH01136913U (zh) | 1989-09-19 |
| JP2520950Y2 JP2520950Y2 (ja) | 1996-12-18 |
Family
ID=31258750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988032326U Expired - Lifetime JP2520950Y2 (ja) | 1988-03-11 | 1988-03-11 | 二光束干渉用対物レンズ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2520950Y2 (zh) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000193891A (ja) * | 1998-12-25 | 2000-07-14 | Mitsutoyo Corp | 二光束干渉対物レンズ装置 |
| JP2005156417A (ja) * | 2003-11-27 | 2005-06-16 | Mitsutoyo Corp | 光干渉ユニット、光干渉対物レンズ装置および測定装置 |
| JP2018155836A (ja) * | 2017-03-16 | 2018-10-04 | 株式会社ミツトヨ | 光学装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5574226B2 (ja) * | 2010-03-23 | 2014-08-20 | 株式会社ニコン | 干渉対物レンズ及びこれを有する顕微鏡装置 |
| JP6461609B2 (ja) | 2015-01-05 | 2019-01-30 | 株式会社ミツトヨ | 干渉対物レンズ、および光干渉測定装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533807U (zh) * | 1976-06-29 | 1978-01-13 | ||
| JPS61149803A (ja) * | 1984-12-24 | 1986-07-08 | Matsushita Electric Ind Co Ltd | 干渉測定装置 |
-
1988
- 1988-03-11 JP JP1988032326U patent/JP2520950Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533807U (zh) * | 1976-06-29 | 1978-01-13 | ||
| JPS61149803A (ja) * | 1984-12-24 | 1986-07-08 | Matsushita Electric Ind Co Ltd | 干渉測定装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000193891A (ja) * | 1998-12-25 | 2000-07-14 | Mitsutoyo Corp | 二光束干渉対物レンズ装置 |
| JP2005156417A (ja) * | 2003-11-27 | 2005-06-16 | Mitsutoyo Corp | 光干渉ユニット、光干渉対物レンズ装置および測定装置 |
| JP2018155836A (ja) * | 2017-03-16 | 2018-10-04 | 株式会社ミツトヨ | 光学装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2520950Y2 (ja) | 1996-12-18 |