JPH01132143A - 半導体記憶装置の製造方法 - Google Patents

半導体記憶装置の製造方法

Info

Publication number
JPH01132143A
JPH01132143A JP63218325A JP21832588A JPH01132143A JP H01132143 A JPH01132143 A JP H01132143A JP 63218325 A JP63218325 A JP 63218325A JP 21832588 A JP21832588 A JP 21832588A JP H01132143 A JPH01132143 A JP H01132143A
Authority
JP
Japan
Prior art keywords
resin
film
semiconductor substrate
transistor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63218325A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544189B2 (enrdf_load_stackoverflow
Inventor
Tatsumi Shirasu
白須　辰美
Yasunobu Osa
小佐　保信
Tokio Kato
加藤　登季男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP63218325A priority Critical patent/JPH01132143A/ja
Publication of JPH01132143A publication Critical patent/JPH01132143A/ja
Publication of JPH0544189B2 publication Critical patent/JPH0544189B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Semiconductor Memories (AREA)
JP63218325A 1988-09-02 1988-09-02 半導体記憶装置の製造方法 Granted JPH01132143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63218325A JPH01132143A (ja) 1988-09-02 1988-09-02 半導体記憶装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63218325A JPH01132143A (ja) 1988-09-02 1988-09-02 半導体記憶装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3548079A Division JPS55128851A (en) 1979-03-28 1979-03-28 Semiconductor memory device

Publications (2)

Publication Number Publication Date
JPH01132143A true JPH01132143A (ja) 1989-05-24
JPH0544189B2 JPH0544189B2 (enrdf_load_stackoverflow) 1993-07-05

Family

ID=16718081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63218325A Granted JPH01132143A (ja) 1988-09-02 1988-09-02 半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JPH01132143A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166776A (ja) * 1974-12-06 1976-06-09 Hitachi Ltd Koshuhahandotaisochi oyobi sonoseizohoho
JPS5226989A (en) * 1975-08-22 1977-02-28 Chiyoda Shigyo Kk Paper bag trnsferring method for heavy packaging paper sewing machine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5166776A (ja) * 1974-12-06 1976-06-09 Hitachi Ltd Koshuhahandotaisochi oyobi sonoseizohoho
JPS5226989A (en) * 1975-08-22 1977-02-28 Chiyoda Shigyo Kk Paper bag trnsferring method for heavy packaging paper sewing machine

Also Published As

Publication number Publication date
JPH0544189B2 (enrdf_load_stackoverflow) 1993-07-05

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