JPH01129275U - - Google Patents
Info
- Publication number
- JPH01129275U JPH01129275U JP2268488U JP2268488U JPH01129275U JP H01129275 U JPH01129275 U JP H01129275U JP 2268488 U JP2268488 U JP 2268488U JP 2268488 U JP2268488 U JP 2268488U JP H01129275 U JPH01129275 U JP H01129275U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- recess
- semiconductor substrate
- fixing
- holding plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000003575 carbonaceous material Substances 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 239000002296 pyrolytic carbon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図ａは本考案による基板固定治具の実施例
１を示す正面図、ｂは同平面図、ｃは側面図、第
２図は本考案の実施例２を示す正面図である。 １……保持板、２……半導体基板、３……凹部
、４……つめ、５……ガイド部、６……クリツプ
、７……ねじ。
１を示す正面図、ｂは同平面図、ｃは側面図、第
２図は本考案の実施例２を示す正面図である。 １……保持板、２……半導体基板、３……凹部
、４……つめ、５……ガイド部、６……クリツプ
、７……ねじ。
Claims (1)
- 半導体基板を垂直姿勢に保持する保持板の中央
に、該半導体基板固定用の凹部を設け、その口縁
の基板出入口に、パイロリテイツク・カーボンも
しくはシリコン・カーバイド薄膜を被着した炭素
材料製の基板脱落防止クリツプを着脱可能に装備
したことを特徴とする気相成長用基板固定治具。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2268488U JPH01129275U (ja) | 1988-02-23 | 1988-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2268488U JPH01129275U (ja) | 1988-02-23 | 1988-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129275U true JPH01129275U (ja) | 1989-09-04 |
Family
ID=31241018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2268488U Pending JPH01129275U (ja) | 1988-02-23 | 1988-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129275U (ja) |
-
1988
- 1988-02-23 JP JP2268488U patent/JPH01129275U/ja active Pending