JPH01127379U - - Google Patents

Info

Publication number
JPH01127379U
JPH01127379U JP2351788U JP2351788U JPH01127379U JP H01127379 U JPH01127379 U JP H01127379U JP 2351788 U JP2351788 U JP 2351788U JP 2351788 U JP2351788 U JP 2351788U JP H01127379 U JPH01127379 U JP H01127379U
Authority
JP
Japan
Prior art keywords
cooling medium
linear motor
cooling
winding
conductive resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2351788U
Other languages
English (en)
Other versions
JPH0545102Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2351788U priority Critical patent/JPH0545102Y2/ja
Publication of JPH01127379U publication Critical patent/JPH01127379U/ja
Application granted granted Critical
Publication of JPH0545102Y2 publication Critical patent/JPH0545102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Motor Or Generator Cooling System (AREA)
  • Linear Motors (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例における要部の斜視
図、第２図は正断面図、第３図は電機子巻線の巻
き方を表わす側面図と正面図、第４図は冷却媒体
循環系統図、第５図は本考案の他の実施例の正断
面図、第６図は本考案の別の実施例の構成図、第
７図は従来の参考図である。 １……Ｕ相電機子巻線、２……Ｖ相電機子巻線
、３……Ｗ相電機子巻線、５……吸熱部、６……
閉回路、７……ポンプ、８……放熱器、９……リ
ニアモータ部、１０……良熱伝導樹脂、１１……
冷却媒体、１２……冷却媒体通路、１３……断熱
樹脂、１４……巻線ボビン、１５……割り面、１
６……冷却媒体供給口、１７……冷却媒体排出口
。

Claims (1)

  1. 【実用新案登録請求の範囲】 コアレスのギヤツプワインデイングリニアモー
    タにおいて、 電機子巻線固定用巻線ボビン内部に冷却媒体の
    通路を設け、 冷却媒体の通路部分はリニアモータ巻線ボビン
    と冷却媒体を接触させ、 その周辺は良熱伝導樹脂を充填して外側に断熱
    伝導樹脂により成形され、 冷却媒体を循環させる手段を具備している ことを特徴とするリニアモータの冷却機構。
JP2351788U 1988-02-24 1988-02-24 Expired - Lifetime JPH0545102Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2351788U JPH0545102Y2 (ja) 1988-02-24 1988-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2351788U JPH0545102Y2 (ja) 1988-02-24 1988-02-24

Publications (2)

Publication Number Publication Date
JPH01127379U true JPH01127379U (ja) 1989-08-31
JPH0545102Y2 JPH0545102Y2 (ja) 1993-11-17

Family

ID=31242571

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2351788U Expired - Lifetime JPH0545102Y2 (ja) 1988-02-24 1988-02-24

Country Status (1)

Country Link
JP (1) JPH0545102Y2 (ja)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10127035A (ja) * 1996-10-16 1998-05-15 Canon Inc リニアモータおよびこれを用いたステージ装置ならびに露光装置
JP2000114034A (ja) * 1998-10-05 2000-04-21 Nikon Corp 電磁アクチュエータ及びステージ装置
WO2003105323A1 (ja) * 2002-06-06 2003-12-18 株式会社安川電機 冷却機能付きボイスコイル形リニアモータ
WO2005057763A1 (ja) * 2003-12-09 2005-06-23 Toshiba Kikai Kabushiki Kaisha コアレス・リニアモータ
JP2005176465A (ja) * 2003-12-09 2005-06-30 Toshiba Mach Co Ltd リニアモータ
WO2006038563A1 (ja) * 2004-10-01 2006-04-13 Nikon Corporation リニアモータ、ステージ装置、及び露光装置
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
JP2014042423A (ja) * 2012-08-23 2014-03-06 Sanyo Denki Co Ltd リニアモータ
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9678332B2 (en) 2007-11-06 2017-06-13 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10127035A (ja) * 1996-10-16 1998-05-15 Canon Inc リニアモータおよびこれを用いたステージ装置ならびに露光装置
JP4623243B2 (ja) * 1998-10-05 2011-02-02 株式会社ニコン 電磁アクチュエータ及びステージ装置
JP2000114034A (ja) * 1998-10-05 2000-04-21 Nikon Corp 電磁アクチュエータ及びステージ装置
WO2003105323A1 (ja) * 2002-06-06 2003-12-18 株式会社安川電機 冷却機能付きボイスコイル形リニアモータ
US9885959B2 (en) 2003-04-09 2018-02-06 Nikon Corporation Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9760014B2 (en) 2003-10-28 2017-09-12 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US10281632B2 (en) 2003-11-20 2019-05-07 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
JP4721211B2 (ja) * 2003-12-09 2011-07-13 東芝機械株式会社 コアレス・リニアモータ
WO2005057763A1 (ja) * 2003-12-09 2005-06-23 Toshiba Kikai Kabushiki Kaisha コアレス・リニアモータ
JP2005176465A (ja) * 2003-12-09 2005-06-30 Toshiba Mach Co Ltd リニアモータ
US10234770B2 (en) 2004-02-06 2019-03-19 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10007194B2 (en) 2004-02-06 2018-06-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US20130271945A1 (en) 2004-02-06 2013-10-17 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10241417B2 (en) 2004-02-06 2019-03-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
US10459350B2 (en) 2004-10-01 2019-10-29 Nikon Corporation Linear motor, stage apparatus, and exposure apparatus
US9804508B2 (en) 2004-10-01 2017-10-31 Nikon Corporation Linear motor, stage apparatus, and exposure apparatus
WO2006038563A1 (ja) * 2004-10-01 2006-04-13 Nikon Corporation リニアモータ、ステージ装置、及び露光装置
JP4765937B2 (ja) * 2004-10-01 2011-09-07 株式会社ニコン リニアモータ、ステージ装置、及び露光装置
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US10101666B2 (en) 2007-10-12 2018-10-16 Nikon Corporation Illumination optical apparatus, exposure apparatus, and device manufacturing method
US9857599B2 (en) 2007-10-24 2018-01-02 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9678332B2 (en) 2007-11-06 2017-06-13 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
JP2014042423A (ja) * 2012-08-23 2014-03-06 Sanyo Denki Co Ltd リニアモータ

Also Published As

Publication number Publication date
JPH0545102Y2 (ja) 1993-11-17

Similar Documents

Publication Publication Date Title
JPH01127379U (ja)
JPS6447560U (ja)
JPH03101164U (ja)
JPH02133160U (ja)
JPS61145283U (ja)
JPH0476157U (ja)
JPS5827895U (ja) 誘導加熱装置
JPS6041464Y2 (ja) 空気調和装置
JPS6086890U (ja) 断熱箱体
JPH0421163U (ja)
JPS6370266U (ja)
JPS6226885U (ja)
JPS6180391U (ja)
JPH0268679U (ja)
JPH03120208U (ja)
JPS6082125U (ja) 熱交換ユニツト
JPH01171559U (ja)
JPH0175748U (ja)
JPS6425875U (ja)
JPH02142961U (ja)
JPS6025370U (ja) 整流子の冷却装置
JPS59184078U (ja) 冷蔵庫
JPH03127469U (ja)
JPS63153755U (ja)
JPH0321968U (ja)