JPH01125561U - - Google Patents

Info

Publication number

JPH01125561U

JPH01125561U JP1988020455U JP2045588U JPH01125561U JP H01125561 U JPH01125561 U JP H01125561U JP 1988020455 U JP1988020455 U JP 1988020455U JP 2045588 U JP2045588 U JP 2045588U JP H01125561 U JPH01125561 U JP H01125561U

Authority

JP

Japan

Prior art keywords

substrate

solid

transfer electrode

silicon nitride

receiving window

Prior art date

1988-02-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

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• 238000003384 imaging method Methods 0.000 claims description 5
• 238000006243 chemical reaction Methods 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims 5
• 229910052581 Si3N4 Inorganic materials 0.000 claims 2
• 230000001681 protective effect Effects 0.000 claims 2
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
• 229920005591 polysilicon Polymers 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000012528 membrane Substances 0.000 description 1
• 238000000926 separation method Methods 0.000 description 1