JPH01123713A - Molding die - Google Patents

Molding die

Info

Publication number
JPH01123713A
JPH01123713A JP28256087A JP28256087A JPH01123713A JP H01123713 A JPH01123713 A JP H01123713A JP 28256087 A JP28256087 A JP 28256087A JP 28256087 A JP28256087 A JP 28256087A JP H01123713 A JPH01123713 A JP H01123713A
Authority
JP
Japan
Prior art keywords
resin
runner
cavity
cavities
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28256087A
Other languages
Japanese (ja)
Inventor
Yutaka Koyama
裕 小山
Sumio Ueno
上野 澄男
Shinichi Ogata
緒方 伸一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP28256087A priority Critical patent/JPH01123713A/en
Publication of JPH01123713A publication Critical patent/JPH01123713A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/27Sprue channels ; Runner channels or runner nozzles
    • B29C45/2701Details not specific to hot or cold runner channels
    • B29C45/2703Means for controlling the runner flow, e.g. runner switches, adjustable runners or gates

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To prevent failure such as disconnection of gold wire or the like from occurring by uniformizing the quality of resin encapsulation of each semiconductor chip by a method wherein a shutter is openably and closably provided at each one of gate parts connecting to a plurality of cavities of a molding die. CONSTITUTION:A large number of cavities 3 are provided in the neighborhood of a runner 1 or a passage of resin 4 and connected through gate parts 2, which are normal to the runner 1, to the runner 1. At the runner 1 side end part of each gate part 2, a slit 5a, in which a shutter 5 is provided protrusively and retractably, is bored. The flows of the resin 4 running through the gate parts 2 are controlled by opening and closing the gate parts with the shutters 5 by means of an opening and closing mechanism. At resin encapsulation, when the whole runner 1 is filled with the resin 4 so far to its tip, the respective shutters 5 are simultaneously opened so as to release the gate parts 2. As a result, the resin 4 is poured simultaneously in the respective cavities 3. Accordingly, the resin is poured in the cavities 3 at the same speed at the same time.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、主として半導体チップを樹脂封止する工程に
おいて用いられるモールド金型に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a mold used mainly in the process of resin-sealing a semiconductor chip.

〈従来の技術〉 従来のモールド金型を第6図、第7図に基づいて説明す
る。第6図は従来例の斜視図、第7図は平面図である。
<Prior Art> A conventional mold will be explained based on FIGS. 6 and 7. FIG. 6 is a perspective view of the conventional example, and FIG. 7 is a plan view.

これらの図面は金型の下型を示し、符号20はランナ、
21はゲート部、22はキャビティである。キャビティ
22は、樹脂25の通路であるランナ20の周囲に設け
られており、ランナ20と直交するゲート部21を介し
てランナ20と連通している。
These drawings show the lower mold of the mold, and the reference numeral 20 is a runner;
21 is a gate portion, and 22 is a cavity. The cavity 22 is provided around the runner 20, which is a passage for the resin 25, and communicates with the runner 20 via a gate portion 21 that is perpendicular to the runner 20.

半導体チップを樹脂封止するには、まず、各キャビティ
22内に、リードフレーム23に組み込まれた半導体チ
ップ24が載置される。そして、モールド金型の表面に
、この金型と対をなす上型(図示せず)が加圧状態で載
せられる。その後、ポット部(図示せず)から樹脂25
がランナ20内に流し込まれ、ゲート部21を通過しキ
ャビティ22内に充填して硬化し、キャビティ22内の
半導体チップ24を封止する。
To seal the semiconductor chip with resin, first, the semiconductor chip 24 assembled in the lead frame 23 is placed in each cavity 22 . Then, an upper mold (not shown) that is paired with this mold is placed under pressure on the surface of the mold. After that, the resin 25 is removed from the pot part (not shown).
is poured into the runner 20, passes through the gate portion 21, fills the cavity 22, and hardens, thereby sealing the semiconductor chip 24 within the cavity 22.

〈発明が解決しようとする問題点〉 このようなモールド金型を用いた半導体チップ24の樹
脂封止工程においては、樹脂封止の品質を高めるために
、各キャビティ22への樹脂25注大の時間差をなくし
、しかも、その注入を等速にすることが必要である。キ
ャビティ22毎に樹脂25の注入時期や注入速度に大き
なばらつきがあると、各キャビティ22での樹脂形成体
の品質が不均一になる。また、半導体チップ24のボン
ディングワイヤである金線に注入速度の大きな樹脂25
が作用すると、金線どうしの接触や断線を起こしてしま
う。
<Problems to be Solved by the Invention> In the resin sealing process of the semiconductor chip 24 using such a mold, a large amount of resin 25 is poured into each cavity 22 in order to improve the quality of resin sealing. It is necessary to eliminate the time difference and to make the injection uniform. If there are large variations in the injection timing and injection speed of the resin 25 for each cavity 22, the quality of the resin formed body in each cavity 22 will be non-uniform. In addition, the resin 25, which has a high injection speed, is added to the gold wire that is the bonding wire of the semiconductor chip 24.
If this occurs, the gold wires may come into contact with each other or break.

しかしながら、上記構成のモールド金型においては、第
7図に示すように、ランナ20に流れ込んだ樹脂25が
流入方向手前側(図中左側)のキャビティ22から先に
その中に流れ込んで内部を充填するから、各キャビティ
22への樹脂注入時期にかなりのばらつきが生じていた
。また、ランナ20全体が樹脂25によって満たされた
後も、ランナ20先端側(図中の右側)のキャビティ2
2には樹脂25が注入されるので、ランナ20が満杯と
なった後の樹脂25の注入は、−香臭のキャビティ22
に集中し、このキャビティ22の注入速度、注入圧力が
過大となるきらいがある。
However, in the mold having the above configuration, as shown in FIG. 7, the resin 25 that has flowed into the runner 20 first flows into the cavity 22 on the front side in the inflow direction (left side in the figure) and fills the inside. Therefore, there was considerable variation in the timing of resin injection into each cavity 22. Furthermore, even after the entire runner 20 is filled with the resin 25, the cavity 2 on the tip side of the runner 20 (on the right side in the figure)
Since the resin 25 is injected into the runner 20, the injection of the resin 25 after the runner 20 is full causes the -fragrance odor cavity 22 to be injected.
, and the injection speed and injection pressure of this cavity 22 tend to be excessive.

以上のような理由により、従来のモールド金型による成
形品では品質の均一性を欠いており、また、半導体チッ
プ24上の金線どうしが接触したり、断線したりして、
不良品が発生する恐れがあっ、た。
For the above reasons, products molded using conventional molds lack uniformity in quality, and the gold wires on the semiconductor chip 24 may come into contact with each other or break.
There was a risk of defective products being produced.

本発明は、上述の問題点に鑑みてなされたものであって
、半導体チップの樹脂封止の品質を均一化し、金線の断
線等の不良品の発生を防止することのできるモールド金
型を提供することを目的とする。
The present invention has been made in view of the above-mentioned problems, and provides a molding die that can uniformize the quality of resin encapsulation of semiconductor chips and prevent the occurrence of defective products such as broken gold wires. The purpose is to provide.

く問題点を解決するための手段〉 本発明は、上記の目的を達成するために、ランナに複数
のキャビティをゲート部を介して連通してなるモールド
金型において、前記ゲート部に、シャッターを開閉自在
に設けてモールド金型を構成した。
Means for Solving Problems> In order to achieve the above object, the present invention provides a mold in which a plurality of cavities are communicated with a runner through a gate part, and a shutter is provided in the gate part. The mold was configured so that it could be opened and closed freely.

く作用〉 上記構成によれば、ゲート部に設けたシャッターの開閉
によって、各キャビティへの樹脂注入時期、注入速度速
度が制御される。したがって、ランナへの樹脂の流入に
関連してシャッタを開閉することによって、樹脂を同時
にそして等速に各キャビティに注入することができる。
Effects> According to the above configuration, the timing and injection speed of resin injection into each cavity are controlled by opening and closing the shutter provided in the gate portion. Thus, by opening and closing the shutters in conjunction with the flow of resin into the runner, resin can be injected into each cavity simultaneously and at a uniform rate.

〈実施例〉 以下、本発明を図面に示す実施例に基づいて詳細に説明
する。第1図は本発明の一実施例を示す斜視図、第2図
と第3図とは平面図である。
<Example> Hereinafter, the present invention will be described in detail based on an example shown in the drawings. FIG. 1 is a perspective view showing an embodiment of the present invention, and FIGS. 2 and 3 are plan views.

これらの図は金型の下型を示し、符号lはランナ、2は
ゲート部、3はキャビティであり、樹脂4の通路である
ランナlの周囲に多数のキャビティ3が設けられ、ラン
ナ1と直交するゲート部2を介してランナ1と連通して
いる。ゲート部2のランナ1側端部には、スリット5a
が穿設され、このスリット5a内にシャッター5が突出
退入自在に設けられている。このシャッター5は、図示
しない開閉機構(例えば油圧機構やモータによる機構な
ど)によってゲート部2を開閉し、ゲート部2を通じた
樹脂4の流れを制御するようになっている。なお、この
シャッター5は、モールド金型本体と同材質、例えばJ
IS  5KD−11のような工具鋼からなっている。
These figures show the lower mold of the mold, where l is a runner, 2 is a gate part, and 3 is a cavity.A large number of cavities 3 are provided around the runner l, which is a passage for the resin 4, and the runner 1 and 3 are cavities. It communicates with the runner 1 via the orthogonal gate section 2 . A slit 5a is provided at the end of the gate portion 2 on the runner 1 side.
A shutter 5 is provided in the slit 5a so as to be able to protrude and retract. The shutter 5 opens and closes the gate section 2 by an opening/closing mechanism (for example, a hydraulic mechanism or a motor mechanism, etc.) not shown, and controls the flow of the resin 4 through the gate section 2. Note that this shutter 5 is made of the same material as the mold body, for example, J
Made of tool steel such as IS 5KD-11.

樹脂封止に当たっては、第2図に示すように、まず、各
キャビティ3にリードフレーム6に組み込まれた半導体
チップ7を載置する。そして、このモールド金型の表面
に、この金型と対をなす上型(図示せず)が加圧状態で
載せられるとともに、各シャッター5を閉じる。そのあ
と、ポット部(図示せず)から樹脂4をランナ1内に流
し込む。すると、各シャッター5がすべて閉じた状態で
あるために、ランナl内の樹脂4は、各キャビティ3に
流入せずにランナlの先端部まで充満する。ランナlが
その先端まで樹脂4によって充填されたところで、第3
図に示すように、各シャッター5を同時に開動作し、ゲ
ート部2を開放する。これによって各キャビティ3には
一斉に樹脂4が注入される。このとき、ランナl全体に
樹脂4が充填されているので、各キャビティ3内への樹
脂流入速度は同一になる。したがって、キャビティ3に
は、同時にそして等速に樹脂が注入される。
For resin sealing, as shown in FIG. 2, first, a semiconductor chip 7 assembled in a lead frame 6 is placed in each cavity 3. Then, an upper mold (not shown) that is paired with this mold is placed under pressure on the surface of this mold, and each shutter 5 is closed. Thereafter, resin 4 is poured into the runner 1 from a pot portion (not shown). Then, since all the shutters 5 are in a closed state, the resin 4 in the runner l does not flow into each cavity 3, but fills up to the tip of the runner l. When the runner l is filled with resin 4 up to its tip, the third
As shown in the figure, each shutter 5 is opened simultaneously to open the gate section 2. As a result, the resin 4 is injected into each cavity 3 all at once. At this time, since the entire runner 1 is filled with the resin 4, the resin flows into each cavity 3 at the same speed. Therefore, resin is injected into the cavity 3 at the same time and at a uniform rate.

なお上記実施例では、シャッター5をゲート部2のラン
ナl側に設けたが、これに限るわけではなく、第4図、
第5図に示すように、シャッター5をゲート部2のキャ
ビテイ3側端部に設けることも考えられる。このように
すると、キャビティ3に注入された樹脂4が硬化するま
でにもう−度シャッター5を閉動作して、硬化途中の樹
脂4に食い込ませ、キャビティ3とゲート部2どの境の
樹脂に深い切り欠きを形成することができる。この切り
欠きにより、樹脂4の硬化後に樹脂封止された半導体チ
ップ7とゲート部2の樹脂4とを切り離すとき、これら
を切断しやすくなるとともに、ゲート部2の樹脂4の一
部が半導体チップ6にパリとなって残留するのを防ぐこ
とができる。
In the above embodiment, the shutter 5 is provided on the runner l side of the gate section 2, but the invention is not limited to this.
As shown in FIG. 5, it is also conceivable to provide the shutter 5 at the end of the gate section 2 on the side of the cavity 3. By doing this, the shutter 5 is closed once more before the resin 4 injected into the cavity 3 hardens, so that it bites into the resin 4 that is in the middle of hardening, and the resin at the boundary between the cavity 3 and the gate part 2 is deeply penetrated. A notch can be formed. This cutout makes it easier to cut the resin-sealed semiconductor chip 7 and the resin 4 of the gate part 2 after the resin 4 has hardened, and also allows a part of the resin 4 of the gate part 2 to be removed from the semiconductor chip. 6. This can prevent the particles from becoming sticky and remaining.

〈発明の効果〉 以上のように、本発明によれば、ゲート部のシャッター
によって樹脂の注入時期や注入速度が制御されるので、
シャッタの開閉時期を適宜設定することによって、各キ
ャビティへの樹脂の注入を同時にそして、等速に行なう
ことができる。そのため、各キャビティにおける樹脂封
止の品質が均一化し、また、金線の接触等の不良品の発
生が防止される。
<Effects of the Invention> As described above, according to the present invention, the resin injection timing and injection speed are controlled by the shutter of the gate part.
By appropriately setting the opening and closing timing of the shutter, resin can be injected into each cavity simultaneously and at a uniform speed. Therefore, the quality of the resin sealing in each cavity is made uniform, and the occurrence of defects such as gold wire contact is prevented.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第3図は本発明の一実施例に係り、第1図
はその主要部を示す部分拡大斜視図、第2図、第3図は
その使用状態を示す平面図である。 第4図と第5図は他の実施例に係り、第4図は平面図、
第5図はその断面図である。第6図と第7図とは従来例
に係り、第6図はその主要部を示す部分拡大斜視図、第
7図はその使用状態を示す平面図である。 1・・・ランナ 2・・・ゲート部 3・・・キャビティ 4・・・樹脂 5・・・シャッター 7・・・半導体チップ
1 to 3 relate to one embodiment of the present invention, in which FIG. 1 is a partially enlarged perspective view showing the main parts thereof, and FIGS. 2 and 3 are plan views showing the state in which it is used. 4 and 5 relate to other embodiments, and FIG. 4 is a plan view;
FIG. 5 is a sectional view thereof. FIGS. 6 and 7 relate to a conventional example, with FIG. 6 being a partially enlarged perspective view showing the main parts thereof, and FIG. 7 being a plan view showing its usage state. 1...Runner 2...Gate section 3...Cavity 4...Resin 5...Shutter 7...Semiconductor chip

Claims (1)

【特許請求の範囲】[Claims] (1)ランナに複数のキャビティをゲート部を介して連
通してなるモールド金型において、 前記ゲート部に、シャッターを開閉自在に設けたことを
特徴とするモールド金型。
(1) A mold in which a plurality of cavities are communicated with a runner via a gate portion, wherein the gate portion is provided with a shutter that can be freely opened and closed.
JP28256087A 1987-11-09 1987-11-09 Molding die Pending JPH01123713A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28256087A JPH01123713A (en) 1987-11-09 1987-11-09 Molding die

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28256087A JPH01123713A (en) 1987-11-09 1987-11-09 Molding die

Publications (1)

Publication Number Publication Date
JPH01123713A true JPH01123713A (en) 1989-05-16

Family

ID=17654065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28256087A Pending JPH01123713A (en) 1987-11-09 1987-11-09 Molding die

Country Status (1)

Country Link
JP (1) JPH01123713A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06326145A (en) * 1993-05-14 1994-11-25 Nec Corp Metal mold for resin sealing
CN104802366A (en) * 2015-04-30 2015-07-29 木林森股份有限公司 Die casting system and application thereof
JP2016009660A (en) * 2014-06-26 2016-01-18 本田技研工業株式会社 Method for producing hot melt adhesive
US12007480B2 (en) 2019-10-02 2024-06-11 Cepton Technologies, Inc. Techniques for detecting cross-talk interferences in LiDAR imaging sensors with multiple light sources

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06326145A (en) * 1993-05-14 1994-11-25 Nec Corp Metal mold for resin sealing
JP2016009660A (en) * 2014-06-26 2016-01-18 本田技研工業株式会社 Method for producing hot melt adhesive
CN104802366A (en) * 2015-04-30 2015-07-29 木林森股份有限公司 Die casting system and application thereof
CN104802366B (en) * 2015-04-30 2017-03-22 木林森股份有限公司 Die casting system and application thereof
US12007480B2 (en) 2019-10-02 2024-06-11 Cepton Technologies, Inc. Techniques for detecting cross-talk interferences in LiDAR imaging sensors with multiple light sources

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