JPH01122548A - Gas discharge panel - Google Patents
Gas discharge panelInfo
- Publication number
- JPH01122548A JPH01122548A JP62280499A JP28049987A JPH01122548A JP H01122548 A JPH01122548 A JP H01122548A JP 62280499 A JP62280499 A JP 62280499A JP 28049987 A JP28049987 A JP 28049987A JP H01122548 A JPH01122548 A JP H01122548A
- Authority
- JP
- Japan
- Prior art keywords
- spacer
- electrodes
- dielectric layer
- electrode
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000011521 glass Substances 0.000 abstract description 6
- 238000002844 melting Methods 0.000 abstract description 3
- 238000005530 etching Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Gas-Filled Discharge Tubes (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
本発明はガス放電パネルの放電スポット寸法の均一化に
関し、
スペーサ近傍の放電スポット径を他の部分のスポット径
と同じ大きさになるように縮小し、表示品質を向上させ
ることを目的とし、
放電ガス空間を挟んで対向する二枚の基板に、互いに交
差する方向の電極群とそれを覆う誘電体層を有し、該基
板間の間隙を支えるスペーサを有するガス放電パネルに
おいて、
スペーサの近傍電極の幅を局部的に細く構成する。[Detailed Description of the Invention] [Summary] The present invention relates to making the discharge spot size of a gas discharge panel uniform. With the aim of improving display quality, a spacer is used to support the gap between the two substrates, which have a group of electrodes in directions that intersect with each other and a dielectric layer covering them, on two substrates facing each other with a discharge gas space in between. In a gas discharge panel having a gas discharge panel, the width of the electrode near the spacer is locally narrowed.
本発明はガス放電パネルの放電スポット寸法の均一化に
関する。The present invention relates to uniform discharge spot size in gas discharge panels.
本発明はガラス基板等の絶縁板上に複数の導電層からな
る電極を設け、その上を誘電体層で覆ってなるAC形ガ
ス放電パネルの製造上に使用される。The present invention is used to manufacture an AC type gas discharge panel in which electrodes made of a plurality of conductive layers are provided on an insulating plate such as a glass substrate, and the electrodes are covered with a dielectric layer.
ガス空間を形成する二枚の基板間を支えるスペーサの周
りは誘電体層の厚みが変わりやすく、したがって表示ス
ポット寸法が他の場所のスポット径に比して変わりやす
い。これを防(対策として使用される。The thickness of the dielectric layer around the spacer that supports between the two substrates forming the gas space tends to change, and therefore the display spot size tends to change more easily than the spot diameter elsewhere. To prevent this (used as a countermeasure).
本発明を適用する従来のガス放電パネル電極の一例を、
第3図に電極断面図、第4図に電極平面図で示す。An example of a conventional gas discharge panel electrode to which the present invention is applied is
FIG. 3 shows a cross-sectional view of the electrode, and FIG. 4 shows a plan view of the electrode.
第4図は電極5および6とスペーサ8のみを平面図で示
し、基板1.2および誘電体層3.4は省略しである。FIG. 4 shows only the electrodes 5 and 6 and the spacer 8 in a plan view, and the substrate 1.2 and dielectric layer 3.4 are omitted.
該ガス放電パネルの製法を説明すると、対向する基板1
および2の対向面側に平行電極5および6を、基板にス
パッタリング等で固着された電極材料の薄層からフォト
リソグラフィで電極パターンを形成する。または基板上
に電極材料を印刷で形成したのち焼成して電極とする。To explain the manufacturing method of the gas discharge panel, the opposing substrate 1
Parallel electrodes 5 and 6 are formed on the opposing surfaces of 2 and 2, and an electrode pattern is formed by photolithography from a thin layer of electrode material fixed to the substrate by sputtering or the like. Alternatively, an electrode material is formed on a substrate by printing and then fired to form an electrode.
その上を前記電極の厚さより遥かに厚い数10ミクロン
の低融点ガラスからなる誘電体層3あるいは4で覆い、
互いに電極が交差する方向に100ミクロンオーダの微
小間隔をガラス柱あるいはセラミック柱で支えて二枚の
電極基板を対峙せしめ、基板周囲をシール材で固め、あ
らかじめ作っておいたチップ管からネオン、アルゴン等
の放電ガスをこの放電空間Cに充填したものである。Covering it with a dielectric layer 3 or 4 made of low-melting glass, which is several tens of microns thicker than the electrode,
The two electrode substrates are supported by glass columns or ceramic columns at a minute interval on the order of 100 microns in the direction in which the electrodes intersect with each other, and the periphery of the substrates is sealed with a sealing material. The discharge space C is filled with a discharge gas such as the following.
このようにすると正常な製作工程では二枚の基板間のガ
ス空間が均一に保たれ、平準な大きさのスポットが表示
の際に得られ、情報表示に良い結果をもたらすはすであ
る。In this way, in a normal manufacturing process, the gas space between the two substrates will be kept uniform, and a spot of a uniform size will be obtained during display, resulting in good results for information display.
(発明が解決しようとする問題点〕
−F記のように均一に保ったガス放電空間であるが、製
作時の焼成温度の徽細な変動によって、該空間を支える
スペーサの周りの誘電体層3.4の厚さがスペーサから
離れた位置の厚さと比べて薄くなることがあった。特に
ポーラスな(微細孔の多い)セラミック柱や、表面張力
の大きいガラス柱などでは、誘電体層である低融点ガラ
ス材料がスペーサ材料の前記微細孔や表面一体に取り込
まれ、スペーサ周りの誘電体層厚さが局部的に減少する
。そのため放電スポット径がスペーサからより離れた位
置の放電スポットに比べ、大きくなってしまい、表示が
不均一となる。そこで本発明の目的はスペーサ近傍の放
電スポット径を他の部分のスポット径と同じ大きさにな
るように縮小し、表示品質を向上させることにある。(Problems to be solved by the invention) - Although the gas discharge space is kept uniform as shown in F, the dielectric layer around the spacer that supports the space due to slight fluctuations in the firing temperature during manufacturing. The thickness of 3.4 was sometimes thinner than the thickness at a position far from the spacer.Especially in porous (many micropores) ceramic pillars or glass pillars with high surface tension, the dielectric layer A certain low melting point glass material is incorporated into the micropores and surface of the spacer material, and the dielectric layer thickness around the spacer is locally reduced.As a result, the diameter of the discharge spot is smaller than that of the discharge spot located further away from the spacer. , and the display becomes uneven.Therefore, the purpose of the present invention is to reduce the discharge spot diameter near the spacer to the same size as the spot diameter in other parts and improve display quality. be.
C問題点を解決するための手段〕
そこで本発明ではスペーサ8の近傍の電極幅を局部的に
狭め、放電スポットが小さくなるようにしておく。Means for Solving Problem C] Therefore, in the present invention, the electrode width near the spacer 8 is locally narrowed so that the discharge spot becomes small.
放電電極間の誘電体層の厚さが薄くなると、放電空間の
電界が強くなり、可放電空間体積が膨大化する。それに
よって放電スポットが大きくなっていたのであるが、本
発明のように電極幅を狭くすると、再放電空間は小さく
なって、前記効果と相殺することができ、放電スポット
が小さく、正常な大きさとなる。When the thickness of the dielectric layer between the discharge electrodes becomes thinner, the electric field in the discharge space becomes stronger, and the volume of the dischargeable space becomes larger. As a result, the discharge spot became large, but if the electrode width is narrowed as in the present invention, the re-discharge space becomes smaller and this effect can be offset, and the discharge spot becomes smaller and has a normal size. Become.
さて第1図に本発明の実施パネルの電極平面図を示す。 Now, FIG. 1 shows a plan view of the electrodes of a panel implementing the present invention.
本図は前記したように、電極とスペーサのみを書き出し
てあり、基板および誘電体層は透明で見えない。As described above, this figure shows only the electrodes and spacers, and the substrate and dielectric layer are transparent and cannot be seen.
すなわちパネル断面図は第3図従来のパネル断面図と誘
電体層3.4の状態を除いて同しである。That is, the panel cross-sectional view is the same as the conventional panel cross-sectional view of FIG. 3 except for the state of the dielectric layer 3.4.
第1図では図示されていない基板2上に、平行に並ぶ電
極6が電極材料はスパッタリング等で付着させると共に
電極形状はエツチングで形成され、該電極6の上に誘電
体層4として低融点ガラスが数十ミクロン厚さに覆っで
ある。この誘電体層4の上でスペーサ8が電極6と立体
的に交わり、基板面全体に平均して分散配置されている
。該スペーサは支えるべき間隔が100ミクロンの位と
小さいので、断面が円または矩形のファイバ状の細線を
ミリメートルオーダに切断して使用することが多い。On a substrate 2 (not shown in FIG. 1), electrodes 6 arranged in parallel are formed by depositing the electrode material by sputtering or the like and forming the electrode shape by etching. It is covered with a thickness of several tens of microns. Spacers 8 three-dimensionally intersect with electrodes 6 on dielectric layer 4 and are distributed evenly over the entire substrate surface. Since the spacing between spacers to be supported is as small as 100 microns, thin fiber-like wires with a circular or rectangular cross section are often cut into millimeter-order pieces.
該スペーサ8の上に、前記電極6と対向して交差する方
向であって、かつスペーサ8の両側に電極5が位置する
ように、平行電極5を前記基板2と同様に誘電体N3で
覆ってなる基板1を合わせた後に、基板1および2の端
部周囲をガス封じの溶接を行い、放電ガスを充填する。On top of the spacer 8, parallel electrodes 5 are covered with a dielectric material N3 in the same manner as the substrate 2 so that the electrodes 5 are located on both sides of the spacer 8 in a direction that faces and crosses the electrodes 6. After the substrates 1 made up of two substrates are put together, gas-tight welding is performed around the edges of the substrates 1 and 2, and discharge gas is filled.
上記状態で本発明の電極は第1聞手面図に示す構造、す
なわちスペーサ8の近傍(図の場合スペーサの隣接電極
)のみの電極幅を約40%縮めて製作してあり、他方の
電極6の対向する部分の幅はそのままとしている。これ
は一方の基板1の電極幅狭隘化によって放電スポットの
縮小が十分であったからであり、もしスペーサ材料が微
少孔を有し、溶融ガラスに濡れ易いセラミックのような
、誘電体層吸引力が大きくて、より多ゴの誘電体層を引
き寄せ、隣接放電点の放電可能体積をもっと大きく増大
させるようなときは、第2図の他の電極構造を示す図の
ように、スペーサを囲んで対向する双方の電極5および
6のスペーサ近傍部を総て細めることによって解決でき
る。In the above state, the electrode of the present invention has the structure shown in the first listener side view, that is, the electrode width is reduced by about 40% only in the vicinity of the spacer 8 (in the case of the figure, the electrode adjacent to the spacer), and the other electrode The width of the opposing portions of 6 remains unchanged. This is because the discharge spot was sufficiently reduced by narrowing the electrode width of one substrate 1, and if the spacer material has micropores and is made of ceramic, which is easily wetted by molten glass, the attractive force of the dielectric layer When a larger and more multilayer dielectric layer is to be drawn together to further increase the dischargeable volume of adjacent discharge points, it is necessary to use a dielectric layer that surrounds a spacer and faces each other, as shown in Fig. 2, which shows another electrode structure. This problem can be solved by narrowing the entire area of both electrodes 5 and 6 near the spacer.
本発明者らの実験によると、本発明の目的に合う電極狭
隘化は、電極幅の1〜50%の減少で十分効果が認めら
れた。According to experiments conducted by the present inventors, it was found that a reduction in electrode width of 1 to 50% was sufficient to achieve the narrowing of the electrode to meet the purpose of the present invention.
本発明によると簡単な電極幅の制御によって、表示品質
に大きく響く放電スポット径の均一化が容易に達成出来
、デイスプレィの品質向上に大きな進歩をもたらした。According to the present invention, by simply controlling the electrode width, uniformity of the discharge spot diameter, which greatly affects display quality, can be easily achieved, resulting in great progress in improving the quality of displays.
このように本発明の効果はガス放電パネルを使った表示
装置が良く使われるようになった現在においては非常に
大きいと言える。As described above, it can be said that the effects of the present invention are extremely significant now that display devices using gas discharge panels have become widely used.
第1図は本発明の電極構造を示す平面図、第2図は本発
明の他の電極構造を示す平面図、第3図は従来パネルの
スペーサ部断面図、第4図は従来の電極構造を示す平面
図である。
図において、
1および2は基板、
3および4は誘電体層、
5および6は表示電極、
8はスペーサである。
本発明の隻オか捧盛上■平面図
第1図
ら
4渇し朗のイ也の噸茅桐講遭1示1平面m第2図Fig. 1 is a plan view showing an electrode structure of the present invention, Fig. 2 is a plan view showing another electrode structure of the invention, Fig. 3 is a sectional view of a spacer portion of a conventional panel, and Fig. 4 is a conventional electrode structure. FIG. In the figure, 1 and 2 are substrates, 3 and 4 are dielectric layers, 5 and 6 are display electrodes, and 8 is a spacer. ■ Plan view of the present invention - Plan view Figure 1 et al.
Claims (1)
)に、互いに交差する方向の電極群(5)、(6)とそ
れを覆う誘電体層(3)、(4)を有し、かつ該基板間
の間隙(C)を支えるスペーサ(8)を有するガス放電
パネルにおいて、 スペーサ(8)の近傍電極の幅を局部的に狭くしたこと
を特徴とするガス放電パネル。[Claims] Two substrates (1) and (2) facing each other with a discharge gas space in between.
), a spacer (8) having electrode groups (5), (6) in mutually intersecting directions and dielectric layers (3), (4) covering them, and supporting the gap (C) between the substrates. A gas discharge panel characterized in that the width of the electrode near the spacer (8) is locally narrowed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62280499A JPH01122548A (en) | 1987-11-05 | 1987-11-05 | Gas discharge panel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62280499A JPH01122548A (en) | 1987-11-05 | 1987-11-05 | Gas discharge panel |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01122548A true JPH01122548A (en) | 1989-05-15 |
Family
ID=17625939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62280499A Pending JPH01122548A (en) | 1987-11-05 | 1987-11-05 | Gas discharge panel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01122548A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007232195A (en) * | 2006-03-03 | 2007-09-13 | Nohmi Bosai Ltd | Timer valve |
-
1987
- 1987-11-05 JP JP62280499A patent/JPH01122548A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007232195A (en) * | 2006-03-03 | 2007-09-13 | Nohmi Bosai Ltd | Timer valve |
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