JPH0217896B2 - - Google Patents

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method for manufacturing an electrode substrate constituting a flat display panel used in various display devices, and in particular to a method for manufacturing an electrode substrate constituting a flat display panel that does not undergo deformation. The present invention relates to an improvement in a method for manufacturing an electrode substrate.

A flat gas discharge display panel, commonly known as a plasma display panel, is, for example,
As shown in FIG.
A plurality of electrodes 5, 6 whose inner surfaces are covered with dielectric layers 7, 8 and protective layers 9, 10 made of MgO.
A pair of electrode substrates 1 and 2 supporting the above are arranged opposite to each other with a predetermined gas discharge space 11 in between, and the periphery of the opposed electrode substrates 1 and 2 is hermetically sealed with low melting point glass or the like. After that, the gas discharge space 11
A device in which a discharge gas is sealed inside is well known.

Since the gas discharge characteristics of a display panel having such a configuration vary depending largely on the gap accuracy of the discharge space 11, it is extremely important to maintain the discharge gap uniformly over the entire surface of the panel. .

For this reason, a spacer or the like (not shown) is interposed at an appropriate position in the gap between the electrode substrates 1 and 2, that is, in the discharge space 11, to uniformly define the gap. However, in order to make the gap uniform, it is strongly desired that the pair of electrode substrates 1 and 2 basically forming the gas discharge space 11 be flattened.

[Conventional technology]

Conventionally, as shown in FIG. 4, an electrode substrate constituting this type of gas discharge display panel has a plurality of electrodes made of indium oxide (In ₂ O ₃ ) containing tin oxide (SnO ₂ ) on a glass substrate 3, for example. After forming the transparent electrode 5, a low melting point glass layer is formed in a predetermined area on the substrate 3 by screen printing or the like.

Thereafter, the glass substrate 3 on which the low melting point glass layer has been formed is placed on the surface plate 21 and subjected to melting heat treatment at a high temperature of about 560° C. to form the dielectric layer 7.

[Problem that the invention seeks to solve]

However, in the above manufacturing process, the glass substrate 3 on which the low melting point glass layer has been formed is melted and heat treated at high temperature to form the dielectric layer 7. A composite layer consisting of layer 7 is formed on the glass substrate 3.
A kind of bimetallic effect acts on the substrate 3, causing the entire substrate 3 to warp (the warp deformation is particularly noticeable in the longitudinal direction of the electrode), which is disadvantageous.

Therefore, even if a display panel is constructed by arranging a pair of electrode substrates deformed in this way to face each other with a spacer that defines a predetermined gas discharge gap interposed therebetween, the discharge gap of the display panel cannot be made uniform over the entire surface. However, there was a drawback that it was not possible to obtain a display panel with good discharge characteristics.

[Means for solving problems]

The above problem is solved by forming a plurality of electrodes on a substrate and then depositing a dielectric material on a predetermined area on the electrodes.
When heat-treating the dielectric material layer to form a dielectric layer, the substrate on which the dielectric material layer is formed,
This problem is solved by the method of manufacturing an electrode substrate for a display panel according to the present invention, in which heat treatment is performed while a load is applied to the edge of the substrate on a surface plate.

[Effect]

That is, after forming a dielectric material layer in a predetermined area on a substrate on which a plurality of electrodes are formed, the substrate is placed on a surface plate when the dielectric material layer is heat-treated to form the dielectric layer. Then, a load is applied on the edge of the substrate, mainly on both edge edges perpendicular to the length direction of the electrode where the warping deformation occurs significantly, and the heat treatment is performed in that state, thereby forming a flat electrode. It becomes possible to obtain a substrate.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a sectional view showing an embodiment of the method for manufacturing an electrode substrate for a display panel according to the present invention.

In the figure, 3 is a glass substrate, and after forming a plurality of thin linear transparent electrodes 5 made of, for example, indium oxide (In ₂ O ₃ ) containing tin oxide (SnO ₂ ) on the glass substrate 3, the substrate is A low melting point glass layer is formed in a predetermined area on the substrate 3 by a screen printing method or the like.

Next, the glass substrate 3 on which the low melting point glass layer is formed is placed on the surface plate 21, and on the edges of both edges perpendicular to the length direction of the transparent electrode 5 on the glass substrate 3, A flat weight jig 31 having a substantially U-shaped cross section and having a weight sufficient to overcome the warping deformation of the substrate 3 and having a pair of opposing inclined engagement surfaces 32 and 33 at both ends is used as shown in the figure. Place it like this.

Thereafter, the glass substrate 3 with the weight jig 31 placed thereon, together with the surface plate 21, is heat-treated at a high temperature of about 560° C. to melt the dielectric material layer,
A dielectric layer 7 is formed.

In this way, it becomes possible to easily obtain a flat electrode substrate for a display panel.

In addition, in the above embodiment, an example was explained in which a plate-shaped weight jig 31 having inclined engagement surfaces 32 and 33 was used, but the present invention is not limited to this example. As shown in FIG. 2, a weight jig 34 with a U-shaped cross section that can directly place a load on a limited surface on both edges of the glass substrate 3 on which a dielectric material layer is formed may be used. good.

However, since the area where the jig 34 is directly placed is largely limited by the formation area of the transparent electrode 5, a weight jig 31 of the type provided with the inclined engagement surfaces 32 and 33 shown in FIG. It is more advantageous to apply weight while in line contact with the edge of the substrate, as it can accommodate slight differences in substrate dimensions.

In this case, the depth of the recess on the lower surface of the weight jig to avoid contact between the jig 31 and the dielectric material layer is
It is preferable to make the thickness deeper than the entire thickness of the electrode-constituting substrate including.

Furthermore, in addition to disposing U-shaped weight jigs at both edges of the glass substrate 3 on which the dielectric material layer is formed as in the above embodiments, the other two sides of the substrate 3 are Weight jigs of the same shape may also be arranged at the edge portions in a manner that they are independently crossed so as to perform the heat treatment, and the desired effect of the present invention may not be obtained. can.

〔Effect of the invention〕

As is clear from the above description, the method for manufacturing an electrode substrate for a display panel according to the present invention has the advantage that a flat electrode substrate for a display panel can be easily obtained, and the manufacturing yield thereof can be improved. can be significantly improved.

Therefore, if a flat gas discharge display panel is constructed using the display panel electrode substrate formed by the manufacturing method of the present invention, the discharge gap can be made uniform over the entire panel surface, and the discharge A flat gas discharge display panel with good characteristics can be obtained.

Further, the present invention is extremely advantageous in application not only to electrode substrates for flat gas discharge display panels, but also to the manufacture of electrode substrates for various display panels that require flatness.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing one embodiment of the method for manufacturing an electrode substrate for a display panel according to the present invention, and FIG. 2 is a cross-sectional view showing another example of the method for manufacturing an electrode substrate for a display panel according to the present invention. , FIG. 3 is a schematic sectional view for explaining a flat gas discharge display panel, and FIG. 4 is a sectional view for explaining a conventional method of manufacturing an electrode substrate for a display panel. In the figure, 3 is a glass substrate, 5 is a plurality of transparent electrodes,
7 is a dielectric layer, 21 is a surface plate, 31 and 34 are weight jigs, and 32 and 33 are inclined engagement surfaces, respectively.

Claims (1)

[Claims] 1. After forming a plurality of electrodes on a substrate, a dielectric material is deposited on a predetermined area on the electrode, and when the dielectric material layer is heat-treated to form a dielectric layer, the dielectric material layer is A method for manufacturing an electrode substrate for a display panel, characterized in that the formed substrate is heat-treated on a surface plate while a load is applied to the edge of the substrate.