JPH01117252A - Ｘ線像観察装置 - Google Patents
Ｘ線像観察装置Info
- Publication number
- JPH01117252A JPH01117252A JP27486387A JP27486387A JPH01117252A JP H01117252 A JPH01117252 A JP H01117252A JP 27486387 A JP27486387 A JP 27486387A JP 27486387 A JP27486387 A JP 27486387A JP H01117252 A JPH01117252 A JP H01117252A
- Authority
- JP
- Japan
- Prior art keywords
- film
- image
- ray
- photoelectric conversion
- enlarged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 60
- 238000003384 imaging method Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 7
- 238000011161 development Methods 0.000 abstract description 3
- 239000012466 permeate Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 70
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000000523 sample Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 3
- 101100426741 Rattus norvegicus Tpsb2 gene Proteins 0.000 description 2
- 101100129591 Schizosaccharomyces pombe (strain 972 / ATCC 24843) mcp6 gene Proteins 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 241000283986 Lepus Species 0.000 description 1
- QHRPVRRJYMWFKB-UHFFFAOYSA-N [Sb].[Cs] Chemical compound [Sb].[Cs] QHRPVRRJYMWFKB-UHFFFAOYSA-N 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27486387A JPH01117252A (ja) | 1987-10-30 | 1987-10-30 | Ｘ線像観察装置 |
| US07/263,254 US4912737A (en) | 1987-10-30 | 1988-10-27 | X-ray image observing device |
| EP88310177A EP0314502B1 (en) | 1987-10-30 | 1988-10-28 | An X-ray image observing device |
| DE3851297T DE3851297T2 (de) | 1987-10-30 | 1988-10-28 | Röntgenstrahlbilder-Beobachtungsvorrichtung. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27486387A JPH01117252A (ja) | 1987-10-30 | 1987-10-30 | Ｘ線像観察装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01117252A true JPH01117252A (ja) | 1989-05-10 |
| JPH054778B2 JPH054778B2 (cg-RX-API-DMAC7.html) | 1993-01-20 |
Family
ID=17547620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27486387A Granted JPH01117252A (ja) | 1987-10-30 | 1987-10-30 | Ｘ線像観察装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01117252A (cg-RX-API-DMAC7.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04345796A (ja) * | 1991-05-24 | 1992-12-01 | Mitsubishi Heavy Ind Ltd | 電子ビーム検出装置 |
| US7039157B2 (en) | 2001-08-03 | 2006-05-02 | Kawasaki Jukogyo Kabushiki Kaisha | X-ray microscope apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6188200A (ja) * | 1984-10-05 | 1986-05-06 | 日本電子株式会社 | Ｘ線照射系 |
| JPS61292600A (ja) * | 1985-06-20 | 1986-12-23 | 日本電子株式会社 | Ｘ線光学系 |
-
1987
- 1987-10-30 JP JP27486387A patent/JPH01117252A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6188200A (ja) * | 1984-10-05 | 1986-05-06 | 日本電子株式会社 | Ｘ線照射系 |
| JPS61292600A (ja) * | 1985-06-20 | 1986-12-23 | 日本電子株式会社 | Ｘ線光学系 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04345796A (ja) * | 1991-05-24 | 1992-12-01 | Mitsubishi Heavy Ind Ltd | 電子ビーム検出装置 |
| US7039157B2 (en) | 2001-08-03 | 2006-05-02 | Kawasaki Jukogyo Kabushiki Kaisha | X-ray microscope apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH054778B2 (cg-RX-API-DMAC7.html) | 1993-01-20 |
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