JPH01115685A - Optical recording medium - Google Patents

Optical recording medium

Info

Publication number
JPH01115685A
JPH01115685A JP62274332A JP27433287A JPH01115685A JP H01115685 A JPH01115685 A JP H01115685A JP 62274332 A JP62274332 A JP 62274332A JP 27433287 A JP27433287 A JP 27433287A JP H01115685 A JPH01115685 A JP H01115685A
Authority
JP
Japan
Prior art keywords
recording
recording layer
recording medium
optical
optical recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62274332A
Other languages
Japanese (ja)
Other versions
JP2629746B2 (en
Inventor
Kusato Hirota
草人 廣田
Gentaro Obayashi
大林 元太郎
Toshiharu Nakanishi
中西 俊晴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP62274332A priority Critical patent/JP2629746B2/en
Publication of JPH01115685A publication Critical patent/JPH01115685A/en
Application granted granted Critical
Publication of JP2629746B2 publication Critical patent/JP2629746B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B7/2433Metals or elements of Groups 13, 14, 15 or 16 of the Periodic Table, e.g. B, Si, Ge, As, Sb, Bi, Se or Te
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24312Metals or metalloids group 14 elements (e.g. Si, Ge, Sn)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24314Metals or metalloids group 15 elements (e.g. Sb, Bi)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24316Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/2571Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 14 elements except carbon (Si, Ge, Sn, Pb)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25715Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)

Abstract

PURPOSE:To obtain an optical recording medium low in toxicity of a recording layer, requiring low power for recording and capable of high-speed deletion of a record, specifying the composition of the recording layer of an optical recording medium comprising the recording layer on a substrate and capable of recording, reproduction and deletion of information by irradiating the recording layer with light. CONSTITUTION:The composition of a recording layer is in the range of the formula (SbX Te100-X)100-Y(Te50Ge50)Y, in an optical recording medium comprising the recording layer on a substrate and capable of recording, reproduction and deletion of information by irradiating the recording layer with light. In the formula, X is a number satisfying 75>X>70, Y is a number satisfying 25>=Y>=1, the numbers X, 100-X, 50 and 50 inside the parentheses are atomic ratios of the constituents Sb, Te, Te and Ge inside the parentheses, and the numbers 100-Y and Y outside the parentheses are respectively the total atom% of Te and Sb [namely, the contents of the parenthetical expression (SbX Te100-X)] and the total atom% of the contents of the parenthetical expression (Te50Ge50). The optical recording medium requires low power for recording, is capable of high-speed deletion of a record, is high in thermal stability of recorded marks, and has excellent resistant to moist heat.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光によって情報を記録、再生および消去可能
な光ディスク、光カードなどの書き換え可能型光記録媒
体に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a rewritable optical recording medium, such as an optical disk or an optical card, on which information can be recorded, reproduced, and erased using light.

〔従来の技術〕[Conventional technology]

従来、非晶質状態と結晶状態あるいは、複数の結晶状態
間の光学的変化を利用して情報の記録、消去を行なう光
記録媒体としては、次のものがある。
Conventionally, there are the following optical recording media that record and erase information by utilizing optical changes between an amorphous state and a crystalline state, or a plurality of crystalline states.

非晶質状態と結晶状態の2つの状態間の可逆的な転移に
より記録、消去を行なうものとしては、Teを主成分と
するT e 81G e 158 b232 II膜を
記録層としたもの(特公昭47−26897> 、T 
e GeSn合金薄膜を記録層としたもの(特開昭61
−3324など)、’Teを主成分とするT e 80
S b l03e10膜を記録層としたもの(特開昭6
1−145737など)、5b2Seなどの組成の3b
−3e合金を記録層とするものく特開昭60−1554
9など)、In5b化合物半導体に少量のTeを添加し
記録層としたもの(SPIE Vol、 529 P5
1 ) 、Te−3b2元合金を記録層としたもの(8
6年応用物理学会学術講演集 29a−ZE−3,4)
 、T e低酸化物を主成分とする薄膜を記録層とする
もの(特開昭59−185048) 、また丁e−Ge
合金を主成分とするHe−0−3n−Ge−AU (特
開昭61−2595> 、丁e−0−In−Ge−Au
 (特開昭6l−2592)、Te−0−B i −G
e−Au (特開昭6l−2593)、Te−0−8b
−Ge−Au (特開昭61−2595 )を記録層と
したものがある。
As a device that performs recording and erasing by reversible transition between two states, an amorphous state and a crystalline state, there is a device whose recording layer is a Te 81G e 158 b232 II film whose main component is Te (Tokuko Showa). 47-26897>, T
e GeSn alloy thin film as a recording layer (Unexamined Japanese Patent Publication No. 1983-1999)
-3324, etc.), 'Te 80 with Te as the main component
Sb l03e10 film as recording layer (Unexamined Japanese Patent Publication No. 6
1-145737, etc.), 3b with compositions such as 5b2Se, etc.
-3e alloy as recording layer JP-A-60-1554
9), a recording layer made by adding a small amount of Te to an In5b compound semiconductor (SPIE Vol, 529 P5)
1), a recording layer made of Te-3b binary alloy (8
6th Year Academic Lectures of Japan Society of Applied Physics 29a-ZE-3, 4)
, one whose recording layer is a thin film mainly composed of Te-low oxide (Japanese Patent Application Laid-Open No. 59-185048), and Te-Ge
He-0-3n-Ge-AU (JP-A-61-2595>, which has alloy as main component)
(Unexamined Japanese Patent Publication No. 61-2592), Te-0-B i-G
e-Au (JP 61-2593), Te-0-8b
-Ge-Au (Japanese Unexamined Patent Publication No. 61-2595) is used as a recording layer.

また、可逆的に転移可能な異なる結晶状態間の光学的変
化により記録、消去を行なうものとしては、In−8b
などの2元合金を主成分とする薄膜を記録層としたもの
(特開昭61−227238 ”)がある。
Furthermore, In-8b is a device that performs recording and erasing by optical changes between different crystal states that can be reversibly transitioned.
There is a recording layer made of a thin film mainly composed of a binary alloy such as (JP-A-61-227238'').

[発明が解決しようとする問題点] しかしながら、上記従来技術の場合、次のような問題が
あった。
[Problems to be Solved by the Invention] However, in the case of the above-mentioned prior art, there were the following problems.

すなわち、Te81Ge15Sb232 薄膜を記録層
としたもの、および1’−e−Ge−3nを記録層とし
たものでは、記録の高速消去機能と半導体し一ザで記録
可能な実用的記録感度を両立させることができず実用性
に乏しかった。またT e 80S b103 e 1
0膜を記録層としたもの、および5b2Se等の組成の
5b−3e合金を記録層とするもの、In−3b化合物
半導体に10膜程度の少量のTeを添加し記録層とした
もの、Te−862元合金を記録層としたものなどでは
、耐酸化性の点では、比較的優れているが、以下の問題
があった。
That is, in the case where the recording layer is made of Te81Ge15Sb232 thin film and the case where 1'-e-Ge-3n is used as the recording layer, it is necessary to achieve both a high-speed erasing function and practical recording sensitivity that allows recording in one pass using a semiconductor. It was not practical because it could not be done. Also T e 80S b103 e 1
0 film as a recording layer, 5b-3e alloy of composition such as 5b2Se as a recording layer, In-3b compound semiconductor with a small amount of about 10 films added with Te, and Te- A recording layer made of an 862 element alloy is relatively excellent in terms of oxidation resistance, but has the following problems.

すなわち、Te80SblO3e10膜などのTe−3
b−se合金膜では、レーザービームによる記録消去に
20μsec程度の時間を要し、消去速度が遅く実用性
に欠りていた。一方、5b2Se等の組成の5b−3e
合金を記録層とするものは、記録、消去を繰り返すとノ
イズが急激に増加し記録信号の品位が低下する問題があ
った。ざらにIn−8b化合物半導体に少量のTeを添
加し記録層としたものでは、非晶化に要する記録レーザ
パワーが大きく、また、記録時の反射率変化が小さく実
用的でばなかった。さらに、この組成の記録層は、−旦
結晶化した後は非晶化することが著しく困難であるとい
う欠点がある。また、5b2Tea合金を記録層とする
場合には、結晶化温度が低く信頼性に乏しく、また消去
に要する時間が長く実用的でなかった。
That is, Te-3 such as Te80SblO3e10 film
With the b-se alloy film, it takes about 20 μsec to erase records with a laser beam, so the erasing speed is slow and impractical. On the other hand, 5b-3e with a composition such as 5b2Se
A recording layer made of an alloy has a problem in that when recording and erasing are repeated, noise increases rapidly and the quality of recorded signals deteriorates. A recording layer made by adding a small amount of Te to an In-8b compound semiconductor required a large recording laser power for amorphization, and the change in reflectance during recording was small, making it impractical. Furthermore, a recording layer having this composition has the disadvantage that it is extremely difficult to amorphize it once it has been crystallized. Furthermore, when a 5b2Tea alloy is used as a recording layer, the crystallization temperature is low and reliability is poor, and the time required for erasing is long, making it impractical.

丁e低酸化物を主成分とする薄膜を記録層とするもの(
特開昭59−185048> 、T e −G e合金
を主成分とするTe−0−8n−Ge−Au (特開昭
61−2595> 、Te−C)−I、n−GIAu 
(特開昭61−2592> 、Te−0−B i −G
e−Au(特開昭61−2593> 、Te−0−3b
、−Ge−AU(特開昭61−2595>を記録層とし
たものでは、記録の消去に要する時間が長いという欠点
があった。また、異なる結晶状態間の転移に伴なう光学
的性質の差異を利用して記録を行なう、In−8bなど
の2元合金を主成分とする記録層の場合には、記録層を
予めオーブンなどで結晶状態に初期化する必要があるこ
と、記録時の光ビーム走査速度が速い場合、記録状態が
悪くなることなどの実用上の欠点があった。
Those whose recording layer is a thin film mainly composed of low oxides (
JP-A-59-185048>, Te-0-8n-Ge-Au whose main component is Te-Ge alloy (JP-A-61-2595>, Te-C)-I, n-GIAu
(Unexamined Japanese Patent Publication No. 61-2592>, Te-0-B i-G
e-Au (JP-A-61-2593>, Te-0-3b
, -Ge-AU (Japanese Unexamined Patent Publication No. 61-2595) as a recording layer has the disadvantage that it takes a long time to erase records.In addition, optical properties due to transitions between different crystal states In the case of a recording layer mainly composed of a binary alloy such as In-8b, which performs recording by utilizing the difference between When the light beam scanning speed is high, there are practical drawbacks such as poor recording conditions.

本発明はかかる問題点を改善し、記録層の毒性が低く、
記録に要するパワーが低く、かつ記録の高速消去が可能
な、信頼性の高い光記録媒体を提供することを目的とす
る。
The present invention improves these problems and has a recording layer with low toxicity.
It is an object of the present invention to provide a highly reliable optical recording medium that requires low power for recording and can erase records at high speed.

〔問題点を解決するだめの手段〕[Failure to solve the problem]

かかる本発明の目的は、基板上に記録層を備え、該記録
層に光を照射することによって、情報の記録、再生およ
び消去が可能である光記録媒体において、上記記録層の
組成が、下記の一般式で表わされる範囲にあることを特
徴とする光記録媒体により達成される。
The object of the present invention is to provide an optical recording medium that includes a recording layer on a substrate and allows information to be recorded, reproduced, and erased by irradiating the recording layer with light, wherein the composition of the recording layer is as follows: This is achieved by an optical recording medium characterized by being within the range represented by the general formula.

(SbX Te100−X ) 100−Y  (Te
50Ge50) YここでXは、75>X>70゜ Yは、25≧Y≧1 。
(SbX Te100-X) 100-Y (Te
50Ge50) Y where X is 75>X>70°Y is 25≧Y≧1.

括弧内のX、100−X、50および50は、それぞれ
、括弧内の成分であるアンチモン(Sb)、テルル(T
e>、テルル(Te)およびゲルマニウム(Ge)の原
子数比を示す。また、括弧外の100−YとYは、それ
ぞれ、TeとSbの原子%の合計(すなわち、括弧内の
(SbXTe100−X ) )と、テルルとグムマニ
ウム、すなわち括弧内の(Te50Ge50)の合計の
原子%を示す。
X, 100-X, 50 and 50 in parentheses are the components in parentheses, antimony (Sb) and tellurium (T
e> indicates the atomic ratio of tellurium (Te) and germanium (Ge). In addition, 100-Y and Y outside the parentheses are the sum of the atomic percent of Te and Sb (that is, (SbXTe100-X) in the parentheses) and the sum of tellurium and gummanium, that is, (Te50Ge50) in the parentheses, respectively. Indicates atomic percent.

原子%は式で示した全組成の原子数を100原子%とし
たときの各々の括弧内の元素の原子数の合計の割合を%
で示したものである。
Atomic % is the percentage of the total number of atoms of each element in parentheses when the number of atoms in the total composition shown in the formula is 100 atomic %.
This is shown in .

上記組成範囲においては、おおよそ500nSec〜4
0nsecの光パルスによって、結晶状態の記録層に非
晶化マークを形成し情報を記録することができる。また
、−旦形成した前記の非晶化マークを、おおよそ100
0nSeC〜200nsecの光照射により結晶状態に
復帰させ、記録を消去することができる。
In the above composition range, approximately 500 nSec to 4
Information can be recorded by forming an amorphous mark on a crystalline recording layer using a 0 nsec optical pulse. In addition, the amorphous mark formed once is approximately 100
It is possible to return to the crystalline state by irradiating light for 0 nSeC to 200 nsec and erase the record.

本発明の記録層の主成分は一般式の括弧内に示した、S
bを主とする5b−Te合金である。この5b−Te合
金は、Sb、Sb2 Te3化合物に比べても融点が低
く、非晶化による記録が容易である。
The main component of the recording layer of the present invention is S shown in parentheses of the general formula.
It is a 5b-Te alloy mainly composed of b. This 5b-Te alloy has a lower melting point than Sb and Sb2Te3 compounds, and can be easily recorded by amorphization.

本発明の記録層に含まれるSbは、記録層の組成を示す
一般式において3bを示す×(原子%)が、75>X>
70の範囲であることが好ましい。
Sb contained in the recording layer of the present invention has a general formula representing the composition of the recording layer, where x (atomic %) representing 3b is 75>X>
A range of 70 is preferred.

Xか75原子%以上の場合には、記録層に不可逆的な相
分離が起き易く、記録再生時のノイズが著しく大きくな
ると共に、記録、消去の繰返しが困難になる。加えて、
記録信号のコントラストも低下し実用的ではない。一方
、Xが70原子%以下の場合には、記録の消去に要する
光の照射時間が長くなること、記録マークの熱安定性が
低くなることなどの欠点が生じる。
If X is 75 atomic % or more, irreversible phase separation is likely to occur in the recording layer, noise during recording and reproduction becomes significantly large, and it becomes difficult to repeat recording and erasing. In addition,
The contrast of the recorded signal also decreases, making it impractical. On the other hand, when X is 70 atomic % or less, disadvantages arise such as a longer light irradiation time required to erase records and a lower thermal stability of recorded marks.

また記録層に添加したT e 50G e 50の組成
の成分は、前記の5b−Te合金に25≧Y≧1の範囲
で添加することが好ましく、これにより、結晶化による
消去に要する時間を低減し、非晶化された記録マークの
高速消去を可能とする効果を有すると共に、記録マーク
消去後の消し残りを低減する効果がある。さらに記録層
の結晶化温度を高め、熱的安定性を改善する効果がある
。7− e 50G e 50成分を含まない場合には
、非晶化した記録マークの消去性が悪く、また再生信号
のコントラストも低いため、実用性がない。このT e
 50G e 50の原子%の合計Yが、25原子%よ
り多い場合には、記録の消去に要する光の照射時間が長
くなると共に、記録感度が低下し、比較的低出力の安価
な半導体レーザーを利用できないため実用的でない。
Furthermore, it is preferable that the composition of Te 50G e 50 added to the recording layer is added to the 5b-Te alloy in the range of 25≧Y≧1, thereby reducing the time required for erasing by crystallization. However, it has the effect of enabling high-speed erasure of amorphized recording marks, and also has the effect of reducing unerased residue after erasing the recording marks. Furthermore, it has the effect of increasing the crystallization temperature of the recording layer and improving its thermal stability. 7-e50G If the e50 component is not included, the erasability of amorphized recording marks is poor and the contrast of the reproduced signal is also low, so that it is not practical. This Te
If the total Y of 50G e 50 atomic% is more than 25 atomic%, the light irradiation time required to erase the record becomes longer and the recording sensitivity decreases, making it difficult to use an inexpensive semiconductor laser with relatively low output. It is not practical because it is not available.

また、Yが1原子%未満の場合には、消去速度の向上、
消し残り低減の効果が認められない。
In addition, when Y is less than 1 atomic %, the erasing speed can be improved,
No effect on reducing unerased areas was observed.

記録の高速消去が可能であり、記録再生時の信号強度が
大きく、良好なキャリア対ノイズ比の得られる良好な組
成は、Xが75〜70原子%であり、かつ、Yが10〜
25原子%である。
A good composition that enables high-speed erasing of records, has a high signal strength during recording and reproduction, and provides a good carrier-to-noise ratio is one in which X is 75 to 70 atomic % and Y is 10 to 10 atomic %.
It is 25 atom%.

本発明の記録層は、厚さ10〜11000nとして基板
上に形成されている。特に光ディスクとして高い感度を
得るためには、100m以上50nm以下とすることが
好ましく、さらに良好な記録再生信号のキャリア対ノイ
ズ比を得るためには、60nm〜150nmとすること
が好ましい。
The recording layer of the present invention is formed on a substrate with a thickness of 10 to 11000 nm. In particular, in order to obtain high sensitivity as an optical disc, it is preferably 100 m or more and 50 nm or less, and in order to obtain an even better carrier-to-noise ratio of recording and reproduction signals, it is preferably 60 nm to 150 nm.

また、本発明の記録層に隣接して、保護層を積層しても
よい。この場合には、記録時の記録層のに変形が起りに
くく、記録の消去、書き換えの回数を改善することがで
きる。前記の保護層としては、8102などの無機薄膜
、ポリイミド樹脂などの耐熱性高分子薄膜などが好まし
い。特に、Si。
Further, a protective layer may be laminated adjacent to the recording layer of the present invention. In this case, deformation of the recording layer during recording is less likely to occur, and the number of times recording can be erased and rewritten can be improved. As the protective layer, an inorganic thin film such as 8102, a heat-resistant polymer thin film such as polyimide resin, etc. are preferable. In particular, Si.

Ge、T i、Zr、丁eなどの金属酸化物薄膜が、耐
熱性が高いこと、記録層の酸化を防止できることから好
ましい。
Metal oxide thin films such as Ge, Ti, Zr, and Te are preferable because they have high heat resistance and can prevent oxidation of the recording layer.

本発明に用いられる基板としては、プラスチック、ガラ
ス、アルミニウムなど従来の記録媒体と同様なものでよ
い。収束光により基板側から記録することによってごみ
の影響を避ける目的からは、基板として透明材お1を用
いることが好ましい。上記のような材料としては、ポリ
エチレンテレフタレート、ポリメチルメタクリレート、
ポリカーボネイト、エポキシ樹脂、ポリオレフィン樹脂
、ガラスが好ましい。さらに好ましくは、複屈折が小さ
いこと、形成が容易であることから、ポリメチルメタク
リレート、ポリカーボネイト、エポキシ樹脂がよい。基
板の厚さは、特に限定するものではないが、10ミクロ
ン以上、5ミリメートル以下が実用的である。10ミク
ロン未満では基板側から収束光で記録する場合でもごみ
の影響を受けやすくなり、5ミリメートルを越える場合
には、収束光で記録する場合、対物レンズの開口数を大
きくすることかできなくなり、ピットサイズが大きくな
るため記録密度を上げることが内勤になる。
The substrate used in the present invention may be the same as conventional recording media, such as plastic, glass, or aluminum. For the purpose of avoiding the influence of dust by recording from the substrate side using convergent light, it is preferable to use a transparent material 1 as the substrate. The above materials include polyethylene terephthalate, polymethyl methacrylate,
Polycarbonate, epoxy resin, polyolefin resin, and glass are preferred. More preferably, polymethyl methacrylate, polycarbonate, and epoxy resin are used because they have low birefringence and are easy to form. Although the thickness of the substrate is not particularly limited, it is practically 10 microns or more and 5 mm or less. If it is less than 10 microns, it will be susceptible to dust even when recording with convergent light from the substrate side, and if it exceeds 5 mm, it will be impossible to do anything other than increasing the numerical aperture of the objective lens when recording with convergent light. As the pit size increases, increasing the recording density becomes an office job.

基板はフレキシブルなものであっても良いし、リジッド
なものであっても良い。フレキシブルな基板は、テープ
状、あるいはシート状で用いることができる。リジット
な基板は、カード状、あるいは円形ディスク状で用いる
ことができる。また必要に応じて、2枚の基板を用いて
エアーザンドイツチ構造、エアーインシデント構造、密
着張り合わせ構造などとすることもできる。
The substrate may be flexible or rigid. The flexible substrate can be used in the form of a tape or a sheet. The rigid substrate can be used in the form of a card or a circular disk. Further, if necessary, two substrates may be used to form an Air Sanderch structure, an Air Incident structure, a closely bonded structure, or the like.

本発明の光記録媒体の記録に用いる光としては、レーザ
光やスト目示光のごとき光であり、とりわけ、半導体レ
ーザを用いることは、光源が小型でかつ消費電力が小さ
く、変調が容易であることから好ましい。
The light used for recording on the optical recording medium of the present invention is light such as a laser beam or an indicator light. In particular, the use of a semiconductor laser is advantageous because the light source is small, has low power consumption, and can be easily modulated. It is preferable for certain reasons.

記録層および保護層は、スパッタ法、抵抗加熱蒸着法、
電子ビーム加熱蒸着法およびイオンブレーティング法な
どの真空中での薄膜形成法により形成することができる
。特に、スパッタ法は、欠陥の少ない記録層、保護層を
形成できることから好ましい。
The recording layer and the protective layer are formed by sputtering, resistance heating vapor deposition,
It can be formed by a thin film forming method in vacuum, such as an electron beam heating evaporation method or an ion blating method. In particular, the sputtering method is preferable because it allows formation of a recording layer and a protective layer with few defects.

記録は、結晶状態の記録層をレーザ光照射により非晶化
マークを形成して行なうことができる。
Recording can be performed by forming amorphous marks on the crystalline recording layer by irradiating the recording layer with laser light.

また、記録速度が遅くなる場合があるが、非晶質状態の
記録層にレーザ光を照射することによって、非晶質マー
クを結晶化するが、結晶化マークを非晶化して行なうこ
とができる。
Also, although the recording speed may be slower, amorphous marks can be crystallized by irradiating the recording layer in an amorphous state with a laser beam; .

結晶状態の記録層にレーザ光を照射し、非晶化マークを
形成して記録を行ない、消去の場合には、レーザ光照射
により非晶化マークを結晶化して行なう方法が、記録速
度を高くできること、記録層の変形が起り難いことから
好ましい。
A method in which recording is performed by irradiating a crystalline recording layer with a laser beam to form an amorphous mark, and in the case of erasing, crystallizing the amorphous mark by irradiating a laser beam increases the recording speed. This is preferable because it is possible to do this and deformation of the recording layer is less likely to occur.

結晶状態の記録層に非晶化マークを形成して記録を行な
う場合には、記録層を予め、レーザ光などの光照射、あ
るいは、温風などにより加熱し、結晶化しておくくこと
が好ましい。
When recording by forming amorphous marks on a crystalline recording layer, it is preferable to crystallize the recording layer in advance by irradiating it with light such as a laser beam or heating it with hot air. .

[実施例] 以下、本発明を実施例に基づいて説明する。[Example] Hereinafter, the present invention will be explained based on examples.

なお実施例中の特性は以下の方法で評価したものである
Note that the properties in the examples were evaluated by the following method.

記録層の組成 形成した記録層の組成はICP発光分析(セイコー電子
工業(株)製FTS−1100型)によって確認した。
Composition of Recording Layer The composition of the formed recording layer was confirmed by ICP emission spectrometry (model FTS-1100, manufactured by Seiko Electronic Industries, Ltd.).

また、記録再生信号のキャリア対ノイズ比は、スペクト
ル・アナライザを用いて測定した。
Further, the carrier-to-noise ratio of the recording/reproduction signal was measured using a spectrum analyzer.

実施例1 厚さ1.2mm、直径13cm、1.6μmピッチのス
パイラル状のグループ付きポリカーボネイト製基板を毎
分30回転させながら、スパッタ法により保護層と記録
層を形成した。
Example 1 A protective layer and a recording layer were formed by sputtering on a polycarbonate substrate with spiral groups having a thickness of 1.2 mm, a diameter of 13 cm, and a pitch of 1.6 μm while rotating at 30 revolutions per minute.

まず、基板上に1100nの5iOz保護層を形成し、
さらに真空度5X10−3↑orrの条件下で、l’−
e、3bおよびT e 50G e 50合金を水晶振
動子膜厚計でモニターしながら、同時スパッタして、(
Sb73Te27) 77 (Te50Ge50) 2
3の元素組成比の厚さ9Qnmの記録層を形成した。さ
らにこの記録層上に厚さ1100nのSiO2保護層を
形成し、本発明の光記録媒体を構成した。
First, a 5iOz protective layer of 1100n was formed on the substrate,
Furthermore, under the condition of vacuum degree 5X10-3↑orr, l'-
e, 3b and T e 50G e 50 alloys were simultaneously sputtered while monitoring them with a crystal resonator film thickness meter.
Sb73Te27) 77 (Te50Ge50) 2
A recording layer having an elemental composition ratio of 3 and a thickness of 9 Q nm was formed. Further, a SiO2 protective layer having a thickness of 1100 nm was formed on this recording layer to constitute an optical recording medium of the present invention.

この光記録媒体を線速度1.5m/秒で回転させ、基板
側から開口数0.5の対物レンズで集光した波長830
nmの半導体レーザ光を膜面強度3.0mWの条件で照
射しながらトラック上走査し記録層を結晶化した。この
とき結晶化によって記録層の反射率は、上昇した。その
後、同一の光学系を使用して、線速度4m/secの条
件で、周波数1.75MHz、デユーティ比50%に変
調した10mWの半導体レーザ光により記録を行なった
This optical recording medium was rotated at a linear velocity of 1.5 m/sec, and light was focused at a wavelength of 830 from the substrate side using an objective lens with a numerical aperture of 0.5.
The recording layer was crystallized by scanning the track while irradiating it with a nm semiconductor laser beam at a film surface intensity of 3.0 mW. At this time, the reflectance of the recording layer increased due to crystallization. Thereafter, using the same optical system, recording was performed with a 10 mW semiconductor laser beam modulated at a frequency of 1.75 MHz and a duty ratio of 50% at a linear velocity of 4 m/sec.

記録後、半導体レーザの強度を0.9mWとじとて、記
録部分を走査し、記録の再生を行なったところ記録マー
ク部分の反射率が低下し記録が行なわれていることが確
認できた。この再生信号のC/N比をバンド幅30kH
7の条件で、測定したところ、デジタル記録が可能な4
2dBの値が得られた。さらに記録部分を5.5mWの
半導体レーザ光により1回走査したところ、記録が消去
された。このときの消去率は一35dBであった。
After recording, the intensity of the semiconductor laser was set to 0.9 mW, the recorded area was scanned, and the recording was reproduced. As a result, the reflectance of the recorded mark area decreased, and it was confirmed that recording was being performed. The C/N ratio of this reproduced signal has a bandwidth of 30kHz.
When measured under the conditions of 7, it was found that digital recording is possible.
A value of 2 dB was obtained. Furthermore, when the recorded portion was scanned once with a 5.5 mW semiconductor laser beam, the recording was erased. The erasure rate at this time was -35 dB.

さらに、この消去部分に記録、消去を繰返し行なうこと
が可能であった。
Furthermore, it was possible to repeatedly perform recording and erasing on this erased portion.

また、記録部分の非晶質マークは、通風オーブン中でこ
の光記録媒体を70’Cに30分間加熱した後も安定に
存在した。
Further, the amorphous mark in the recorded portion remained stable even after the optical recording medium was heated to 70'C for 30 minutes in a ventilated oven.

実施例2 実施例1の記録層を(Sb731e27> 80 (T
e50Ge50 )20の組成の記録層とした他は、実
施例1と同様にして光記録媒体を製作した。この光記録
媒体の記録、再生を実施例1と同様の装置で行なったと
ころ、記録再生信号のC/N比は40dBであった。
Example 2 The recording layer of Example 1 was (Sb731e27>80 (T
An optical recording medium was produced in the same manner as in Example 1, except that the recording layer had a composition of e50Ge50)20. When this optical recording medium was recorded and reproduced using the same apparatus as in Example 1, the C/N ratio of the recorded and reproduced signal was 40 dB.

また、この記録部分を線速度3m/sec、レーザ光パ
ワー4.0mWの条件でトラックあたり1回の照射によ
り消去することが可能であった。消去後のC/N比は1
0dBであった。
Furthermore, it was possible to erase this recorded portion by irradiating the track once under the conditions of a linear velocity of 3 m/sec and a laser beam power of 4.0 mW. C/N ratio after erasing is 1
It was 0dB.

比較例1 実施例1において、記録層の組成を下記(イ)〜(ニ)
に変更した以外は実施例1と同様にして光記録媒体をそ
れぞれ作製した。
Comparative Example 1 In Example 1, the composition of the recording layer was as follows (a) to (d).
Optical recording media were produced in the same manner as in Example 1 except that the following was changed.

(イ)  (Sb50Te50) 98 (Te50G
e50) 2(口) (5b80Te20) 98 (
Te50Ge50) 2(ハ)  5b66Te34 (ニ) (Sb65Te35) 20 (Te50Ge
50) 80組成(イ)の光記録媒体の場合には、記録
後非晶化マークの消去に要する時間が長く、線速度1゜
5/S e Cで回転させた状態では、1回の半導体レ
ーザ光照射では、消去が困難であった。
(A) (Sb50Te50) 98 (Te50G
e50) 2 (mouth) (5b80Te20) 98 (
Te50Ge50) 2 (c) 5b66Te34 (d) (Sb65Te35) 20 (Te50Ge
50) In the case of the optical recording medium of 80 composition (a), it takes a long time to erase the amorphous mark after recording, and when the medium is rotated at a linear velocity of 1°5/S e C, one semiconductor It was difficult to erase with laser light irradiation.

(ロ)の組成の場合には、非晶化マーク形成に要する記
録パワーが大きく、10mWの半導体レーザ光では、記
録が困難であった。
In the case of the composition (b), the recording power required to form the amorphous mark was large, and recording was difficult with a 10 mW semiconductor laser beam.

(ハ)の組成の場合には、記録、消去は可能であるが、
実施例1と同様の記録条件でテストしたところ、C/N
比は36dBと低く実用的な水準に達しなかった。また
非晶質部分の結晶化温度も実施例1に比べ約10’C低
く熱安定性も劣っていた。
In the case of composition (c), recording and erasing is possible, but
When tested under the same recording conditions as in Example 1, the C/N
The ratio was as low as 36 dB, which did not reach a practical level. Furthermore, the crystallization temperature of the amorphous portion was about 10'C lower than that of Example 1, and the thermal stability was also poor.

(ニ)の組成の場合には、記録感度が低く10mw以下
の半導体レーザ光で記録が困難であった。
In the case of composition (d), the recording sensitivity was low and recording was difficult with a semiconductor laser beam of 10 mw or less.

実施例3 実施例1の光記録媒体を、室内通常環境に6力月放置し
たのち、実施例1と同様に記録、再生、消去を行なった
が、特に劣化は認められなかった。
Example 3 After the optical recording medium of Example 1 was left in a normal indoor environment for 6 months, recording, reproduction, and erasing were performed in the same manner as in Example 1, but no particular deterioration was observed.

また、60’C180%相対湿度中に20日間放置した
後も同様に異常は認められなかった。
Further, no abnormality was similarly observed after being left in 60'C180% relative humidity for 20 days.

[発明の効果] 本発明は光記録媒体の記録層を3b、leおよび(3e
からなる特定の組成で構成したので、次のごとき優れた
効果を奏するものである。
[Effect of the invention] The present invention provides a recording layer of an optical recording medium with 3b, le and (3e
Since it is made up of a specific composition consisting of, it has the following excellent effects.

(1)  記録に要するパワーが低く、記録の高速消去
が可能であり、かつ記録マークの熱的安定性の高い光記
録媒体とすることができた。
(1) An optical recording medium that requires low power for recording, enables high-speed erasing of records, and has high thermal stability of recorded marks can be obtained.

(2)耐湿熱性に優れた光記録媒体とすることができた
(2) An optical recording medium with excellent heat and humidity resistance could be obtained.

Claims (1)

【特許請求の範囲】[Claims] (1)基板上に記録層を備え、該記録層に光を照射する
ことによって、情報の記録、再生および消去が可能であ
る光記録媒体において、上記記録層の組成が、下記の一
般式で表わされる範囲にあることを特徴とする光記録媒
体。 (SbXTe100−X)100−Y(Te50Ge5
0)YここでXは、75>X>70、 Yは、25≧Y≧1 括弧内のX、100−X、50および50は、それぞれ
、括弧内の成分であるアンチモン(Sb)、テルル(T
e)、テルル(Te)およびゲルマニウム(Ge)の原
子数比を示す。また、括弧外の100−YとYは、それ
ぞれ、TeとSbの原子%の合計と、テルルとゲムマニ
ウム(Te50Ge50)の合計の原子%を示す。
(1) In an optical recording medium that has a recording layer on a substrate and can record, reproduce, and erase information by irradiating the recording layer with light, the composition of the recording layer is expressed by the following general formula. An optical recording medium characterized by being within the range indicated. (SbXTe100-X)100-Y(Te50Ge5
0) Y where X is 75>X>70, Y is 25≧Y≧1 (T
e) shows the atomic ratio of tellurium (Te) and germanium (Ge). Further, 100-Y and Y outside the parentheses indicate the total atomic % of Te and Sb and the total atomic % of tellurium and gemmanium (Te50Ge50), respectively.
JP62274332A 1987-10-29 1987-10-29 Optical recording medium Expired - Fee Related JP2629746B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62274332A JP2629746B2 (en) 1987-10-29 1987-10-29 Optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62274332A JP2629746B2 (en) 1987-10-29 1987-10-29 Optical recording medium

Publications (2)

Publication Number Publication Date
JPH01115685A true JPH01115685A (en) 1989-05-08
JP2629746B2 JP2629746B2 (en) 1997-07-16

Family

ID=17540180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62274332A Expired - Fee Related JP2629746B2 (en) 1987-10-29 1987-10-29 Optical recording medium

Country Status (1)

Country Link
JP (1) JP2629746B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371887A (en) * 1989-08-11 1991-03-27 Hisankabutsu Glass Kenkyu Kaihatsu Kk Optical data recording medium
WO2004030919A1 (en) * 2002-09-30 2004-04-15 Matsushita Electric Industrial Co., Ltd. Optical information recording substrate and recording/ reproducing device using it
US6937555B2 (en) 1999-04-28 2005-08-30 Victor Company Of Japan, Ltd. Information recording medium and reproducing apparatus therefor
US7096479B2 (en) 2003-03-27 2006-08-22 Victor Company Of Japan, Ltd. Optical information recording medium
EP2178086A2 (en) 1998-09-09 2010-04-21 Mitsubishi Kagaku Media Co., Ltd. Optical recording method

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0371887A (en) * 1989-08-11 1991-03-27 Hisankabutsu Glass Kenkyu Kaihatsu Kk Optical data recording medium
EP2178086A2 (en) 1998-09-09 2010-04-21 Mitsubishi Kagaku Media Co., Ltd. Optical recording method
US6937555B2 (en) 1999-04-28 2005-08-30 Victor Company Of Japan, Ltd. Information recording medium and reproducing apparatus therefor
US7193958B2 (en) 1999-04-28 2007-03-20 Victor Company Of Japan, Limited Information recording medium and reproducing apparatus therefor
US7447141B2 (en) 1999-04-28 2008-11-04 Victor Company Of Japan, Limited Information recording medium and reproducing apparatus therefor
US7477583B2 (en) 1999-04-28 2009-01-13 Victor Company Of Japan, Limited Information recording medium and reproducing apparatus therefor
US7839757B2 (en) 1999-04-28 2010-11-23 Victor Company Of Japan, Limited Information recording medium and reproducing apparatus therefor
US7864655B2 (en) 1999-04-28 2011-01-04 Victor Company Of Japan, Limited Information recording medium and reproducing apparatus therefor
US8264943B2 (en) 1999-04-28 2012-09-11 JVC Kenwood Corporation Information recording medium and reproducing apparatus therefor
WO2004030919A1 (en) * 2002-09-30 2004-04-15 Matsushita Electric Industrial Co., Ltd. Optical information recording substrate and recording/ reproducing device using it
US7096479B2 (en) 2003-03-27 2006-08-22 Victor Company Of Japan, Ltd. Optical information recording medium

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