JPH011116A - magnetic recording medium - Google Patents
magnetic recording mediumInfo
- Publication number
- JPH011116A JPH011116A JP62-155346A JP15534687A JPH011116A JP H011116 A JPH011116 A JP H011116A JP 15534687 A JP15534687 A JP 15534687A JP H011116 A JPH011116 A JP H011116A
- Authority
- JP
- Japan
- Prior art keywords
- film
- recording medium
- magnetic recording
- cobalt
- corrosion resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 46
- 230000001681 protective effect Effects 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 11
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 229910017052 cobalt Inorganic materials 0.000 claims description 9
- 239000010941 cobalt Substances 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 238000001556 precipitation Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 description 18
- 230000007797 corrosion Effects 0.000 description 18
- 239000010410 layer Substances 0.000 description 9
- 229910002441 CoNi Inorganic materials 0.000 description 6
- 238000000975 co-precipitation Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 238000001704 evaporation Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録媒体に係り、さらに詳しくはその保［
！の改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to magnetic recording media, and more particularly to its protection.
! Regarding the improvement of
磁気記録媒体として、例えば、ベースフィルムの片面に
ＣｏＮｉ、ＣｏＮ１ＰなどのＣｏ（コバルト）を主成分
とする薄膜磁性層を形成するようにしたものがある。し
かし、ＣＯが耐食性に劣るため、大気中の硫化水素、酸
素、水分等と反応し、磁性層の表面に腐食生成層が形成
されやすく、磁気記録媒体の走行性を悪化させるという
問題がある。As a magnetic recording medium, for example, there is one in which a thin film magnetic layer mainly composed of Co (cobalt) such as CoNi or CoN1P is formed on one side of a base film. However, since CO has poor corrosion resistance, it reacts with hydrogen sulfide, oxygen, moisture, etc. in the atmosphere, and a corrosion layer is likely to be formed on the surface of the magnetic layer, resulting in a problem that the running properties of the magnetic recording medium are deteriorated.
この耐食性の悪さを改善するため、特開昭５９−６３０
３１号のようなオゾン処理、特開昭５８−１２８０２５
号のような光照射手段を用い、Ｃ。In order to improve this poor corrosion resistance, JP-A-59-630
Ozone treatment as in No. 31, JP-A-58-128025
C. using a light irradiation means such as No.
を主成分とする薄膜表面に（、ｏ、０．、Ｃｏ、Ｏ。On the surface of a thin film whose main components are (, o, 0., Co, O.
などのＧｏの高次の酸化物層を形成する方法が提案され
ている。A method of forming a high-order oxide layer of Go has been proposed.
しかし、これらの保護層は酸性雰囲気に弱いため、亜硫
酸ガスなどの腐食ガスの存在する雰囲気中では著るしい
腐食が発生するという問題がある。However, since these protective layers are susceptible to acidic atmospheres, there is a problem in that significant corrosion occurs in atmospheres containing corrosive gases such as sulfur dioxide gas.
また、Ｎｉ金属による保護膜、の形成法も提案（例えば
、特開昭５４−２１３０号）されているが、これによる
保護膜は柔いため、耐摩耗性に劣るという欠点がある。A method for forming a protective film using Ni metal has also been proposed (for example, in Japanese Patent Laid-Open No. 54-2130), but the protective film formed using this method is soft and has the disadvantage of poor wear resistance.
本発明は、上記事情に鑑みてなされたもので、耐食性、
耐腐食性及び耐摩耗性を向上させた磁気記録媒体の提供
を目的とする。The present invention has been made in view of the above circumstances, and has improved corrosion resistance,
The purpose of the present invention is to provide a magnetic recording medium with improved corrosion resistance and wear resistance.
上記問題点を解決するため、本発明は、Ｃｏを主成分と
する磁性膜の表面にコバルト析出抑制膜を設け、この膜
の表面に保護膜を設けるようにしたことを特徴とするも
のである。In order to solve the above problems, the present invention is characterized in that a cobalt precipitation suppressing film is provided on the surface of a magnetic film whose main component is Co, and a protective film is provided on the surface of this film. .
コバルト抑制膜は、磁性層中のコバルト原子の保護膜へ
の拡散を防・止するため、優れた耐食性を有する磁気記
録媒体を構成できる。Since the cobalt suppression film prevents cobalt atoms in the magnetic layer from diffusing into the protective film, a magnetic recording medium having excellent corrosion resistance can be constructed.
以下、本発明の一実施例を図面に基づいて説明する。 Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１図は本発明による磁気記録媒体を示す断面図、第２
図は本発明の磁気記録媒体の製造装置を示す模式的構成
図である。FIG. 1 is a sectional view showing a magnetic recording medium according to the present invention, and FIG.
The figure is a schematic configuration diagram showing an apparatus for manufacturing a magnetic recording medium according to the present invention.
第１図に示すように本発明による磁気記録媒体は、ベー
スフィルム１０ （例えば、厚み１０８ｍのポリエチレ
ンテレフタレートフィルム）の片面に、膜厚１５００人
のＣｏ Ｎ ｉ蒸着膜１１ （磁性層）を形成する。As shown in FIG. 1, the magnetic recording medium according to the present invention includes a CoNi deposited film 11 (magnetic layer) having a thickness of 1500 m on one side of a base film 10 (for example, a polyethylene terephthalate film with a thickness of 108 m). .
次に、ＣｏＮｉ蒸着膜１１上にＣｏ析出抑制膜１２を形
成する。このＣｏ析出抑制膜１２としては、不働態化膜
を用いることができる。不働態化膜としては、コバルト
の３価以上の酸化物もしくは含水酸化物を含む層、例え
ば、Ｃ０３０４，Ｃ０ｆ０３、 ＣＯ３０４・ｎ Ｈ２
ＯあるいはＣｏ、Ｏ，−ｎ庄２０などがある。特に、ア
モルファスの含水酸化物は防食効果が大きい。Next, a Co precipitation suppressing film 12 is formed on the CoNi vapor deposited film 11. As this Co precipitation suppression film 12, a passivation film can be used. As the passivation film, a layer containing a trivalent or higher valent oxide or a hydrous oxide of cobalt, such as C0304, C0f03, CO304・n H2
Examples include O, Co, O, -n Sho20, etc. In particular, amorphous hydrated oxides have a great anticorrosion effect.
このようなＣｏ析出抑制膜１１の表面に、さらにＮｉを
主成分とする保護膜１３を形成することにより、耐腐食
性を向上させることができる。即ち、Ｎｉにッケル）は
Ｃｏよりも耐腐食性が高いため、腐食性ガスに対する有
効な保護膜となる。By further forming a protective film 13 containing Ni as a main component on the surface of such Co precipitation suppressing film 11, corrosion resistance can be improved. That is, since Ni (nickel) has higher corrosion resistance than Co, it becomes an effective protective film against corrosive gases.
特にＮｉに対し、原子比Ｆ ｅ ／ Ｎ ｉが０．０５
以上になるようにＦｅ（鉄）を添加すると、耐腐食ガス
性がさらに向上する。Especially for Ni, the atomic ratio Fe/Ni is 0.05
When Fe (iron) is added in the above manner, the corrosion gas resistance is further improved.
また、保護膜中に１０〜５０ａｔ％の酸素を含めると共
に、原子比Ｆｅ／Ｎｉを０．４％以下にすることによっ
て、十分な耐摩耗性を持たせることができる。この場合
、酸素濃度が１Ｑａｔ％以下では柔らかく、５０ａ ｔ
％を越えるともろくなり、耐摩耗性が低下する。なお、
Ｆ ｅ ／ Ｎ ｉを０．４以上にすると、前記酸素範
囲にした場合でも、十分な耐摩耗性は得られない。Further, by including 10 to 50 at % of oxygen in the protective film and controlling the atomic ratio of Fe/Ni to 0.4% or less, sufficient wear resistance can be provided. In this case, when the oxygen concentration is less than 1 Qat%, it is soft and 50at%
%, it becomes brittle and wear resistance decreases. In addition,
When F e /N i is set to 0.4 or more, sufficient wear resistance cannot be obtained even when the oxygen range is set as above.
次に、第２図を用い本発明の磁気記録媒体の製造方法を
説明する。Next, a method for manufacturing a magnetic recording medium according to the present invention will be explained using FIG.
蒸着装置は、第２図に示すように、真空槽ｌ内にはドラ
ム２が回転自在に配設され、底部にはドラム２の側端に
向けて蒸着材を蒸発させる蒸発源３が配設されている。As shown in FIG. 2, the vapor deposition apparatus includes a drum 2 rotatably disposed in a vacuum chamber l, and an evaporation source 3 for evaporating the vapor deposition material toward the side edge of the drum 2 at the bottom. has been done.
ドラム２の両側部の上方には、ベースフィルム１０をド
ラム２に巻出し、蒸着後の磁気記録媒体を巻取るために
、巻出しロール４及び巻取りロール５が設けられている
。Above both sides of the drum 2, an unwinding roll 4 and a winding roll 5 are provided for unwinding the base film 10 onto the drum 2 and winding up the magnetic recording medium after vapor deposition.
さらに、蒸発源３による蒸発領域を規制するために、ド
ラム２の下方に防着板６が水平に配設され、この防着板
６の先端部の上方に酸素ガスを導入するための導入ロア
が設けられている。Furthermore, in order to regulate the evaporation area by the evaporation source 3, an anti-adhesion plate 6 is horizontally arranged below the drum 2, and an introduction lower is provided above the tip of the anti-adhesion plate 6 to introduce oxygen gas. is provided.
次に、以上の構成による真空蒸着装置を用いた磁気記録
媒体の製造方法について説明する。Next, a method for manufacturing a magnetic recording medium using the vacuum evaporation apparatus having the above configuration will be described.
先ず、ベースフィルム１０が巻出しロール４がら引き出
され、ドラム２を半周して巻取りロール５に巻取られる
。ベースフィルム１ｏを一定速度で搬送させながら、蒸
発源３を作動させる。First, the base film 10 is pulled out from the unwinding roll 4, makes half a turn around the drum 2, and is wound onto the winding roll 5. The evaporation source 3 is operated while the base film 1o is transported at a constant speed.
次に、ＣｏＮｉを供給し、厚さ１０μｍベースフィルム
１０上にＣｏＮｉ蒸着膜を１５００人の膜厚に形成する
。Next, CoNi is supplied to form a CoNi vapor deposition film to a thickness of 1500 μm on the base film 10 having a thickness of 10 μm.
次に、この巻き取った原反を６０’Ｃ３０％ＲＨの雰囲
気中に、例えば７日間静置することによって、ＣｏＮｉ
膜の表面にアモルファスの含水酸化物層（Ｃｏ、Ｏ，・
ｎＨｚｏ）を形成する。ついで導入ロアから２００ ｍ
１１７ｍ ｉ ｎで酸素を導入しながらＮｉＦｅ （
３Ｑ％−２０％）合金を蒸着し、厚さ１５０人のＮｉＦ
ｅ保護膜を形成することにより、磁気記録媒体が完成す
る。Next, this rolled up original fabric is left standing in an atmosphere of 60'C 30% RH for, for example, 7 days, so that the CoNi
An amorphous hydrated oxide layer (Co, O, .
nHzo). Then 200 m from the introduction lower
NiFe (
3Q%-20%) alloy deposited, thickness 150NiF
By forming the e-protective film, the magnetic recording medium is completed.
発明者らは、上記実施例のほか、一部の組成材料を変え
、あるいは原子比を変えて第１表に示すように複数の実
施例を作成した。In addition to the above examples, the inventors created a plurality of examples as shown in Table 1 by changing some of the composition materials or changing the atomic ratio.
第１表
ただし、比較例１においては酸素導入量を５００ｍβ／
ｍ ｉ ｎとし、比較例４においては保護膜の形成を
省略し、比較例５ではＣｏ析出抑制膜を設けない場合の
結果が示されている。Table 1 However, in Comparative Example 1, the amount of oxygen introduced was 500 mβ/
In Comparative Example 4, the formation of the protective film was omitted, and in Comparative Example 5, the Co precipitation suppressing film was not provided.
なお、耐食性は、腐食性ガス（Ｓｏｗ ＩＰＰＭ。Note that the corrosion resistance is based on corrosive gas (Sow IPPM).
Ｈ２ＳＯ，５ＰＰＭ、 Ｎｏｔ ＩＰＰＭ、 ３
５℃７０％ＲＨ）雰囲気に２４時間静置した場合の摩擦
係数変化の有無で調べた。また、耐摩耗性は、ＶＨ８型
ＶＴＲを用いてスチル時間を測定した。H2SO, 5PPM, Not IPPM, 3
It was investigated whether or not there was a change in the coefficient of friction when it was left standing in an atmosphere (5° C., 70% RH) for 24 hours. Further, the wear resistance was measured by measuring the still time using a VH8 type VTR.
・第１表より明らかなように、前記実施例で説明した条
件に合せた実施例Ｉ及び２は、耐食性、耐腐食性及び耐
摩耗性のいずれにも優れた特性が示されている。- As is clear from Table 1, Examples I and 2, which were made under the conditions described in the above examples, exhibited excellent properties in terms of corrosion resistance, corrosion resistance, and abrasion resistance.
これに対し、原子比が前記条件範囲外にある比較例１〜
３は耐食性及び耐腐食性については良好な特性が得られ
るものの、耐摩耗性に劣っている。On the other hand, Comparative Examples 1 to 1 whose atomic ratio is outside the above condition range
No. 3 has good corrosion resistance and corrosion resistance, but is inferior in wear resistance.
また、保護膜を設けない場合（比較例４）には、耐食性
及び耐摩耗性のいずれもが劣り、さらにＣｏ析出抑制膜
を設けない場合（比較例５）には、耐食性に劣ることが
わかる。It can also be seen that when no protective film is provided (Comparative Example 4), both corrosion resistance and wear resistance are inferior, and furthermore, when no Co precipitation suppressing film is provided (Comparative Example 5), corrosion resistance is inferior. .
以上説明した通り、本発明によれば、磁性層の表面にＣ
ｏ析出抑制膜を設け、さらに護膜の表面に保護膜を設け
るようにしたため、耐食性及び耐摩耗性を向上させるこ
とができる。As explained above, according to the present invention, carbon is formed on the surface of the magnetic layer.
o Since the precipitation suppressing film is provided and a protective film is further provided on the surface of the protective film, corrosion resistance and wear resistance can be improved.
第１図は本発明の磁気記録媒体を示す断面図、第２図は
本発明の磁気記録媒体を製造するための真空蒸着装置の
一例を示す構成図である。
ｌＯ・・・・・・ベースフィルム、１１・・・・・・Ｃ
ｏ Ｎ ｉ 蒸着膜、１２・・・・・・Ｃｏ析出抑制膜
、１３・・・・・・保護膜。
第１図
第２図FIG. 1 is a sectional view showing a magnetic recording medium of the present invention, and FIG. 2 is a configuration diagram showing an example of a vacuum evaporation apparatus for manufacturing the magnetic recording medium of the present invention. lO...Base film, 11...C
o Ni vapor deposited film, 12...Co precipitation suppression film, 13...protective film. Figure 1 Figure 2
Claims (3)
薄膜を形成した磁気記録媒体において、前記磁性薄膜の
表面に形成されるコバルト析出抑制膜と、該コバルト析
出抑制膜の表面に形成される保護膜とを設けたことを特
徴とする磁気記録媒体。(1) In a magnetic recording medium in which a magnetic thin film containing cobalt as a main component is formed on a base film, a cobalt precipitation suppressing film is formed on the surface of the magnetic thin film, and a protection film is formed on the surface of the cobalt precipitation suppressing film. A magnetic recording medium characterized by being provided with a film.
３価以上の酸化物または含水酸化物を含む膜であること
を特徴とする特許請求の範囲第（１）項に記載の磁気記
録媒体。(2) The magnetic recording medium according to claim (1), wherein the cobalt precipitation suppressing film is a film containing at least a trivalent or higher valent oxide or a hydrous oxide of cobalt.
５０ａｔ％の酸素を含む薄膜であることを特徴とする特
許請求の範囲第（１）項に記載の磁気記録媒体。(3) The protective film contains nickel as a main component and has a
The magnetic recording medium according to claim 1, wherein the magnetic recording medium is a thin film containing 50 at% oxygen.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15534687A JPS641116A (en) | 1987-06-24 | 1987-06-24 | Magnetic recording medium |
| DE3888984T DE3888984T2 (en) | 1987-01-07 | 1988-01-07 | Magnetic record carrier. |
| EP88300103A EP0274437B1 (en) | 1987-01-07 | 1988-01-07 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15534687A JPS641116A (en) | 1987-06-24 | 1987-06-24 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH011116A true JPH011116A (en) | 1989-01-05 |
| JPS641116A JPS641116A (en) | 1989-01-05 |
Family
ID=15603881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15534687A Pending JPS641116A (en) | 1987-01-07 | 1987-06-24 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641116A (en) |
-
1987
- 1987-06-24 JP JP15534687A patent/JPS641116A/en active Pending
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