JPS6313115A - Magnetic recording medium and its production - Google Patents
Magnetic recording medium and its productionInfo
- Publication number
- JPS6313115A JPS6313115A JP15641486A JP15641486A JPS6313115A JP S6313115 A JPS6313115 A JP S6313115A JP 15641486 A JP15641486 A JP 15641486A JP 15641486 A JP15641486 A JP 15641486A JP S6313115 A JPS6313115 A JP S6313115A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magnetic
- film
- magnetic recording
- torr
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000001301 oxygen Substances 0.000 claims abstract description 11
- 239000007789 gas Substances 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000011651 chromium Substances 0.000 claims abstract description 9
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 6
- 239000010941 cobalt Substances 0.000 claims abstract description 6
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 5
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 3
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 11
- 150000002739 metals Chemical class 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000010955 niobium Substances 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000000470 constituent Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims 1
- 229910001868 water Inorganic materials 0.000 abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 10
- 230000007423 decrease Effects 0.000 abstract description 4
- 229920001721 polyimide Polymers 0.000 abstract description 4
- 229910052735 hafnium Inorganic materials 0.000 abstract description 3
- 229910052726 zirconium Inorganic materials 0.000 abstract description 2
- 229910052689 Holmium Inorganic materials 0.000 abstract 1
- 239000004642 Polyimide Substances 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 description 15
- 229910045601 alloy Inorganic materials 0.000 description 11
- 239000000956 alloy Substances 0.000 description 11
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 10
- 239000010952 cobalt-chrome Substances 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000005415 magnetization Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- WAIPAZQMEIHHTJ-UHFFFAOYSA-N [Cr].[Co] Chemical class [Cr].[Co] WAIPAZQMEIHHTJ-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、磁気記録装置に用いられる磁気記録体及びそ
の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic recording body used in a magnetic recording device and a method for manufacturing the same.
（従来の技術）
磁気記録装置の記録密度の向上は、斯界の変わらぬ趨勢
であり、従来の長手（面内）磁化を用いる磁気記録方式
にかわり近年原理的に高密度記録の可能な方式として垂
直磁化を用いる磁気記録方式が提案されている。ここで
用いられる垂直異方性を有する磁気記録体としてスパッ
タ及び蒸着で作製したＣｏ−Ｃｒ合金膜に代表されるＣ
ｏ合金膜が代表的である。(Prior art) Improvement in the recording density of magnetic recording devices is a constant trend in the field, and in recent years, the conventional magnetic recording method using longitudinal (in-plane) magnetization has been replaced by a method that is theoretically capable of high-density recording. A magnetic recording method using perpendicular magnetization has been proposed. The magnetic recording material with perpendicular anisotropy used here is a Co-Cr alloy film produced by sputtering and vapor deposition.
o alloy film is typical.
（発明が解決しようとする問題点）
これらの磁気記録体には、可撓性を有するフレキシブル
の基板たとえばポリエチレンテレフタ−レートまたはポ
イミド等のフィルムを用いるフレキシブル磁気ディスク
や磁気テープ等がある。垂直異方性を有するＣｏ合金膜
をフレキシブル基板上へ形成し、これを実用化するには
いくつかの間開点があった。すなわち、スパッタ法及び
蒸着法で形成した磁性膜は、一般にお大きな内部応力、
主として引張り応力を有しており通常用いられるフレキ
シブルフィルムでは、カールが発生し、著しい場合には
膜にクラックが発生する。このようにカールした記録体
は、磁気記録装置では安定な走行が出来ず商用レベルで
は使用不可能である。そこで、ベースフィルムの両面に
磁性膜を形成するフレキシブル磁気ディスクではカール
フリーを実現するためにそれぞれの面の磁性膜の内部応
力を均衡させて形成することが試みられているが、作製
条件の微妙な変動により均衡がズしてカールが発生する
困難な間圧があった。(Problems to be Solved by the Invention) These magnetic recording bodies include flexible magnetic disks and magnetic tapes using flexible substrates such as polyethylene terephthalate or polyimide films. There has been some progress in forming a Co alloy film with perpendicular anisotropy on a flexible substrate and putting it into practical use. In other words, magnetic films formed by sputtering and vapor deposition generally have large internal stress,
In commonly used flexible films that mainly have tensile stress, curling occurs, and in severe cases, cracks occur in the film. A recording medium curled in this manner cannot run stably in a magnetic recording device and cannot be used on a commercial level. Therefore, attempts have been made to create a flexible magnetic disk in which magnetic films are formed on both sides of a base film by balancing the internal stress of the magnetic film on each side in order to achieve curl-free formation, but the manufacturing conditions are delicate. There was a difficult gap where the balance was shifted due to fluctuations and curling occurred.
そこで、本質的にこのような内部応力を低下させる方法
が必要される。本発明者は、第８回日本応用磁気学会学
術講演会概要集ｐ７記載の如＜ ＣｏＣｒ垂直記録媒体
においてＣｏＣｒ媒体の形成時の初期真空度を低下させ
、すなわち残留する空気分圧を高め膜中へ酸素、窒素及
び水を含有させることにより内部応力が減少しカールフ
リーを実現出来ることを示した。しかしながら、ＣｏＣ
ｒ媒体の空気分圧を高めることは垂直磁化記録に要求さ
れるＣｏＣｒ媒体の垂直磁気異方性を低下させ記録再生
上問題があった。本発明はかかる現状の問題点を解決し
、内部応力を低減しかつ高垂直異方性を有する高性能な
磁気記録体とその製造方法を提供することを目的とした
ものである。Therefore, a method is essentially needed to reduce such internal stress. The present inventor has developed a technique for reducing the initial degree of vacuum at the time of forming a CoCr medium in a CoCr perpendicular recording medium, that is, increasing the residual air partial pressure and increasing the residual air partial pressure in the CoCr perpendicular recording medium, as described in p. It was shown that by incorporating oxygen, nitrogen and water into the material, internal stress can be reduced and curl-free properties can be achieved. However, CoC
Increasing the air partial pressure of the r medium lowers the perpendicular magnetic anisotropy of the CoCr medium required for perpendicular magnetization recording, which poses a problem in recording and reproduction. It is an object of the present invention to solve these current problems and provide a high-performance magnetic recording body that reduces internal stress and has high perpendicular anisotropy, and a method for manufacturing the same.
（問題点を解決するための手段）
本発明は、酸素、窒素及び水を含有し、コバルト、クロ
ム、及び非磁性金属を主成分とすることを特徴とする磁
気記録体であり、その製造方法はコバルト、クロム、非
磁性金属を主成分とする記録媒体の形成時の空気分圧が
１×１０−６ トール（Ｔｏｒｒ）から１×１０−５
トール（Ｔｏｒｒ）であることを特徴とするものである
。(Means for Solving the Problems) The present invention is a magnetic recording medium characterized by containing oxygen, nitrogen, and water and having cobalt, chromium, and a nonmagnetic metal as main components, and a method for manufacturing the magnetic recording medium. The air partial pressure during the formation of a recording medium whose main components are cobalt, chromium, and non-magnetic metals is 1 x 10-6 Torr to 1 x 10-5
It is characterized by being Torr.
（作用）
本方法によれば、空気の主要成分である酸素、窒素及び
水を微量含有させることにより、コバルト・クロム合金
膜の内部応力を低減させ、かつタンタルを含有させるこ
とにより垂直磁気異方性を改善させる作用を有する。(Function) According to this method, the internal stress of the cobalt-chromium alloy film is reduced by containing small amounts of oxygen, nitrogen, and water, which are the main components of air, and the perpendicular magnetic anisotropy is reduced by containing tantalum. It has the effect of improving sex.
以下に実施例を述べる。Examples will be described below.
実施例に用いた基板には、ポリイミドフィルム、ポリエ
チレンテレフタレートフィルム（ＰＥＴ）を使用し、垂
直記録媒体作製にはＲＦマグネトロンスパッタ装置を用
いた。膜の内部応力δの測定は、カンチレバー法により
評価を行なった。A polyimide film and a polyethylene terephthalate film (PET) were used as the substrates used in the examples, and an RF magnetron sputtering device was used to fabricate the perpendicular recording medium. The internal stress δ of the film was evaluated by the cantilever method.
（実施例１）
スパッタターゲットにはＣｏＣｒＴａの組成比がそれぞ
れ原子％で８０：１７．５：２．５の合金ターゲットを
使用した。第１表はその実験条件を示す。(Example 1) An alloy target having a CoCrTa composition ratio of 80:17.5:2.5 in atomic % was used as a sputter target. Table 1 shows the experimental conditions.
第１表
酸素、窒素及び水を含有するＣｏＣｒＴａ媒体の作製は
、スパッタ開始前の残留ガスの初期真空度を種々変えて
成膜することによって行った。それぞれのスパッタガス
雰囲気を質量分析装置で測定した結果、初期真空度が低
い程、空気の主成分である酸素、窒素及び水の測定強度
が大きいことが確認された。第１図は、初期真空圧力Ｐ
ｉと膜の内部応力δ及びＣｏＣｒＴａ膜のＭ−Ｈループ
（Ｍ：磁化、Ｈ：印加磁界）から求めた垂直異方性磁界
Ｈｋの関係を示す。比較例１として実施例１のＣｏＣｒ
Ｔａ合金ターゲットからＴａを除いたＣｏＣｒＴａ合金
ターゲット（Ｃｏ：Ｃｒ ＝８０：２０）を用いて実施
例と同一条件で成膜し、酸素、窒素及び水を含有させた
ＣｏＣｒ膜の垂直異方性磁界Ｈｋを同じく第１図に示し
た。第１図より、スパッタ時の初期真空度を変え膜中へ
酸素、窒素及び水を含有させることによりＣｏＣｒＴａ
膜の内部応力を低減させかつ垂直磁気異方性を満足させ
る領域は空気分圧がおよそＩ Ｘ １Ｏ−５Ｔｏｒｒの
範囲である。一方、Ｔａを含有しないＣｏＣｒ媒体は、
上記の記載範囲では高垂直異方性を達成できない。Table 1 A CoCrTa medium containing oxygen, nitrogen, and water was prepared by forming a film while varying the initial vacuum degree of the residual gas before starting sputtering. As a result of measuring each sputtering gas atmosphere with a mass spectrometer, it was confirmed that the lower the initial degree of vacuum, the greater the measured intensity of oxygen, nitrogen, and water, which are the main components of air. Figure 1 shows the initial vacuum pressure P
The relationship between i, the internal stress δ of the film, and the perpendicular anisotropy magnetic field Hk obtained from the M-H loop (M: magnetization, H: applied magnetic field) of the CoCrTa film is shown. CoCr of Example 1 as Comparative Example 1
Perpendicular anisotropy magnetic field of a CoCr film containing oxygen, nitrogen, and water, which was formed under the same conditions as in the example using a CoCrTa alloy target (Co:Cr = 80:20) with Ta removed from the Ta alloy target. Hk is also shown in FIG. From Figure 1, it can be seen that by changing the initial vacuum degree during sputtering and incorporating oxygen, nitrogen, and water into the film, CoCrTa
The region where the internal stress of the film can be reduced and the perpendicular magnetic anisotropy can be satisfied is in a range where the air partial pressure is about I x 1O-5 Torr. On the other hand, CoCr medium that does not contain Ta,
High perpendicular anisotropy cannot be achieved within the range described above.
（実施例２）
ベースフィルムにポリイミドフィルムを用い、磁性膜作
製には第９図に示す連続成膜用のスパッタ装置を使用し
た。ターゲットにはＣｏＣｒＴａの組成比が原子％でそ
れぞれ８０：１６：４である合金ターゲットを用いた。(Example 2) A polyimide film was used as the base film, and a sputtering apparatus for continuous film formation shown in FIG. 9 was used to fabricate the magnetic film. An alloy target having a CoCrTa composition ratio of 80:16:4 in atomic % was used as the target.
ベースフィルムは予め吸蔵ガスを放出させるため加熱し
たキャンに治せて巻き返し十分ガス出しを行い、残留ガ
ス圧力を３Ｘ１０−７Ｔｏｒｒ以下に保持した。スパッ
タガス導入部から空気を導入し種々の圧力に設定し、こ
れにスパッタガスとしてアルゴンを導入してスパッタし
て磁性膜を作製した。これらのスパッタガス雰囲気を質
量分析装置で測定した結果、アルゴンの他に酸素、窒素
及び水を主成分であった。スパッタ条件でスパッタ圧力
、スパッタパワー、膜厚は第１表と同様にし、スパッタ
装置は第９図中のフィルム１と膜の防着用マスク５の間
隔は極力狭くした。フィルム１はフィルム送り出しボビ
ン２からキャン４に沿わせて巻き取りボビン３に巻き取
られる。In order to release the occluded gas, the base film was cured in a heated can in advance, and the film was rolled back to release the gas sufficiently, and the residual gas pressure was maintained at 3×10 −7 Torr or less. Air was introduced from the sputtering gas inlet and set at various pressures, and argon was introduced as a sputtering gas and sputtered to produce a magnetic film. As a result of measuring these sputtering gas atmospheres with a mass spectrometer, the main components were oxygen, nitrogen, and water in addition to argon. As for the sputtering conditions, the sputtering pressure, sputtering power, and film thickness were the same as those shown in Table 1, and the spacing between the film 1 and the film protection mask 5 in FIG. 9 in the sputtering apparatus was set as narrow as possible. A film 1 is wound from a film feeding bobbin 2 onto a winding bobbin 3 along a can 4.
第２図は、スパッタ装置内へ導入した空気の分圧Ｐとそ
の条件下で成膜した膜の内部応力δと垂直磁気磁界Ｈｋ
の関係を示す。図にはＣｏＣｒ（Ｃｏ８０ａｔ％。Figure 2 shows the partial pressure P of air introduced into the sputtering equipment, the internal stress δ of the film formed under that condition, and the perpendicular magnetic field Hk.
shows the relationship between The figure shows CoCr (Co80at%).
Ｃｒ２Ｏ％）の場合の比較例を示す。A comparative example in the case of Cr2O%) is shown below.
第２図に示される如く、空気の分圧を大きくするにつれ
て膜の内部応力が低減し、カールが減少する。一方、垂
直磁気異方性は、ＣｏＣｒＴａ合金膜では多少減少する
が、ＣｏＣｒＴａ合金膜と較べて格段に改善され磁気特
性の観点から空気分圧は
Ｉ Ｘ １Ｏ−６Ｔｏｒｒから１×１０−５Ｔｏｒｒが
好ましい。As shown in FIG. 2, as the partial pressure of air is increased, the internal stress of the membrane is reduced and curling is reduced. On the other hand, although the perpendicular magnetic anisotropy decreases somewhat in the CoCrTa alloy film, it is much improved compared to the CoCrTa alloy film, and from the viewpoint of magnetic properties, the air partial pressure is preferably I x 10-6 Torr to 1 x 10-5 Torr. .
（実施例３）
ターゲットにＣｏＣｒＣＣｏ（８０ａｔ％、 Ｃｒ２０
ａｔ％）合金を用いその他の非磁性金属ＭとしてＡｒ、
Ｔｉ、 Ｈｆ、 Ｈｂ。(Example 3) CoCrCCo (80at%, Cr20
at%) alloy and other non-magnetic metal M as Ar,
Ti, Hf, Hb.
Ｈｏ小片をターゲット上にＣｏＣｒＭが原子％で８０：
１８：２となるように配置した。作製条件は、実施例２
の条件（ターゲットの条件を除く）のもとで行った。CoCrM is 80 atomic% on the target with Ho pieces:
The ratio was 18:2. The production conditions are as in Example 2.
(excluding target conditions).
実施例２と同様に第３から第７図までにそれぞれＣｏＣ
ｒＭのＭがＺｒ、 Ｔｉ、 Ｈｆ、 Ｎｂ、 Ｈｏであ
る実験結果である。それぞれの図に示される如く、空気
分厚を大きくするにつれて膜の内部応力が低減し、垂直
異邦性は、非磁性金属を含有させることによってＣｏＣ
ｒ合金膜より改善され、磁気特性の観点から空気分圧は
１×１０−６ＴｏｒｒからＩ Ｘ １Ｏ−５Ｔｏｒｒが
好ましい。As in Example 2, CoC
These are experimental results in which M in rM is Zr, Ti, Hf, Nb, or Ho. As shown in each figure, as the air thickness increases, the internal stress of the film decreases, and the vertical heterogeneity decreases due to the inclusion of non-magnetic metal.
From the viewpoint of magnetic properties, the air partial pressure is preferably from 1 x 10-6 Torr to I x 10-5 Torr.
（実施例４）
ターゲットにＣｏＣｒ（Ｃｏ８０ａｔ％、 Ｃｒ２０ａ
ｔ％）合金を用いその他の非磁性金属としてＴａ、 Ｚ
ｒの小片をターゲット上に配置しＣｏＣｒＴａＺｒが原
子％で８０二１８：１：１となる合金媒体を実施例２の
条件（ターゲットの条件を除く）のもとで作製した。(Example 4) CoCr (Co80at%, Cr20a
t%) alloy and other non-magnetic metals such as Ta and Z.
A small piece of CoCrTaZr was placed on a target to produce an alloy medium having a CoCrTaZr content of 80218:1:1 in atomic % under the conditions of Example 2 (excluding the target conditions).
第８図は、作製した合金媒体の内部応力と垂直異方性と
空気分圧の関係を示す。図には
ＣｏＣｒ（Ｃｏ８０ａｔ％、 Ｃｒ２０ａｔ％）の比較
例も示す。図の如く、非磁性合金が２つ以上でも実施例
２，３と同様の効果が得られた。FIG. 8 shows the relationship between internal stress, perpendicular anisotropy, and air partial pressure of the produced alloy medium. The figure also shows a comparative example of CoCr (80 at% Co, 20 at% Cr). As shown in the figure, the same effects as in Examples 2 and 3 were obtained even when two or more nonmagnetic alloys were used.
（発明の効果）
以上の説明のように、コバルト・クロム・タンタルを主
成分とする記録媒体の形成時の雰囲気の空気分圧をｌＸ
１Ｏ−６ＴｏｒｒからｌＸ１Ｏ−５Ｔｏｒｒとすること
により、膜中に酸素、窒素及び水を含有させ、膜の内部
応力を低減することによりカールを少なくもしくはカー
ルフリーを実現出来る。またタンタルを含有させること
に磁気特性とくに垂直磁気異方性を向上させる。(Effect of the invention) As explained above, the partial pressure of air in the atmosphere at the time of forming a recording medium mainly composed of cobalt, chromium, and tantalum is
By adjusting the pressure from 10-6 Torr to 1X10-5 Torr, oxygen, nitrogen, and water are contained in the film, and by reducing the internal stress of the film, curling can be reduced or curl-free can be realized. Furthermore, containing tantalum improves magnetic properties, especially perpendicular magnetic anisotropy.
第１図から第８図は本発明の実施例の結果を示す図、第
９図は、実験に用いたスパッタ装置の概略図である。図
中１はフィルム、２は送り出しボビン、３は巻き取りボ
ビン、４はキャン、５は膜防着マスクである。
・ 、こ。
代理人弁理士内原 、晋：、７′
＼、。
第 １ 図
第 ２ 図
第 ３ 図
Ｐ （Ｔｏｒｒ）
第 ４ 図
Ｐ （Ｔｏｒｒ）
第 ５ 図
１０ ’ １０ ”
第 ６ 図
１ｏ−６１０−５
第 ７ 図
１Ｏ−６１０−５
Ｐ （Ｔｏｒｒ）
第 ８ 図
Ｐ （Ｔｏｒｒ）1 to 8 are diagrams showing the results of Examples of the present invention, and FIG. 9 is a schematic diagram of the sputtering apparatus used in the experiment. In the figure, 1 is a film, 2 is a delivery bobbin, 3 is a take-up bobbin, 4 is a can, and 5 is a membrane protection mask.
· ,child. Representative Patent Attorney Susumu Uchihara: 7′ ＼. Fig. 1 Fig. 2 Fig. 3 P (Torr) Fig. 4 P (Torr) Fig. 5 Fig. 10 '10'' Fig. 6 Fig. 1o-610-5 Fig. 7 Fig. 1O-610-5 P (Torr) Fig. 8 P (Torr)
Claims (4)
および非磁性金属を主成分とすることを特徴とする磁気
記録体。(1) Contains the main constituent elements of air, including cobalt, chromium,
and a magnetic recording material characterized by containing a non-magnetic metal as a main component.
、ジルコニュウム（Ｚｒ）、バフニュウム（Ｈｆ）、ニ
オビュウム（Ｎｂ）、ホロニュウム（Ｈｏ）の一つもし
くは二つ以上である特許請求の範囲第１項記載の磁気記
録体。(2) Non-magnetic metals are tantalum (Ta) and titanium (Ti)
The magnetic recording body according to claim 1, which is one or more of the following: , zirconium (Zr), buffnium (Hf), niobium (Nb), and holonium (Ho).
の範囲第１項または第２項記載の磁気記録体。(3) The magnetic recording medium according to claim 1 or 2, wherein the main components of air are oxygen, nitrogen, and moisture.
とする記録媒体の形成時の雰囲気ガス中の空気の分圧が
１×１０＾−＾６トール（Ｔｏｒｒ）から１×１０＾−
＾５トール（Ｔｏｒｒ）であることを特徴とする磁気記
録体の製造方法。(4) The partial pressure of air in the atmospheric gas when forming a recording medium mainly composed of cobalt, chromium, and other non-magnetic metals ranges from 1 x 10^-^6 Torr (Torr) to 1 x 10^-
A method for manufacturing a magnetic recording medium, characterized in that the magnetic recording medium is ^5 Torr.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15641486A JPS6313115A (en) | 1986-07-02 | 1986-07-02 | Magnetic recording medium and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15641486A JPS6313115A (en) | 1986-07-02 | 1986-07-02 | Magnetic recording medium and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6313115A true JPS6313115A (en) | 1988-01-20 |
Family
ID=15627227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15641486A Pending JPS6313115A (en) | 1986-07-02 | 1986-07-02 | Magnetic recording medium and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6313115A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02233274A (en) * | 1989-03-08 | 1990-09-14 | Canon Inc | Printer |
| JPH02285507A (en) * | 1989-04-26 | 1990-11-22 | Hitachi Metals Ltd | Magnetic recording medium |
| JPH06196323A (en) * | 1992-10-30 | 1994-07-15 | Nec Corp | Magnetic recording medium |
| JP2009035824A (en) * | 2008-10-31 | 2009-02-19 | Ulvac Japan Ltd | Copper film production method, and sputtering device used for the method |
| JP2009295929A (en) * | 2008-06-09 | 2009-12-17 | Alps Electric Co Ltd | Magnetic substrate and manufacturing method thereof |
-
1986
- 1986-07-02 JP JP15641486A patent/JPS6313115A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02233274A (en) * | 1989-03-08 | 1990-09-14 | Canon Inc | Printer |
| JPH02285507A (en) * | 1989-04-26 | 1990-11-22 | Hitachi Metals Ltd | Magnetic recording medium |
| JPH06196323A (en) * | 1992-10-30 | 1994-07-15 | Nec Corp | Magnetic recording medium |
| JP2009295929A (en) * | 2008-06-09 | 2009-12-17 | Alps Electric Co Ltd | Magnetic substrate and manufacturing method thereof |
| JP2009035824A (en) * | 2008-10-31 | 2009-02-19 | Ulvac Japan Ltd | Copper film production method, and sputtering device used for the method |
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