JPH0110931Y2 - - Google Patents

Info

Publication number
JPH0110931Y2
JPH0110931Y2 JP10563985U JP10563985U JPH0110931Y2 JP H0110931 Y2 JPH0110931 Y2 JP H0110931Y2 JP 10563985 U JP10563985 U JP 10563985U JP 10563985 U JP10563985 U JP 10563985U JP H0110931 Y2 JPH0110931 Y2 JP H0110931Y2
Authority
JP
Japan
Prior art keywords
wafer
boat
protrusion
light
wafer boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10563985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214733U (US06368395-20020409-C00050.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10563985U priority Critical patent/JPH0110931Y2/ja
Publication of JPS6214733U publication Critical patent/JPS6214733U/ja
Application granted granted Critical
Publication of JPH0110931Y2 publication Critical patent/JPH0110931Y2/ja
Expired legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP10563985U 1985-07-12 1985-07-12 Expired JPH0110931Y2 (US06368395-20020409-C00050.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10563985U JPH0110931Y2 (US06368395-20020409-C00050.png) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10563985U JPH0110931Y2 (US06368395-20020409-C00050.png) 1985-07-12 1985-07-12

Publications (2)

Publication Number Publication Date
JPS6214733U JPS6214733U (US06368395-20020409-C00050.png) 1987-01-29
JPH0110931Y2 true JPH0110931Y2 (US06368395-20020409-C00050.png) 1989-03-29

Family

ID=30980260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10563985U Expired JPH0110931Y2 (US06368395-20020409-C00050.png) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPH0110931Y2 (US06368395-20020409-C00050.png)

Also Published As

Publication number Publication date
JPS6214733U (US06368395-20020409-C00050.png) 1987-01-29

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