JPH01107866U - - Google Patents
Info
- Publication number
- JPH01107866U JPH01107866U JP366688U JP366688U JPH01107866U JP H01107866 U JPH01107866 U JP H01107866U JP 366688 U JP366688 U JP 366688U JP 366688 U JP366688 U JP 366688U JP H01107866 U JPH01107866 U JP H01107866U
- Authority
- JP
- Japan
- Prior art keywords
- scans
- beam current
- scan
- data
- current suppression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001629 suppression Effects 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 7
- 230000007423 decrease Effects 0.000 claims 1
- 238000002513 implantation Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP366688U JPH01107866U (enExample) | 1988-01-13 | 1988-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP366688U JPH01107866U (enExample) | 1988-01-13 | 1988-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01107866U true JPH01107866U (enExample) | 1989-07-20 |
Family
ID=31205504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP366688U Pending JPH01107866U (enExample) | 1988-01-13 | 1988-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01107866U (enExample) |
-
1988
- 1988-01-13 JP JP366688U patent/JPH01107866U/ja active Pending
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